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2008, ISBN 9781894666428, 70
Book
08/2019
Patent
02/2016
Patent
5.
Lithographic apparatus and device manufacturing method involving a heater and a temperature sensor
02/2016
Patent
02/2016
Patent
11/2015
Patent
12/2013
ELECTROGRAPHY | HOLOGRAPHY | SEMICONDUCTOR DEVICES | APPARATUS SPECIALLY ADAPTED THEREFOR | PHOTOGRAPHY | CINEMATOGRAPHY | ORIGINALS THEREFOR | PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES | MATERIALS THEREFOR | BASIC ELECTRIC ELEMENTS | ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR | PHYSICS | ELECTRICITY
Patent
07/2013
ELECTROGRAPHY | HOLOGRAPHY | APPARATUS SPECIALLY ADAPTED THEREFOR | PHOTOGRAPHY | CINEMATOGRAPHY | RADIOACTIVE SOURCES | ORIGINALS THEREFOR | CONVERSION OF CHEMICAL ELEMENTS | NUCLEAR PHYSICS | NUCLEAR ENGINEERING | PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES | MATERIALS THEREFOR | PHYSICS
Patent
06/2012
ELECTROGRAPHY | HOLOGRAPHY | SEMICONDUCTOR DEVICES | APPARATUS SPECIALLY ADAPTED THEREFOR | PHOTOGRAPHY | CINEMATOGRAPHY | ORIGINALS THEREFOR | PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES | MATERIALS THEREFOR | BASIC ELECTRIC ELEMENTS | ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR | PHYSICS | ELECTRICITY
Patent
02/2014
ELECTROGRAPHY | HOLOGRAPHY | SEMICONDUCTOR DEVICES | APPARATUS SPECIALLY ADAPTED THEREFOR | PHOTOGRAPHY | CINEMATOGRAPHY | ORIGINALS THEREFOR | PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES | MATERIALS THEREFOR | BASIC ELECTRIC ELEMENTS | ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR | PHYSICS | ELECTRICITY
Patent
08/2012
Patent
03/2012
Patent
03/2011
ELECTROGRAPHY | HOLOGRAPHY | SEMICONDUCTOR DEVICES | APPARATUS SPECIALLY ADAPTED THEREFOR | PHOTOGRAPHY | CINEMATOGRAPHY | ORIGINALS THEREFOR | PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES | MATERIALS THEREFOR | BASIC ELECTRIC ELEMENTS | ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR | PHYSICS | ELECTRICITY
Patent
01/2012
ELECTROGRAPHY | HOLOGRAPHY | SEMICONDUCTOR DEVICES | APPARATUS SPECIALLY ADAPTED THEREFOR | PHOTOGRAPHY | CINEMATOGRAPHY | ORIGINALS THEREFOR | PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES | MATERIALS THEREFOR | BASIC ELECTRIC ELEMENTS | ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR | PHYSICS | ELECTRICITY
Patent
12/2011
ELECTROGRAPHY | HOLOGRAPHY | SEMICONDUCTOR DEVICES | APPARATUS SPECIALLY ADAPTED THEREFOR | PHOTOGRAPHY | CINEMATOGRAPHY | ORIGINALS THEREFOR | PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES | MATERIALS THEREFOR | BASIC ELECTRIC ELEMENTS | ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR | PHYSICS | ELECTRICITY
Patent
09/2010
ELECTROGRAPHY | PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES | HOLOGRAPHY | APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USINGWAVES OTHER THAN OPTICAL WAVES | MATERIALS THEREFOR | APPARATUS SPECIALLY ADAPTED THEREFOR | APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FORPROJECTING OR VIEWING THEM | ACCESSORIES THEREFOR | PHOTOGRAPHY | CINEMATOGRAPHY | PHYSICS | ORIGINALS THEREFOR
Patent
07/2010
ELECTROGRAPHY | HOLOGRAPHY | SEMICONDUCTOR DEVICES | APPARATUS SPECIALLY ADAPTED THEREFOR | PHOTOGRAPHY | CINEMATOGRAPHY | ORIGINALS THEREFOR | PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES | MATERIALS THEREFOR | BASIC ELECTRIC ELEMENTS | ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR | PHYSICS | ELECTRICITY
Patent
07/2010
ELECTROGRAPHY | PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES | HOLOGRAPHY | APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USINGWAVES OTHER THAN OPTICAL WAVES | MATERIALS THEREFOR | APPARATUS SPECIALLY ADAPTED THEREFOR | APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FORPROJECTING OR VIEWING THEM | ACCESSORIES THEREFOR | PHOTOGRAPHY | CINEMATOGRAPHY | PHYSICS | ORIGINALS THEREFOR
Patent
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