X
Search Filters
Format Format
Subjects Subjects
Subjects Subjects
X
Sort by Item Count (A-Z)
Filter by Count
scanner matching (2) 2
computer programs (1) 1
conferences (1) 1
distortion (1) 1
flexibility (1) 1
high order (1) 1
matching (1) 1
metrology (1) 1
optical scanners (1) 1
overlay (1) 1
overlay metrology (1) 1
process control (1) 1
residual (1) 1
scanner calibration (1) 1
software (1) 1
tools (1) 1
more...
Language Language
Publication Date Publication Date
Click on a bar to filter by decade
Slide to change publication date range


Proceedings of SPIE - The International Society for Optical Engineering, ISSN 0277-786X, 2009, Volume 7272
Traditional "matching matrix" methods for characterizing scanner matching assume that the scanner distortion performance is static. The latest scanner models... 
Scanner matching | Overlay metrology | Residual | Process control | High order | Scanner calibration
Conference Proceeding
Proceedings of SPIE - The International Society for Optical Engineering, ISSN 0277-786X, 2010, Volume 7638
Conference Proceeding
Proceedings of SPIE - The International Society for Optical Engineering, ISSN 0277-786X, 04/2010, Volume 7638
This project is the continuation of work reported previously at this conference (Yu, et. al., SPIE 2009). A new software tool for developing a static scanner... 
Matching | Conferences | Optical scanners | Tools | Distortion | Software | Flexibility | Computer programs
Journal Article
No results were found for your search.

Cannot display more than 1000 results, please narrow the terms of your search.