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AIP Advances, ISSN 2158-3226, 08/2016, Volume 6, Issue 8, pp. 85111 - 085111-8
Reactive ion etching (RIE) technology for iridium with CF4/O2/Ar gas mixtures and aluminum mask at high temperatures up to 350 °C was developed. The influence... 
Thin films | Ion etching | Reactive ion etching | Aluminum | Process parameters | Inspection | Iridium | Substrates | Gas mixtures
Journal Article
tm - Technisches Messen, ISSN 0171-8096, 07/2016, Volume 83, Issue 7, pp. 410 - 416
In this work, we present a low cost multi gas detection system for simultaneous measurement of up to three gases. The main conclusions are based on the... 
nicht dispersive IR | Thermopile | non dispersive IR | carbon dioxide | Methan | Kohlendioxid | Messung | Gaskonzentration | gas concentration | methane | measurement
Journal Article
International Journal of Microwave Science and Technology, ISSN 1687-5826, 2015, Volume 2015
  A novel wide stopband (WSB) low pass filter based on combination of defected ground structure (DGS), defected microstrip structure (DMS), and compensated... 
Design | Behavior | Circuits | Colleges & universities | Rejection | Design engineering | Noise levels | Communication systems | Simulation | Low pass filters | Low pass | Microwaves
Journal Article
Acta Crystallographica Section E: Structure Reports Online, ISSN 1600-5368, 12/2013, Volume 69, Issue 12, pp. m686 - m687
The title compound, [Ge2(C8H17N2)4O2], crystallizes with imposed twofold symmetry, which allows the monodentate amidinate ligands to be arranged in a cisoid... 
Journal Article
Microwave and Optical Technology Letters, ISSN 0895-2477, 10/2011, Volume 53, Issue 10, pp. 2433 - 2438
In this article, we present a new technique to obtain a sharp symmetric response with lower losses for microstrip coupled‐line bandpass filters using the... 
compactness | discontinuity correction | passband | parallel band pass filter | multilayer method | reject band | DEFECTED GROUND STRUCTURE | DESIGN | PLANE | OPTICS | ENGINEERING, ELECTRICAL & ELECTRONIC | Discontinuity | Simulation | Banded structure | Microwave circuits | On-line systems | Bandpass filters | Joining | Microwaves
Journal Article
Proceedings of SPIE - The International Society for Optical Engineering, ISSN 0277-786X, 3/2016, Volume 9742, pp. 974208 - 974208-10
This paper presents a design and simulation of a novel high performance 3D-silicon photodetector for implementing in the low intensity light detection at room... 
SILVACO | Lateral NIP photodiode | 3D-CMOS photodetector | Lateral illumination | Low intensity light detection | COMSOL | Vertical optical window
Conference Proceeding
Inorganic Chemistry, ISSN 0020-1669, 04/2017, Volume 56, Issue 8, pp. 4267 - 4270
The first antimony(III) aziridinyl derivatives are reported. Treatment of anhydrous SbCl3 with Nlithioaziridine Li(Azn) (Azn = NC2H4) afforded the structurally... 
THIN-FILMS | TRISDIMETHYLAMINOANTIMONY | COMPLEX | CHEMICAL-VAPOR-DEPOSITION | AMINES | NUCLEAR-MAGNETIC-RESONANCE | GASB | COORDINATION | CIS | CHEMISTRY, INORGANIC & NUCLEAR | Antimony | Usage | Aziridines | Chemical properties | Chemical synthesis | Structure
Journal Article
2017 Progress In Electromagnetics Research Symposium - Spring (PIERS), ISSN 1559-9450, 05/2017, pp. 369 - 376
Reconfigurable monopole UWB antenna with single notched features is presented. The proposed UWB antenna operates at frequency band from 3.2 GHz to 12 GHz. The... 
Radio frequency | Antenna measurements | Micromechanical devices | Ultra wideband antennas | Microswitches
Conference Proceeding
AIP Advances, ISSN 2158-3226, 03/2016, Volume 6, Issue 3, pp. 35128 - 035128-12
Ferroelectric capacitors made by lead zirconate titanate (PZT) thin films and iridium electrodes are fabricated on three-dimensional structures and their... 
THIN-FILMS | NANOSCIENCE & NANOTECHNOLOGY | PHYSICS, APPLIED | PZT CAPACITORS | MATERIALS SCIENCE, MULTIDISCIPLINARY | Composition | Capacitors | Crystallization | Planar structures | Horizontal polarization | Investigations | Lead zirconate titanates | Thin films | Zirconium | Ferroelectricity | Ferroelectric materials | Phase separation | Iridium
Journal Article
Microelectronic Engineering, ISSN 0167-9317, 09/2013, Volume 109, pp. 113 - 116
Atomic layer deposition of solid dopant sources for silicon was carried out by using triethylantimony and ozone, and tris-(dimethylamido)borane and ozone as... 
ALD | Boron oxide | Ultra-shallow doping of silicon | Antimony oxide | PHYSICS, APPLIED | NANOSCIENCE & NANOTECHNOLOGY | OPTICS | ENGINEERING, ELECTRICAL & ELECTRONIC | Thin films | Silicon | Dielectric films | Investigations | Boron | Doping | Dopants | Antimony | Oxides | Deposition
Journal Article
physica status solidi (c), ISSN 1862-6351, 01/2014, Volume 11, Issue 1, pp. 41 - 45
The advanced silicon semiconductor technology requires doping methods for production of ultra‐shallow junctions with sufficiently low sheet resistance.... 
ultra shallow doping | atomic layer deposition | dopant sources | Atomic layer deposition | Dopant sources | Ultra shallow doping | Antimony
Journal Article
Journal of Microwaves, Optoelectronics and Electromagnetic Applications, ISSN 2179-1074, 12/2011, Volume 10, Issue 2, pp. 295 - 307
A novel compact wideband high-rejection lowpass filter (LPF) using H-DGS is presented. The proposed filter has neither open stub nor cascaded high-low... 
OPTICS | ENGINEERING, ELECTRICAL & ELECTRONIC
Journal Article
Nuclear Inst. and Methods in Physics Research, B, ISSN 0168-583X, 12/2006, Volume 253, Issue 1-2, pp. 232 - 235
Shallow doping of silicon was carried out by vapour phase surface adsorption of phosphine and subsequent diffusion and activation of phosphorus by conventional... 
Silicon | Four-point probe | Sheet resistance | Native oxidation | four-point probe | BORON | DOPING TECHNOLOGY | PHYSICS, ATOMIC, MOLECULAR & CHEMICAL | PHYSICS, NUCLEAR | ADSORPTION | JUNCTION | sheet resistance | INSTRUMENTS & INSTRUMENTATION | silicon | NUCLEAR SCIENCE & TECHNOLOGY | SURFACE | native oxidation | DIFFUSION
Journal Article
Chemical Vapor Deposition, ISSN 0948-1907, 03/2015, Volume 21, Issue 1-2-3, pp. 46 - 53
Journal Article
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, ISSN 0734-2101, 03/2018, Volume 36, Issue 2, p. 21510
Plasma atomic layer deposition of Ge-Sb-Te (GST) thin films using halogen-free precursors is reported. The Sb and Te precursors tris(aziridinyl)antimony (III)... 
TRISDIMETHYLAMINOANTIMONY | PHYSICS, APPLIED | GE2SB2TE5 THIN-FILMS | CHEMICAL-VAPOR-DEPOSITION | GROWTH | GASB | DITELLURIDES | MEMORY APPLICATIONS | MATERIALS SCIENCE, COATINGS & FILMS
Journal Article
Journal of Microwaves, Optoelectronics and Electromagnetic Applications, ISSN 2179-1074, 2011, Volume 10, Issue 2, pp. 295 - 307
A novel compact wideband high-rejection lowpass filter (LPF) using H-DGS is presented. The proposed filter has neither open stub nor cascaded high-low... 
H-defected ground structure (H-DGS) | Microstrip lowpass filter (LPF) | Microstrip bandpass filter (BPF) | microstrip lowpass filter (LPF) | microstrip bandpass filter (BPF)
Journal Article
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