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2012, ISBN 3527327975, 473
Atomic layer deposition, formerly called atomic layer epitaxy, was developed in the 1970s to meet the needs of producing high-quality, large-area fl at... 
Chemical vapor deposition | Nanostructured materials | Industrial applications
eBook
01/2012, ISBN 3527327975
Book
Advanced materials (Weinheim), ISSN 0935-9648, 02/2016, Volume 28, Issue 5, pp. 795 - 831
Journal Article