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AIP Advances, ISSN 2158-3226, 07/2018, Volume 8, Issue 7, pp. 75202 - 075202-12
The results of an investigation on oxidation processes in Mo/Be multilayer nanofilms are presented. The films annealed both in ambient atmosphere and in... 
SOLAR ASTRONOMY | REFLECTION | TRANSMISSION | PHYSICS, APPLIED | FILMS | MATERIALS SCIENCE, MULTIDISCIPLINARY | EXTREME-ULTRAVIOLET | NANOSCIENCE & NANOTECHNOLOGY | NM WAVELENGTH | LA/B | PERIODIC MULTILAYERS | MIRRORS | Multilayers | Annealing | Oxidation | Airborne particulates | Reflectance | Optics | Condensed Matter | Physics
Journal Article
AIP Advances, ISSN 2158-3226, 10/2018, Volume 8, Issue 10, pp. 105003 - 105003-12
We optimized the parameters of a laser-produced plasma source based on a solid-state Nd: YAG laser (λ = 1.06 nm, pulse duration 4 ns, energy per pulse up to... 
MULTILAYER COATINGS | PHYSICS, APPLIED | GAS PUFF TARGET | MATERIALS SCIENCE, MULTIDISCIPLINARY | NANOSCIENCE & NANOTECHNOLOGY | GENERATION | RAY | EMISSION | Gas jets | Composition | Xenon | Emission | Laser beams | Pulse duration | YAG lasers | Semiconductor lasers | Maximum power density | Ionization | Lasers | Efficiency | Dependence | Nozzles | Neodymium lasers | Energy conversion efficiency
Journal Article
Applied Optics, ISSN 1559-128X, 06/2016, Volume 55, Issue 17, pp. 4683 - 4690
Al, with a passband in the wavelength range of 17-60 nm, and Zr, with a passband in the wavelength range of 6.5-17 nm, thin films on a support grid or support... 
SPECTROMETER | CALIBRATION | OPTICS | Thin films | Diffraction | Dielectric films | Research | Multilayers | Wavelengths | Aluminum | Space telescopes | Silicon films | Channels | Thermal stability
Journal Article
Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques, ISSN 1027-4510, 1/2017, Volume 11, Issue 1, pp. 1 - 19
A real opportunity for applying traditional optical methods to soft X-ray and extreme UV (ultraviolet) radiation bands has appeared thanks to recent successes... 
cluster beams | Materials Science | multilayer interference structures | free-hanging films | X-ray optics | soft X-ray and extreme UV bands | Surfaces and Interfaces, Thin Films | Radiation
Journal Article
Applied Optics, ISSN 1559-128X, 06/2016, Volume 55, Issue 16, pp. 4430 - 4435
A reflective modification of the Schmidt-Cassegrain system was built and tested. Ultraviolet (UV) and soft x-ray applications are discussed. The system... 
ULTRAVIOLET | OPTICS | Angular resolution | Entrances | Flats | Telescopes | Aberration | Field of view | Pixels | Astigmatism
Journal Article
Applied Optics, ISSN 1559-128X, 01/2016, Volume 55, Issue 3, pp. 619 - 625
Problems in the application of a null lens for surface shape measurements of aspherical mirrors are discussed using the example of manufacturing an aspherical... 
METROLOGY | FABRICATION | OPTICS | POINT-DIFFRACTION INTERFEROMETER | LITHOGRAPHY | Lithographers | Optics | Research | Mirrors | Analysis | Lenses | Zernike polynomials | Accuracy | Error analysis | Approximation | Mathematical analysis | Texts | Deviation
Journal Article
Optics Express, ISSN 1094-4087, 12/2018, Volume 26, Issue 26, pp. 33718 - 33731
A comparative study was carried out of the structure and reflection performance of four types of multilayer mirror for extreme ultraviolet lithography at 11.2... 
X-RAY REFLECTION | TRANSMISSION | RECONSTRUCTION | EXTREME-ULTRAVIOLET | COATINGS | SURFACE | OPTICS | MO/SI MULTILAYERS | PERIODIC MULTILAYERS | SCATTERING
Journal Article
Journal Article
Review of Scientific Instruments, ISSN 0034-6748, 01/2015, Volume 86, Issue 1, p. 016102
Journal Article
Technical Physics Letters, ISSN 1063-7850, 10/2019, Volume 45, Issue 10, pp. 970 - 972
In the design of powerful laser-plasma sources of extreme ultraviolet radiation with a gas jet as the target, the problem of degradation of gas nozzles is... 
extreme ultraviolet radiation | laser-induced spark | degradation of gas nozzles | Classical and Continuum Physics | Physics | density jumps | PHYSICS, APPLIED | RADIATION
Journal Article
Applied Optics, ISSN 1559-128X, 03/2016, Volume 55, Issue 9, pp. 2126 - 2135
We provide an analysis of contemporary multilayer optics for extreme ultraviolet (EUV) solar astronomy in the wavelength ranges: lambda = 12.9-13.3 nm, lambda... 
HIGH REFLECTIVITY | MO-SI | SOFT-X-RAY | FILMS | MG/SIC MULTILAYERS | NM WAVELENGTH | OPTICS | MO/SI MULTILAYERS | STRESS | LITHOGRAPHY | Multilayers | Stability | Spectral resolution | Aluminum | Silicon | Reflection | Spectra | Astronomy
Journal Article
Technical Physics, ISSN 1063-7842, 11/2019, Volume 64, Issue 11, pp. 1698 - 1703
An experimental setup and results on aberration of sources of a reference spherical wave (SRSW) based on a single-mode optical fiber with a subwavelength... 
Classical and Continuum Physics | Physics
Journal Article
Applied Physics Letters, ISSN 0003-6951, 05/2018, Volume 112, Issue 22, p. 221101
We present the results of investigations of extreme ultraviolet (EUV) light emission in the range from 5 to 10 nm. The light source was a pulsed... 
ND-YAG LASER | METROLOGY | PHYSICS, APPLIED | GAS PUFF TARGET | EXTREME-ULTRAVIOLET LITHOGRAPHY | X-RAY-EMISSION | RANGE
Journal Article
Applied Optics, ISSN 1559-128X, 02/2016, Volume 55, Issue 6, pp. 1249 - 1256
We have studied the surface treatment of polished fused silica by neutralized Ar ions with energy of 500-1500 eV and incidence angles of 0-90 degrees. We found... 
ELEMENTS | EVOLUTION | SURFACE | FABRICATION | ULE(R) | OPTICS | ROUGHNESS | MORPHOLOGY | QUARTZ | Research | Silica | Analysis | Wavelength | X-rays | Electric properties | Micrometers | Soft x-rays | Fused silica | Smoothing | Roughness | Polishing | Ultraviolet | Substrates
Journal Article
Technical Physics Letters, ISSN 1063-7850, 2/2019, Volume 45, Issue 2, pp. 85 - 88
Multilayer aluminum-based structures reflecting at λ(HeI) = 58.4 nm were studied. Spectral and angular dependences of the reflection coefficient of these... 
Classical and Continuum Physics | Physics
Journal Article
Optics Express, ISSN 1094-4087, 2015, Volume 23, Issue 11, pp. 14677 - 14694
Circular Zernike polynomials are often used for approximation and analysis of optical surfaces. In this paper, we analyse their lateral resolving capacity,... 
COEFFICIENTS | ORTHONORMAL POLYNOMIALS | OPTICS | ROUGHNESS
Journal Article
Optics Letters, ISSN 0146-9592, 01/2015, Volume 40, Issue 2, pp. 159 - 162
The possibilities of applying the point diffraction interferometry (PDI) method for the detection of the middle spatial frequency roughness of superpolished... 
QUARTZ | MICROSCOPES | OPTICS | Optical fibers | Diffraction | Microscopy | Mathematical analysis | Roughness | Mathematical models | Spectra | Interferometry
Journal Article
Applied Optics, ISSN 1559-128X, 01/2019, Volume 58, Issue 1, pp. 21 - 28
Aluminum thin-film spectral filters are widely used in telescopes for space observations of the Sun in the extreme ultraviolet range of wavelengths. The main... 
AMORPHOUS-SILICON | METAL-INDUCED CRYSTALLIZATION | OPTICS
Journal Article
Quantum Electronics, ISSN 1063-7818, 2017, Volume 47, Issue 4, pp. 378 - 384
Journal Article
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