X
Search Filters
Format Format
Subjects Subjects
Subjects Subjects
X
Sort by Item Count (A-Z)
Filter by Count
physics, applied (23) 23
physics, condensed matter (17) 17
materials science, multidisciplinary (13) 13
röntgenbeugung (12) 12
brechungsindex (11) 11
deposition (10) 10
rutherford-rückstreuung (10) 10
sputterabscheidung (10) 10
x-ray (10) 10
energielücke (9) 9
optische eigenschaft (9) 9
dünnschicht (8) 8
gleichstrom (8) 8
materials science, coatings & films (8) 8
optical-properties (8) 8
sputtering (8) 8
sputterüberzug (8) 8
stöchiometrie (8) 8
optical properties (7) 7
reaktive magnetronzerstäubung (7) 7
sichtbares spektrum (7) 7
thin-films (7) 7
engineering and technology (6) 6
physics (6) 6
rauigkeit (6) 6
struktureigenschaft (6) 6
teknik och teknologier (6) 6
thin films (6) 6
amorpher zustand (5) 5
coatings (5) 5
eigenspannung (5) 5
optische bandlücke (5) 5
optische konstante (5) 5
optisches messverfahren (5) 5
oxides (5) 5
rutherford-rückstreuspektrometrie (5) 5
stress (5) 5
technology (5) 5
teknikvetenskap (5) 5
atoms, molecules, clusters and plasmas (4) 4
bandlücke (4) 4
condensed matter (4) 4
dielectric films (4) 4
ellipsometrie (4) 4
halbleiterdünnschicht (4) 4
kristallstruktur (4) 4
nuclear physics, heavy ions, hadrons (4) 4
optische transparenz (4) 4
oxidation (4) 4
oxygen (4) 4
physics, nuclear (4) 4
reactive sputtering (4) 4
reaktive kathodenzerstäubung (4) 4
surfaces and interfaces, thin films (4) 4
temperature (4) 4
wärmebeständigkeit (4) 4
zirkoniumverbindung (4) 4
300-kelvin-bereich (3) 3
analysis (3) 3
dc sputtering (3) 3
druckspannung (3) 3
glassubstrat (3) 3
halbleiterwachstum (3) 3
magnetrons (3) 3
materials science (3) 3
model (3) 3
nitrogen (3) 3
oberflächentopographie (3) 3
optische dünnschicht (3) 3
raumtemperatur (3) 3
reflexionsvermögen (3) 3
research (3) 3
sauerstoffpartialdruck (3) 3
siliciumsubstrat (3) 3
thermodynamik (3) 3
titanverbindung (3) 3
ultraviolettspektrum (3) 3
zinkverbindung (3) 3
zwei-sechs-verbindung (3) 3
500-grad-c-bereich (2) 2
abscheidungsgeschwindigkeit (2) 2
argon (2) 2
atmospheres (2) 2
atomkraftmikroskopie (2) 2
bandabstand (2) 2
bleidioxid (2) 2
bleiverbindung (2) 2
brechungsfaktor (2) 2
charge radii (2) 2
chemical-vapor-deposition (2) 2
dielektrische schicht (2) 2
effect of annealing (2) 2
electronic-structure (2) 2
evaporation (2) 2
films (2) 2
fysik (2) 2
gases (2) 2
gesamtdruck (2) 2
glühtemperatur (2) 2
hysteresis (2) 2
more...
Language Language
Publication Date Publication Date
Click on a bar to filter by decade
Slide to change publication date range


Thin Solid Films, ISSN 0040-6090, 2006, Volume 515, Issue 2, pp. 421 - 424
Modelling of the dynamic behaviour of the reactive sputtering process is a key issue in many respects. Apart from increasing the basic understanding, such a... 
Reactive sputtering | Process simulation | Magnetron | PHYSICS, CONDENSED MATTER | PHYSICS, APPLIED | magnetron | MATERIALS SCIENCE, MULTIDISCIPLINARY | process simulation | reactive sputtering | MATERIALS SCIENCE, COATINGS & FILMS
Journal Article
Thin Solid Films, ISSN 0040-6090, 2006, Volume 502, Issue 1, pp. 228 - 234
Thin films of several transition metal oxynitrides such as titanium, zirconium, hafnium, niobium and tantalum oxynitride have been produced at room temperature... 
Oxynitrides | X-ray diffraction | X-ray reflectivity | Sputtering | Stress | THIN-FILMS | SYSTEM | stress | PHYSICS, CONDENSED MATTER | STATES | PHYSICS, APPLIED | DEPOSITION | MATERIALS SCIENCE, MULTIDISCIPLINARY | ENERGY-GAP | OPTICAL-PROPERTIES | ORIGIN | COATINGS | OXIDE-FILMS | oxynitrides | sputtering | MATERIALS SCIENCE, COATINGS & FILMS | Thin films | Transition metal compounds | Dielectric films
Journal Article
Journal of Applied Physics, ISSN 0021-8979, 10/2002, Volume 92, Issue 7, pp. 3599 - 3607
Thin films of zirconium oxide have been deposited onto glass and Si(100) substrates at room temperature by reactive dc magnetron sputtering of a metallic Zr... 
BEAM-ASSISTED DEPOSITION | PHYSICS, APPLIED | ZRO2 FILMS | SEMICONDUCTOR | X-RAY | COATINGS | SOL-GEL | ION ENERGY | ARRIVAL RATE | Magnetrons | Zirconium oxide | Research | Structure | Optical properties
Journal Article
Journal of Applied Physics, ISSN 0021-8979, 04/2008, Volume 103, Issue 8, pp. 083306 - 083306-5
The structure of Zr O 2 films has been controlled during reactive sputtering in an argon∕oxygen atmosphere by adding an amount of nitrogen gas to the process.... 
PHYSICS, APPLIED | DEPOSITION | NEGATIVE-IONS | Oxygen | Usage | Sputtering (Physics) | Analysis | Ion bombardment | Atomic properties | Nitrogen | MONOCLINIC LATTICES | THIN FILMS | STABILIZATION | SUBSTRATES | HEATING | NITROGEN ADDITIONS | MATERIALS SCIENCE | ATMOSPHERES | ARGON | OXYGEN | PLASMA | ZIRCONIUM OXIDES | OXYGEN IONS | SPUTTERING | NITROGEN | SURFACES | Teknik och teknologier | TEKNIKVETENSKAP | Engineering and Technology | TECHNOLOGY
Journal Article
Journal of Applied Physics, ISSN 0021-8979, 09/2002, Volume 92, Issue 5, pp. 2461 - 2466
Thin films of zirconium oxynitrides have been deposited onto Si(100) substrates at room temperature by reactive dc magnetron sputtering of a metallic Zr target... 
THIN-FILMS | X-RAY | PHYSICS, APPLIED | Magnetrons | Silicon | Research | Magnetic properties
Journal Article
Thin Solid Films, ISSN 0040-6090, 12/2004, Volume 468, Issue 1-2, pp. 48 - 56
Journal Article
Journal of Applied Physics, ISSN 1089-7550, 2008, Volume 103, Issue 8, p. 083306
The structure of ZrO2 films has been controlled during reactive sputtering in an argon/oxygen atmosphere by adding an amount of nitrogen gas to the process.... 
TEKNIKVETENSKAP | Engineering and Technology | Teknik och teknologier | TECHNOLOGY
Journal Article
Thin Solid Films, ISSN 0040-6090, 2005, Volume 484, Issue 1, pp. 64 - 67
In sputter deposition, growth rate and total pressure are connected by the Keller–Simmons relation. Upon deposition of thin zinc oxide films in an argon–oxygen... 
Zinc oxide | Sputtering | Growth mechanism | Deposition process | PRESSURE | PHYSICS, CONDENSED MATTER | PHYSICS, APPLIED | growth mechanism | MATERIALS SCIENCE, MULTIDISCIPLINARY | ZNO THIN-FILMS | SPRAY-PYROLYSIS | deposition process | sputtering | STRESS | zinc oxide | MATERIALS SCIENCE, COATINGS & FILMS | Thin films | Dielectric films
Journal Article
Journal of Applied Physics, ISSN 0021-8979, 04/2002, Volume 91, Issue 8, pp. 4863 - 4871
The effect of annealing temperature on the structural and optical properties of sputtered niobium-oxide films has been investigated. The temperature dependence... 
THIN-FILMS | X-RAY | PHYSICS, APPLIED | Thin films | Thermal properties | Temperature | Optical properties | Oxides | Influence | Dielectric films | Research | Niobium
Journal Article
Thin Solid Films, ISSN 0040-6090, 12/2006, Volume 515, Issue 4, pp. 2760 - 2764
Gasochromic WO -films with a Pt catalyst cap layer can serve as optically switchable coatings for a variety of applications. In this study the influence of the... 
Tungsten oxide | Optical coatings | Gasochromic switching | Sputtering | THIN-FILMS | PHYSICS, CONDENSED MATTER | PHYSICS, APPLIED | MECHANISM | MATERIALS SCIENCE, MULTIDISCIPLINARY | tungsten oxide | MODEL | gasochromic switching | COLORATION | COATINGS | optical coatings | sputtering | WO3 FILMS | MATERIALS SCIENCE, COATINGS & FILMS | Bombardment | Tungsten compounds | Analysis | Tungsten
Journal Article
Journal of Applied Physics, ISSN 0021-8979, 05/2009, Volume 105, Issue 9, pp. 093302 - 093302-4
We present a method to eliminate hysteresis effects and to increase the deposition rate for the reactive sputtering of metal oxides. This is achieved by using... 
Journal Article
Applied Physics Letters, ISSN 0003-6951, 08/2004, Volume 85, Issue 5, pp. 748 - 750
A comparative study of reactive direct current magnetron sputtering for different transition metal oxides reveals crystalline films at room temperature for... 
THIN-FILMS | DISCHARGE | PHYSICS, APPLIED | PLASMA | DEPOSITION | OPTICAL-PROPERTIES | COATINGS | MODEL | STRESS | THIN FILMS | SPUTTERING | CRYSTAL STRUCTURE | DIRECT CURRENT | MAGNETRONS | MATERIALS SCIENCE | AMORPHOUS STATE | OXIDES | TEMPERATURE RANGE 0273-0400 K | TRANSITION ELEMENT COMPOUNDS | STRESSES
Journal Article
Applied Physics Letters, ISSN 0003-6951, 04/2006, Volume 88, Issue 16, pp. 161504 - 161504-3
Reactive sputtering processes normally exhibit undesirable hysteresis effects which are more pronounced for oxide than nitride deposition. We present a method... 
GASES | PHYSICS, APPLIED | OXYGEN | CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS | DEPOSITION | HYSTERESIS | SPUTTERING | STABILIZATION | NITROGEN | NITROGEN ADDITIONS | OXIDES | NITRIDES
Journal Article
Thin Solid Films, ISSN 0040-6090, 2003, Volume 429, Issue 1, pp. 135 - 143
MoO films were prepared by reactive DC magnetron sputtering in an atmosphere of argon plus oxygen in an effort to determine the influence of the oxygen partial... 
MoO x | DC sputtering | Optical properties | Structural properties | MoO | THIN-FILMS | OXIDATION | PHYSICS, CONDENSED MATTER | STATES | PHYSICS, APPLIED | MATERIALS SCIENCE, MULTIDISCIPLINARY | MoOx | OXYGEN | structural properties | optical properties | MOO3 FILMS | X-RAY | MICROSTRUCTURE
Journal Article
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, ISSN 1862-6300, 12/2001, Volume 188, Issue 3, pp. 1047 - 1058
Niobium oxide films have been prepared on glass and Si(100) substrates by reactive dc magnetron sputtering, of a metallic Nb target in an argon-oxygen... 
NB2O5 THIN-FILM | PHYSICS, CONDENSED MATTER | PHYSICS, APPLIED | MATERIALS SCIENCE, MULTIDISCIPLINARY | X-RAY
Journal Article
ECS Transactions, ISSN 1938-5862, 2013, Volume 57, Issue 1, pp. 665 - 672
Conference Proceeding
Applied Physics Letters, ISSN 0003-6951, 08/2004, Volume 85, Issue 5, pp. 748 - 750
Journal Article
Vacuum, ISSN 0042-207X, 2004, Volume 75, Issue 1, pp. 7 - 16
In this work, the effect of post-growth annealing on the structural and optical properties of sputtered zirconium oxide films has been investigated. The... 
X-ray diffraction | X-ray reflectivity | Zirconium oxide | oxides | Optical properties | Sputtering | Oxides | THIN-FILMS | PHYSICS, APPLIED | SEMICONDUCTOR | sputtering oxides | MATERIALS SCIENCE, MULTIDISCIPLINARY | OPTICAL-PROPERTIES | ZRO2 | optical properties | X-RAY | COATINGS | zirconium oxide
Journal Article
No results were found for your search.

Cannot display more than 1000 results, please narrow the terms of your search.