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Taehan Kigye Hakhoe nonmunjip. A, ISSN 1226-4873, 2005, Volume 29, Issue 9, pp. 1169 - 1174
Imprint lithography is a promising method for high-resolution and high-throughput lithography using low-cost equipment. In particular, ultraviolet-nanoimprint... 
기계공학
Journal Article
대한기계학회 논문집 C권산업기술과 혁신, 2015, Volume 3, Issue 4, pp. 249 - 255
Journal Article
Thin Solid Films, ISSN 0040-6090, 08/2017, Volume 636, pp. 552 - 557
A shape-controlled method for the nanoscale patterning of cerium oxide thin films was demonstrated in this work. An ultraviolet-curable precursor-containing... 
Sol-gel | Nanopattern | Calcination | Nanoimprint lithography | Cerium oxide | Samarium doping | Fuel cell | PHYSICS, CONDENSED MATTER | PHYSICS, APPLIED | MATERIALS SCIENCE, MULTIDISCIPLINARY | FUEL-CELLS | CEO2 | NANOWIRES | MATERIALS SCIENCE, COATINGS & FILMS | Thin films | Cerium | Annealing | Dielectric films | Analysis | Fuel cells
Journal Article
Journal of Micromechanics and Microengineering, ISSN 0960-1317, 05/2015, Volume 25, Issue 5, pp. 55004 - 7
Journal Article
Applied Physics Letters, ISSN 0003-6951, 06/2007, Volume 90, Issue 25, pp. 253103 - 253103-3
Ni silicide nanowires were grown by plasma-enhanced chemical vapor deposition at 350 ° C . Transmission electron microscope analysis showed that Ni silicide... 
INDUCED LATERAL CRYSTALLIZATION | PHYSICS, APPLIED | METAL-INDUCED GROWTH | FILM GROWTH
Journal Article
Nanotechnology, ISSN 0957-4484, 06/2008, Volume 19, Issue 22, p. 225304
... l t e n 1 , Jun-ho Jeong 2 , Eung-sug Lee 2 and Heinrich Kurz 1 1 Advanced Microelectronic Center Aachen (AMICA)/AMO GmbH, Otto-Blumenthal-Strasse 25, Aachen... 
NANOSCIENCE & NANOTECHNOLOGY | PHYSICS, APPLIED | ENGINEERING, MULTIDISCIPLINARY | NM HALF-PITCH | MATERIALS SCIENCE, MULTIDISCIPLINARY
Journal Article
Key engineering materials, ISSN 1013-9826, 08/2007, Volume 345-346, pp. 1257 - 1260
Journal Article
RSC Advances, ISSN 2046-2069, 06/2015, Volume 5, Issue 62, pp. 547 - 553
...-Keun Sung, a Kyung-Min Lee, c Srivathsava Surabhi, c Jun-Ho Jeong, a Eung-sug Lee, a Jun-Hyuk Choi * a and Jong-Ryul Jeong * c Despite substantial progress... 
NANOPARTICLES | COLOR | NANOCRYSTALS | LIGHT-EMITTING DEVICES | NANOSTRUCTURES | CHEMISTRY, MULTIDISCIPLINARY | ELECTROLUMINESCENCE | ARRAYS | Annealing | Wavelengths | Photoluminescence | Plasmons | Nanostructure | Plasmonics | Arrays | Tuning
Journal Article
Journal of Nanoscience and Nanotechnology, ISSN 1533-4880, 06/2015, Volume 15, Issue 6, pp. 4522 - 4529
Journal Article
Jpn J Appl Phys, ISSN 0021-4922, 10/2013, Volume 52, Issue 10, pp. 10MC09 - 10MC09-6
Tunable metal optical properties were realized by directly nanoimprinting metal onto silver-coated poly(methyl methacrylate) (PMMA) bilayer glass substrates.... 
LIGHT-EMITTING-DIODES | PHYSICS, APPLIED | SOLAR-CELLS | ENHANCEMENT | SURFACE | ELECTROLUMINESCENCE | LITHOGRAPHY | Silver | Accessibility | Optical properties | Nanostructure | Polymethyl methacrylates | Arrays | Transmittance | Deposition
Journal Article
Jpn J Appl Phys, ISSN 0021-4922, 6/2012, Volume 51, Issue 6, pp. 06FJ01 - 06FJ01-5
This study developed a stitching process for unit element nanotemplates based on step and repeat imprinting for use in enlarged soft mold fabrication. This... 
NANOIMPRINT LITHOGRAPHY | PHYSICS, APPLIED | FABRICATION | STAMP | TO-ROLL
Journal Article
한국정밀공학회 학술발표대회 논문집, 2018, Volume 2018, Issue 10, pp. 4 - 4
Journal Article
고분자 과학과 기술, ISSN 1225-0260, 2006, Volume 17, Issue 2, pp. 207 - 216
Journal Article
International Journal of Adhesion and Adhesives, ISSN 0143-7496, 2009, Volume 29, Issue 6, pp. 662 - 669
The interfacial adhesion energy between the resist and the substrate is very important in nanoimprinting because of problems with the resist sticking or... 
Nanoimprint-lithography | Self-assembled monolayer | Interfacial adhesion energy | Surface treatment | IMPRINT | ENGINEERING, CHEMICAL | NANOIMPRINT | MATERIALS SCIENCE, MULTIDISCIPLINARY | LITHOGRAPHY
Journal Article
Microelectronic Engineering, ISSN 0167-9317, 2009, Volume 86, Issue 10, pp. 1983 - 1988
We propose a very large-area ultraviolet imprint lithography process as a promising alternative to expensive conventional optical lithography for the... 
Vacuum environment | Auto release | Ultraviolet imprint process | Hard stamp | NANOIMPRINT LITHOGRAPHY | PHYSICS, APPLIED | PATTERNED STAMP | NANOSCIENCE & NANOTECHNOLOGY | FABRICATION | OPTICS | ENGINEERING, ELECTRICAL & ELECTRONIC | Integrated circuit fabrication | Mechanical engineering | Analysis
Journal Article
Microelectronic Engineering, ISSN 0167-9317, 06/2011, Volume 88, Issue 6, pp. 923 - 928
A direct ultraviolet (UV)-assisted nanoimprinting procedure using photosensitive titanium di-n-butoxide bis(2-ethylhexanoate) is employed in this study for the... 
Nanoimprint lithography | Nanostructures | Titanium dioxide | Optical properties | THIN-FILMS | PHYSICS, APPLIED | DEPOSITION | PHOTOCATALYSIS | NANOSCIENCE & NANOTECHNOLOGY | MECHANISMS | NANOLITHOGRAPHY | ENGINEERING, ELECTRICAL & ELECTRONIC | TEMPERATURE | CHEMISTRY | OPTICS | SOL-GEL PROCESS | TITANIUM-DIOXIDE
Journal Article
센서학회지, ISSN 1225-5475, 2007, Volume 16, Issue 5, pp. 377 - 383
We describe the fabrication and characterization of a doubly clamped multi-walled carbon nanotube (MWNT). The device was assembled by an application of... 
다중벽 탄소 나노튜브 | flow sensing | multi-walled carbon nanotube | 유전영동 | dielectrophoresis | doubly clamped | 유동검출 | 양팔보 | 공학일반
Journal Article
Nanotechnology, ISSN 0957-4484, 11/2007, Volume 18, Issue 46, pp. 465302 - 465302 (5)
... , Jong-Joo Rha 2 , Ki-Don Kim 1 and Eung-Sug Lee 1 1 Nano-Mechanical Systems Research Center, Korea Institute of Machinery and Materials, 171 Jang-dong, Yuseung-gu... 
THIN-FILMS | PHYSICS, APPLIED | CARBON | ENGINEERING, MULTIDISCIPLINARY | CHEMICAL-VAPOR-DEPOSITION | MATERIALS SCIENCE, MULTIDISCIPLINARY | GROWTH | FLUORINE | NANOSCIENCE & NANOTECHNOLOGY
Journal Article
Microelectronic Engineering, ISSN 0167-9317, 2004, Volume 75, Issue 2, pp. 165 - 171
Ultraviolet-nanoimprint lithography (UV-NIL) is a promising method for cost-effectively defining nano-scale structures at room temperature and low pressure. In... 
Nanoimprint lithography | Nano-structures | Nano-patterning | PHYSICS, APPLIED | FLASH IMPRINT LITHOGRAPHY | UNIFORMITY | nanoimprint lithography | nano-structures | STEP | OPTICS | nano-patterning | ENGINEERING, ELECTRICAL & ELECTRONIC
Journal Article
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