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Nature, ISSN 0028-0836, 12/2005, Volume 438, Issue 7071, pp. 1157 - 1161
Journal Article
Annals of Neurology, ISSN 0364-5134, 12/2007, Volume 62, Issue 6, pp. 671 - 675
Certain low‐molecular‐weight substrate analogs act both as in vitro competitive inhibitors of lysosomal hydrolases and as intracellular enhancers (chemical... 
Journal Article
Proceedings of SPIE - The International Society for Optical Engineering, ISSN 0277-786X, 2017, Volume 10143
Conference Proceeding
2018 International Symposium on Semiconductor Manufacturing (ISSM), ISSN 1523-553X, 12/2018, Volume 2018-, pp. 1 - 4
Extreme ultraviolet lithography (EUVL) is getting closer to practical use for mass production every year. For applying EUV lithography to manufacturing,... 
Productivity | Extreme ultraviolet lithography | Filtration | Ultraviolet sources | Optimization | Resists
Conference Proceeding
Journal of Micro/ Nanolithography, MEMS, and MOEMS, ISSN 1932-5150, 01/2019, Volume 18, Issue 1, p. 1
The key challenge for enablement of a second node of single-expose EUV patterning is understanding and mitigating the patterning-related defects that narrow... 
stochastic defects | inspection techniques | LCDU | CDU | single-expose EUV patterning | MATERIALS SCIENCE, MULTIDISCIPLINARY | NANOSCIENCE & NANOTECHNOLOGY | OPTICS | ENGINEERING, ELECTRICAL & ELECTRONIC
Journal Article
Journal Article
Journal Article
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, ISSN 1071-1023, 03/2010, Volume 28, Issue 2, pp. C2B51 - C2B55
Zinc oxide (ZnO) nanostructured films were prepared on quartz glasses by radio frequency magnetron sputtering deposition of ZnO films at different argon to... 
sputter deposition | PHYSICS, APPLIED | photoluminescence | FILMS | II-VI semiconductors | GROWTH | NANOSCIENCE & NANOTECHNOLOGY | zinc compounds | ZNO | EMISSION | nanostructured materials | ENGINEERING, ELECTRICAL & ELECTRONIC
Journal Article
Journal of Immunology, ISSN 0022-1767, 01/2006, Volume 176, Issue 2, pp. 1122 - 1130
The intranasal administration of influenza hemagglutinin (HA) vaccine with Surfacten, a modified pulmonary surfactant free of antigenic c-type lectins, as a... 
Journal Article
Brain and Development, ISSN 0387-7604, 2007, Volume 29, Issue 4, pp. 210 - 216
A large number of genetic disease model mice have been produced by genetic engineering. However, phenotypic analysis is not sufficient, particularly for brain... 
Disease model mouse | Reflex testing | Mouse neurology | G M1-gangliosidosis | Genetic engineering | Motor assessment
Journal Article
IEICE transactions on fundamentals of electronics, communications and computer sciences, ISSN 0916-8508, 12/2006, Volume 89, Issue 12, pp. 3666 - 3670
In this letter, we discuss the impact of intrinsic error in parasitic capacitance extraction programs which are commonly used in today's SoC design flows. Most... 
Interconnect | Delay variation | SoC | Parasitic capacitance | COMPUTER SCIENCE, HARDWARE & ARCHITECTURE | delay variation | COMPUTER SCIENCE, INFORMATION SYSTEMS | interconnect | parasitic capacitance | ENGINEERING, ELECTRICAL & ELECTRONIC
Journal Article
08/2019
기판 상의 레지스트막을 현상 처리하는 현상 처리 방법은, 기판에 현상액을 공급하여 기판 상의 레지스트막을 현상하여 레지스트 패턴을 형성하는 패턴 형성 공정과, 현상된 기판에 대하여 수용성 폴리머의 수용액을 도포하는 도포 공정과, 당해 수용성 폴리머의 수용액이 도포된 기판에 린스액을... 
ELECTROGRAPHY | HOLOGRAPHY | SEMICONDUCTOR DEVICES | APPARATUS SPECIALLY ADAPTED THEREFOR | PHOTOGRAPHY | CINEMATOGRAPHY | ORIGINALS THEREFOR | PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES | MATERIALS THEREFOR | BASIC ELECTRIC ELEMENTS | ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR | PHYSICS | ELECTRICITY
Patent
06/2019
An object of the invention is to provide a substrate processing method and the like, capable of suppressing the spattering of a cleaning liquid when removing a... 
TRANSPORTING | SEMICONDUCTOR DEVICES | PREVENTION OF FOULING IN GENERAL | BASIC ELECTRIC ELEMENTS | CLEANING | ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR | CLEANING IN GENERAL | ELECTRICITY | PERFORMING OPERATIONS
Patent
04/2019
To provide a substrate processing method and the like which inhibits scattering of a cleaning liquid while ensuring supply of the cleaning liquid on a surface... 
SEMICONDUCTOR DEVICES | BASIC ELECTRIC ELEMENTS | ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR | ELECTRICITY
Patent
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