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engineering, electrical & electronic (6) 6
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stiction (4) 4
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IEEE Transactions on Electron Devices, ISSN 0018-9383, 10/2019, Volume 66, Issue 10, pp. 4361 - 4366
RF MEMS ohmic switches are prone to stiction and contact degradation. In literature, bumps are made at the contact area to reduce stiction with additional... 
Fabrication | Radio frequency | Electrodes | Micromechanical devices | switching speed | Gold | contact analysis | Contacts | Bump | ohmic switch | Springs | stiction
Journal Article
Microsystem Technologies, ISSN 0946-7076, 9/2018, Volume 24, Issue 9, pp. 3863 - 3866
RF MEMS switches have moving microstructures which are realized either by dry release method or by wet releasing process. In dry release process, suspended... 
Electronics and Microelectronics, Instrumentation | Engineering | Mechanical Engineering | Nanotechnology | NANOSCIENCE & NANOTECHNOLOGY | DESIGN | PHYSICS, APPLIED | MATERIALS SCIENCE, MULTIDISCIPLINARY | ENGINEERING, ELECTRICAL & ELECTRONIC | Plasma physics | Switches | Stiction
Journal Article
Transactions on Electrical and Electronic Materials, ISSN 1229-7607, 4/2019, Volume 20, Issue 2, pp. 113 - 117
Radio frequency micro-electro-mechanical system (RF MEMS) switch is basic component for transponders used in communication system. Switch “OFF/ON” capacitance... 
Materials Science | LCR parameter | Optical and Electronic Materials | Electronics and Microelectronics, Instrumentation | RF MEMS switch | Capacitance ratio | Parasitic | 전기공학
Journal Article
Microsystem Technologies, ISSN 0946-7076, 07/2019, Volume 25, Issue 7, pp. 2821 - 2829
This paper presents the design and fabrication of MEMS based electro-thermally actuated square membrane/plate with gold and silicon dioxide bimorph beams. The... 
PHYSICS, APPLIED | MATERIALS SCIENCE, MULTIDISCIPLINARY | LOW-VOLTAGE | FILTERS | NANOSCIENCE & NANOTECHNOLOGY | MODEL | SPRING CONSTANT | MIRROR | ENGINEERING, ELECTRICAL & ELECTRONIC | Gold | Square plates | Micromachining | Silicas | Photoresists | Silicon | Cavity resonators | Baking | Beams (structural) | Silicon dioxide
Journal Article
Microsystem Technologies, ISSN 0946-7076, 07/2019, Volume 25, Issue 7, p. 2821
This paper presents the design and fabrication of MEMS based electro-thermally actuated square membrane/plate with gold and silicon dioxide bimorph beams. The... 
Integrated circuit fabrication | Silica
Journal Article
Journal of Micromechanics and Microengineering, ISSN 0960-1317, 02/2017, Volume 27, Issue 2, p. 24001
Variation in actuation voltage for RF MEMS switches is observed as a result of stress-generated buckling of MEMS structures. Large voltage driven RF-MEMS... 
stress | buckling | RF MEMS | reinforcement | pull-in voltage | DESIGN | INSTRUMENTS & INSTRUMENTATION | PHYSICS, APPLIED | NANOSCIENCE & NANOTECHNOLOGY | ENGINEERING, ELECTRICAL & ELECTRONIC
Journal Article
Journal of Electrical and Computer Engineering, ISSN 2090-0147, 2016, Volume 2016, pp. 1 - 7
  RF MEMS devices are known to be superior to their solid state counterparts in terms of power consumption and electromagnetic response. Major limitations of... 
Design | Bridges | Electrodes | Sensors | Microelectromechanical systems | Electric potential | Switches | Voltage | Actuation | Reliability | Devices | Switching
Journal Article
Journal of Micro/Nanolithography, MEMS, and MOEMS, ISSN 1932-5150, 10/2016, Volume 15, Issue 4, pp. 045001 - 045001
A compact radiofrequency (RF) MEMS single-pole double-throw (SPDT) switch based on series capacitive configuration is proposed. The critical process parameters... 
radiofrequency MEMS | See-Saw | Single-Pole Double-Throw | fabrication | reliability | see-saw | MATERIALS SCIENCE, MULTIDISCIPLINARY | single-pole double-throw | STICTION | NANOSCIENCE & NANOTECHNOLOGY | OPTICS | ENGINEERING, ELECTRICAL & ELECTRONIC
Journal Article
Journal of Micro/ Nanolithography, MEMS, and MOEMS, ISSN 1932-5150, 10/2018, Volume 17, Issue 4, p. 1
The presence of dielectric charging in a switch causes stiction and drift in pull-in voltage. A design to alleviate charging issues for RF MEMS switches is... 
capacitive switch | dielectric charging | RF MEMS | actuation electrode | transmission line | MATERIALS SCIENCE, MULTIDISCIPLINARY | NANOSCIENCE & NANOTECHNOLOGY | RELIABILITY | OPTICS | ENGINEERING, ELECTRICAL & ELECTRONIC
Journal Article
Journal of Micro/Nanolithography, MEMS, and MOEMS, ISSN 1932-5150, 7/2015, Volume 14, Issue 3, pp. 035002 - 035002
The design, fabrication, and mechanical characterization of a compact-reduced stiction see-saw radio frequency MEMS switch are presented. The switch has a... 
RF MEMS switch | overlap capacitance | floating metal | stiction | switching time | MECHANICS | MATERIALS SCIENCE, MULTIDISCIPLINARY | NANOSCIENCE & NANOTECHNOLOGY | OPTICS | STRESS | ENGINEERING, ELECTRICAL & ELECTRONIC
Journal Article
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