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IEEJ Transactions on Sensors and Micromachines, ISSN 1341-8939, 2000, Volume 120, Issue 11, pp. 493 - 497
Due to the processing limitation of photolithography, only width and length have been controllable parameters for designing mechanical characteristics of... 
multi-height structure | MEMS | HARMS | ICP-RIE
Journal Article
Journal of Microelectromechanical Systems, ISSN 1057-7157, 04/2004, Volume 13, Issue 2, pp. 190 - 199
Journal Article
2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, ISSN 1084-6999, 01/2011, pp. 217 - 220
We found that an appropriate mixture of SF 6 , C 4 F 8 and O 2 gases in a standard Inductively Coupled Plasma Reactive Ion Etching (ICP-RIE) apparatus achieves... 
Wet etching | Silicon | Shape | Crystals | Resists
Conference Proceeding
IEEJ Transactions on Sensors and Micromachines, ISSN 1341-8939, 2011, Volume 131, Issue 3, pp. 130 - 131
This paper reports a novel silicon bulk-micromachining process using deep reactive ion etching (DRIE) of silicon and electroplating of gold in order to realize... 
Silicon on insulator | Deep-RIE | Electroplating | Coplanar waveguide | RF-MEMS | Actuators | Gold | Radio frequencies | Wafers | Handles | Waveguides | Silicon | Coplanar waveguides
Journal Article
Journal Article
IEEJ Transactions on Sensors and Micromachines, ISSN 1341-8939, 2004, Volume 124, Issue 9, pp. 316 - 320
Journal Article
The Plant Cell, ISSN 1040-4651, 6/2011, Volume 23, Issue 6, pp. 2169 - 2183
Journal Article
IEEE Journal of Selected Topics in Quantum Electronics, ISSN 1077-260X, 01/2002, Volume 8, Issue 1, pp. 58 - 63
Journal Article
Journal Article
Proceedings of the National Academy of Sciences of the United States of America, ISSN 0027-8424, 3/2016, Volume 113, Issue 11, pp. 3090 - 3095
Journal Article
Proceedings of the National Academy of Sciences of the United States of America, ISSN 0027-8424, 3/2013, Volume 110, Issue 12, pp. 4840 - 4845
Journal Article
Experimental and therapeutic medicine, ISSN 1792-0981, 09/2019, Volume 18, Issue 3, p. 1921
Wnt3a is a crucial modulator of bone metabolism through the canonical Wnt/β-catenin signaling pathway in bone-forming osteoblasts. We previously reported that... 
Journal Article
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, ISSN 0021-4922, 07/2003, Volume 42, Issue 7 A, pp. 4598 - 4601
A fabrication method for making accurate double-height micromolds is presented. Fine features of the micromold are transferred to a three-dimensional... 
SU-8 | Three-dimensional microfluidics | ICP-RIE | Micromold | PDMS | micromold | PHYSICS, APPLIED | three-dimensional microfluidics | MICROFLUIDIC SYSTEMS
Journal Article
Journal Article
Proceedings of the National Academy of Sciences of the United States of America, ISSN 0027-8424, 2/2015, Volume 112, Issue 8, pp. E901 - E910
Journal Article
Journal Article
PLoS ONE, ISSN 1932-6203, 07/2015, Volume 10, Issue 7, p. e0132694
Journal Article