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basic electric elements (8) 8
electric solid state devices not otherwise provided for (8) 8
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general tagging of cross-sectional technologies spanning over several sections of the ipc (8) 8
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step and flash imprint lithography (5) 5
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Microscopy and Microanalysis, ISSN 1431-9276, 08/2019, Volume 25, Issue S2, pp. 912 - 913
Journal Article
Proc. SPIE, ISSN 0277-786X, 03/2005, Volume SPIE-5751, pp. 986 - 993
Step and Flash Imprint Lithography (S-FIL) is an attractive method for printing sub-100 nm geometries. Relative to other imprinting processes S-FIL has the... 
Journal Article
Proceedings of SPIE, ISSN 0277-786X, 02/2004, Volume SPIE-5374, pp. 1006 - 1016
Step and Flash Imprint Lithography (S-FIL) is one of several new methods of imprint lithography being actively developed. As with other nanoimprint methods,... 
Journal Article
Proceedings of SPIE, ISSN 0277-786X, 01/2004, Volume SPIE-5374, pp. 1006 - 1016
Step and Flash Imprint Lithography (S-FIL) is one of several new methods of imprint lithography being actively developed. As with other nanoimprint methods,... 
Journal Article
Proc. SPIE, ISSN 0277-786X, 03/2005, Volume SPIE-5751, pp. 219 - 226
Along with other Next Generation Lithography (NGL) methods, imprint lithography has been included on the International Roadmap for Semiconductors (ITRS) for... 
Journal Article
Proceedings of SPIE, ISSN 0277-786X, 02/2004, Volume SPIE-5374, pp. 371 - 382
Recently, the International Roadmap for Semiconductors (ITRS) has included imprint lithography on its roadmap, to be ready for production use in 2013 at the 32... 
Journal Article
Proceedings of SPIE, ISSN 0277-786X, 01/2004, Volume SPIE-5374, pp. 371 - 382
Recently, the International Roadmap for Semiconductors (ITRS) has included imprint lithography on its roadmap, to be ready for production use in 2013 at the 32... 
Journal Article
Proceedings of SPIE, ISSN 0277-786X, 09/2003, Volume SPIE-5256, pp. 122 - 131
Step and FLash Imprint Lithography (S-FIL) is one of several new methods of imprint lithography being actively developed. Since S-FIL is a 1X printing... 
Journal Article
Proceedings of SPIE, ISSN 0277-786X, 06/2003, Volume SPIE-5037, pp. 187 - 196
Step and Flash Imprint Lithography (SFIL) is one of several new nano- imprint techniques being actively developed. While SFIL has been shown to be capable of... 
Journal Article
Proceedings of SPIE, ISSN 0277-786X, 06/2003, Volume SPIE-5037, pp. 187 - 196
Step and Flash Imprint Lithography (SFIL) is one of several new nano- imprint techniques being actively developed. While SFIL has been shown to be capable of... 
Journal Article
Proceedings of SPIE, ISSN 0277-786X, 01/2003, Volume SPIE-5256, pp. 122 - 131
Step and FLash Imprint Lithography (S-FIL) is one of several new methods of imprint lithography being actively developed. Since S-FIL is a 1X printing... 
Journal Article
Proceedings of SPIE - The International Society for Optical Engineering, ISSN 0277-786X, 2004, Volume 5374, Issue 2, pp. 1006 - 1016
Conference Proceeding
Proceedings of SPIE - The International Society for Optical Engineering, ISSN 0277-786X, 2002, Volume 4688, Issue 1, pp. 205 - 213
Conference Proceeding
Proceedings of SPIE, ISSN 0277-786X, 02/2004, Volume SPIE-5374, pp. 348 - 360
Step and Flash Imprint Lithography (SFIL) is a revolutionary next generation lithography option that has become increasingly attractive in recent years.... 
Journal Article
Proceedings of SPIE, ISSN 0277-786X, 01/2004, Volume SPIE-5374, pp. 348 - 360
Step and Flash Imprint Lithography (SFIL) is a revolutionary next generation lithography option that has become increasingly attractive in recent years.... 
Journal Article
Progress in Biomedical Optics and Imaging - Proceedings of SPIE, ISSN 1605-7422, 2005, Volume 5751, Issue I, pp. 219 - 226
Conference Proceeding
Proceedings of SPIE - The International Society for Optical Engineering, ISSN 0277-786X, 2003, Volume 5037, pp. 187 - 196
Conference Proceeding
Proceedings of SPIE - The International Society for Optical Engineering, ISSN 0277-786X, 2004, Volume 5374, Issue 1, pp. 371 - 382
Conference Proceeding
Progress in Biomedical Optics and Imaging - Proceedings of SPIE, ISSN 1605-7422, 2005, Volume 5751, Issue II, pp. 986 - 993
Conference Proceeding
Proceedings of SPIE - The International Society for Optical Engineering, ISSN 0277-786X, 2003, Volume 5256, Issue 1, pp. 122 - 131
Conference Proceeding
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