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by Collaboration, The CMS and Chatrchyan, S and Hmayakyan, G and Khachatryan, V and Sirunyan, A M and Adam, W and Bauer, T and Bergauer, T and Bergauer, H and Dragicevic, M and Erö, J and Friedl, M and Frühwirth, R and Ghete, V M and Glaser, P and Hartl, C and Hoermann, N and Hrubec, J and Hänsel, S and Jeitler, M and Kastner, K and Krammer, M and Abril, I Magrans de and Markytan, M and Mikulec, I and Neuherz, B and Nöbauer, T and Oberegger, M and Padrta, M and Pernicka, M and Porth, P and Rohringer, H and Schmid, S and Schreiner, T and Stark, R and Steininger, H and Strauss, J and Taurok, A and Uhl, D and Waltenberger, W and Walzel, G and Widl, E and Wulz, C-E and Petrov, V and Prosolovich, V and Chekhovsky, V and Dvornikov, O and Emeliantchik, I and Litomin, A and Makarenko, V and Marfin, I and Mossolov, V and Shumeiko, N and Solin, A and Stefanovitch, R and Gonzalez, J Suarez and Tikhonov, A and Fedorov, A and Korzhik, M and Missevitch, O and Zuyeuski, R and Beaumont, W and Cardaci, M and Langhe, E De and Wolf, E A De and Delmeire, E and Ochesanu, S and Tasevsky, M and Mechelen, P Van and D'Hondt, J and Weirdt, S De and Devroede, O and Goorens, R and Hannaert, S and Heyninck, J and Maes, J and Mozer, M U and Tavernier, S and Doninck, W Van and Lancker, L Van and Mulders, P Van and Villella, I and Wastiels, C and Yu, C and Bouhali, O and Charaf, O and Clerbaux, B and Harenne, P De and Lentdecker, G De and Dewulf, J P and Elgammal, S and Gindroz, R and Hammad, G H and Mahmoud, T and Neukermans, L and Pins, M and Pins, R and Rugovac, S and Stefanescu, J and Sundararajan, V and ... and CMS Collaboration
Journal of Instrumentation, ISSN 1748-0221, 08/2008, Volume 3, Issue 8, pp. S08004 - S08004
The Compact Muon Solenoid (CMS) detector is described. The detector operates at the Large Hadron Collider (LHC) at CERN. It was conceived to study... 
Overall mechanics design | Data processing methods | Digital electronic circuits | Calorimeters | Electronic detector readout concepts | Calibration and fitting methods | Gaseous detectors | Computing | Data acquisition circuits | Detector alignment and calibration methods | Cluster finding | Front-end electronics for detector readout | Trigger concepts and systems | Large detector systems for particle and astroparticle physics | Gamma detectors | Control and monitor systems online | Detector design and construction technologies and materials | Manufacturing | Optical detector readout concepts | Data acquisition concepts | Data reduction methods | Solid state detectors | Particle tracking detectors | Online farms and online filtering | Modular electronics | Scintillation and light emission processes | Detector grounding | VLSI circuits | Instrumentation for particle accelerators and storage rings-high energy | Detector control systems | Detector cooling and thermo-stabilization | Pattern recognition | Software architectures | Voltage distributions | Scintillators | Analysis and statistical methods | Particle identification methods | Special cables | Spectrometers | Digital signal processing | Analogue electronic circuits | Pattern recognition, cluster finding, calibration and fitting methods | Instrumentation for particle accelerators and storage rings | RESISTIVE PLATE CHAMBERS | PROTON-INDUCED DAMAGE | SILICON SENSORS | PBWO4 SCINTILLATING CRYSTALS | CATHODE STRIP CHAMBERS | VACUUM PHOTOTRIODES | LEAD TUNGSTATE CRYSTALS | high energy | INSTRUMENTS & INSTRUMENTATION | FRONT-END ELECTRONICS | LEVEL GLOBAL TRIGGER | Scintillators, scintillation and light emission processes | LONG-TERM PERFORMANCE | Instrumentation and Detectors | Physics
Journal Article
Journal of Physics G: Nuclear and Particle Physics, ISSN 0954-3899, 11/2007, Volume 34, Issue 11, pp. 2307 - 2455
This report presents the capabilities of the CMS experiment to explore the rich heavy-ion physics programme offered by the CERN Large Hadron Collider (LHC).... 
PARTONIC ENERGY-LOSS | JET PRODUCTION | ELLIPTIC FLOW | J/PSI PHOTOPRODUCTION | QUARK-GLUON PLASMA | PHYSICS, NUCLEAR | LOW-X | NUCLEUS-NUCLEUS COLLISIONS | HADRON-PRODUCTION | COLOR GLASS CONDENSATE | CENTRALITY DEPENDENCE | PHYSICS, PARTICLES & FIELDS | Physics | High Energy Physics - Experiment
Journal Article
Russian Microelectronics, ISSN 1063-7397, 5/2019, Volume 48, Issue 3, pp. 197 - 201
We investigate FP9120 positive photoresist films 1.8 μm thick that are spin-coated on the surface of KDB-10 (111) silicon wafers and implanted with В+ and Р+... 
Engineering | Electrical Engineering
Journal Article
Russian Microelectronics, ISSN 1063-7397, 5/2014, Volume 43, Issue 3, pp. 194 - 200
Radiation defect formation in the course of the ion implantation of the FP-9120 positive photo-resist films is investigated. It is established that the... 
Engineering | Electrical Engineering | Hardness | Nuclear radiation
Journal Article
Devices and Methods of Measurements, ISSN 2220-9506, 06/2016, Volume 7, Issue 1, pp. 77 - 84
Journal Article
Pribory i Metody Izmerenij, ISSN 2220-9506, 06/2016, Volume 7, Issue 1, pp. 77 - 84
In recent years new types of resist for nano and submicronic lithography are intensively developed. As perspective materials for resist various polymeric... 
microhardness | silicon | indentation | photoresist | scratching
Journal Article
Inorganic Materials, ISSN 0020-1685, 8/2012, Volume 48, Issue 8, pp. 768 - 772
The physicomechanical properties of GaP epilayers grown by liquid phase epitaxy from indium-based high-temperature solutions have been studied using... 
Chemistry | Inorganic Chemistry | Industrial Chemistry/Chemical Engineering | Materials Science, general | MATERIALS SCIENCE, MULTIDISCIPLINARY
Journal Article
Pribory i Metody Izmerenij, ISSN 2220-9506, 08/2015, Volume 6, Issue 1, pp. 94 - 98
There were investigated the capacity-voltage characteristics of the MOS transistors, fabricated by the similar process charts, with the identical applied... 
capacity-voltage | technological admixtures | MOS-transistor
Journal Article
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques, ISSN 1027-4510, 11/2013, Volume 7, Issue 6, pp. 1217 - 1220
The influence of an oxide coating on the strength characteristics of single-crystal silicon surface layers is investigated by the microindentation method. It... 
Surfaces and Interfaces, Thin Films | Material Science | PHYSICS, CONDENSED MATTER
Journal Article
Russian Microelectronics, ISSN 1063-7397, 12/2013, Volume 42, Issue 8, pp. 467 - 476
Possibilities of obtaining a defect-free layer in wafers of dislocation-free single-crystal silicon subjected to rapid thermal annealing (RTA) are analyzed.... 
Engineering | silicon | getter | microdefect | interstitial atom | mathematical modeling | vacancy | Electrical Engineering | Silicon
Journal Article
Russian Microelectronics, ISSN 1063-7397, 11/2015, Volume 44, Issue 6, pp. 399 - 403
It is experimentally shown by atomic-force microscopy methods that cone-shaped structures that are nonuniformly distributed over the surface are formed on the... 
Engineering | Electrical Engineering
Journal Article
Scholarly Notes of Komsomolsk-na-Amure State Technical University, ISSN 2076-4359, 03/2018, Volume 1, Issue 33, pp. 80 - 90
Journal Article
Inorganic Materials, ISSN 0020-1685, 4/2009, Volume 45, Issue 4, pp. 343 - 346
Diffusion doping with gold is shown to reduce the microhardness of silicon single crystals. Oxygen precipitation suppresses this process because diffusing... 
Chemistry | Inorganic Chemistry | Industrial Chemistry/Chemical Engineering | Materials Science, general | MATERIALS SCIENCE, MULTIDISCIPLINARY | Hardness | Rain and rainfall | Silicon | Gold | Precipitation | Inorganic materials | Interstitials | Diffusion | Microhardness | Precipitates
Journal Article
Inorganic Materials, ISSN 0020-1685, 08/2012, Volume 48, Issue 8, pp. 768 - 772
Journal Article
Inorganic Materials, ISSN 0020-1685, 12/2010, Volume 46, Issue 12, pp. 1281 - 1284
Defect formation processes in silicon implanted with ∼1 MeV/nucleon boron, oxygen, and argon ions have been studied using microhardness and Hall effect... 
Chemistry | Inorganic Chemistry | Industrial Chemistry/Chemical Engineering | Materials Science, general | Hardness | Silicon | Boron | Crystal defects | Ion implantation | Implants | Interstitials | Nucleons | Strength
Journal Article
Russian Microelectronics, ISSN 1063-7397, 7/2011, Volume 40, Issue 4, pp. 289 - 292
Properties of silicon (M-Si) prepared by the Czochralski growth technique in a vertical magnetic field of 0.05 T applied to a melt are studied by measuring IR... 
Engineering | Electrical Engineering | Silicon | Invisibility | Magnetic fields | Hardness | Hydrogen | Statistics
Journal Article
Russian Engineering Research, ISSN 1068-798X, 6/2010, Volume 30, Issue 6, pp. 587 - 595
New characteristics are proposed for the assessment of cutting stability in the analysis of a vibroacoustic signal: the fractal dimensionality and the... 
Engineering | Engineering Design
Journal Article
Acta Physica Polonica A, ISSN 0587-4246, 2011, Volume 120, Issue 1, pp. 46 - 48
Morphology and electron-transport properties in the photoresist-silicon structures implanted by 60 keV antimony in the fluence range 1 x 10(15) divided by 5 x... 
PHYSICS, MULTIDISCIPLINARY
Journal Article
Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques, ISSN 1027-4510, 11/2013, Volume 7, Issue 6, p. 1217
Journal Article
Russian Engineering Research, ISSN 1068-798X, 3/2010, Volume 30, Issue 3, pp. 235 - 242
The performance of cutting tools with nanostructural coatings is investigated. 
Engineering | Engineering Design | Coatings | Coatings industry
Journal Article
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