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SID Symposium Digest of Technical Papers, ISSN 0097-966X, 05/2018, Volume 49, Issue 1, pp. 1284 - 1287
We have examined, for the first time, by using a device simulation, the structure of back‐gated poly‐Si TFT that can be fabricated only by using Partial Laser... 
LTPS | Laser Anneal | TFT | Simulation | Gen10 | Silicon
Journal Article
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