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lithography (17) 17
layout (14) 14
optimization (10) 10
engineering, electrical & electronic (9) 9
conferences (8) 8
masks (6) 6
metals (6) 6
optical imaging (6) 6
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silicon dioxide (4) 4
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directed self-assembly (3) 3
engineering, manufacturing (3) 3
insertion (3) 3
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4-mercaptobenzoic acid (2) 2
accuracy (2) 2
analysis (2) 2
automation & control systems (2) 2
basic electric elements (2) 2
bone drilling robot (2) 2
bones (2) 2
boundary conditions (2) 2
casings or constructional details of electric apparatus (2) 2
chemistry (2) 2
circuits (2) 2
clocks (2) 2
computer imaging, vision, pattern recognition and graphics (2) 2
computer science, general (2) 2
computer science, interdisciplinary applications (2) 2
convection (2) 2
defects (2) 2
deformation effects (2) 2
deformation mechanisms (2) 2
design (2) 2
design and construction (2) 2
digital (2) 2
digital recording (2) 2
dynamics (2) 2
electric solid state devices not otherwise provided for (2) 2
electric techniques not otherwise provided for (2) 2
electricity (2) 2
electrothermal equation (2) 2
end effectors (2) 2
engineering, biomedical (2) 2
enhanced raman-scattering (2) 2
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gold nanoparticles (2) 2
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Journal Article
IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, ISSN 0278-0070, 09/2017, Volume 36, Issue 9, pp. 1522 - 1531
Journal Article
IEEE Transactions on Circuits and Systems II: Express Briefs, ISSN 1549-7747, 08/2018, Volume 65, Issue 8, pp. 1044 - 1048
Electrothermal analogy allows heat conduction and heat convection to be modeled as a simple resistive or RC network. A practical environment in which a chip is... 
Electrothermal analogy | Atmospheric modeling | Boundary conditions | Mathematical model | Convection | Resistance heating | thermal analysis | DESIGN | SIMULATION | ENGINEERING, ELECTRICAL & ELECTRONIC | Smartphones | Conductive heat transfer | Thermodynamic properties | Steady state | Thermal design | Conduction heating
Journal Article
IEEE Transactions on Semiconductor Manufacturing, ISSN 0894-6507, 02/2017, Volume 30, Issue 1, pp. 1 - 7
Journal Article
IEEE Transactions on Very Large Scale Integration (VLSI) Systems, ISSN 1063-8210, 01/2017, Volume 25, Issue 1, pp. 271 - 285
Modern standard cells contain intercell margins at the left and right ends for better lithography. We introduce defect probability, which is the probability... 
Geometry | intercell margin | Lithography | Layout | Metals | Defect probability | lithography defect | post-placement optimization | placement | Optimization | Standards | Physical design | physical design | COMPUTER SCIENCE, HARDWARE & ARCHITECTURE | ENGINEERING, ELECTRICAL & ELECTRONIC | Design optimization
Journal Article
IEEE Transactions on Semiconductor Manufacturing, ISSN 0894-6507, 02/2016, Volume 29, Issue 1, pp. 44 - 49
Achieving lithography-friendly layout typically involves repeated heuristic optimization and lithography simulations, and so is very time-consuming. We propose... 
Light interference map | SRAF | OPC | Contacts | Layout | Lithography | Metals | Interference | Logic gates | lithography-friendly | Optimization | layout | PHYSICS, CONDENSED MATTER | PHYSICS, APPLIED | lithography-friendly layout | ENGINEERING, MANUFACTURING | ENGINEERING, ELECTRICAL & ELECTRONIC | Usage | Research | Nanolithography | Mathematical optimization | Gates (Electronics)
Journal Article
IEEE/ASME Transactions on Mechatronics, ISSN 1083-4435, 10/2018, Volume 23, Issue 5, pp. 2295 - 2305
Journal Article
2018, Nanoscience and technology, ISBN 9783319762937, 144
This book discusses physical design and mask synthesis of directed self-assembly lithography (DSAL). It covers the basic background of DSAL technology,... 
Materials science | Self-assembly (Chemistry) | Integrated circuits-Masks | Materials Science | Semiconductors | Nanotechnology and Microengineering | Optical and Electronic Materials | Circuits and Systems | Nanoscale Science and Technology | Nanotechnology
eBook
by Ji, D and Kang, TH and Shim, S and Hong, J
INTERNATIONAL JOURNAL OF CONTROL AUTOMATION AND SYSTEMS, ISSN 1598-6446, 01/2020, Volume 18, Issue 1, pp. 10 - 20
Journal Article
IEEE Transactions on Biomedical Engineering, ISSN 0018-9294, 1/2020, pp. 1 - 1
Objective: Augmented reality (AR) navigation using a position sensor in endoscopic surgeries relies on the quality of patient-image registration and hand-eye... 
hand-eye calibration | patient-image registration | endoscope | position sensor | Augmented reality
Journal Article
IEEE Transactions on Biomedical Engineering, ISSN 0018-9294, 1/2020, pp. 1 - 1
Two important and difficult tasks during a bone drilling procedure are guiding the orientation of the drilling axis toward the target and maintaining the... 
image guided navigation | Bone drilling robot | remote center of motion mechanism | rolling friction
Journal Article
Proceedings of SPIE - The International Society for Optical Engineering, ISSN 0277-786X, 2016, Volume 9782
Conference Proceeding
International Journal of Computer Assisted Radiology and Surgery, ISSN 1861-6410, 8/2019, Volume 14, Issue 8, pp. 1365 - 1377
Journal Article
IEEE Transactions on Circuits and Systems I: Regular Papers, ISSN 1549-8328, 03/2015, Volume 62, Issue 3, pp. 816 - 824
Journal Article
Journal of Micro/Nanolithography, MEMS, and MOEMS, ISSN 1932-5150, 1/2015, Volume 14, Issue 1, pp. 013503 - 013503
A small but diverse set of test patterns is essential for the optimization of lithography parameters. We selectively extract the complicated patterns that are... 
pattern classification | pattern extraction | hotspot library | lithography test pattern | MATERIALS SCIENCE, MULTIDISCIPLINARY | NANOSCIENCE & NANOTECHNOLOGY | OPTICS | ENGINEERING, ELECTRICAL & ELECTRONIC
Journal Article
Proceedings of the 53rd Annual Design Automation Conference, ISSN 0738-100X, 06/2016, Volume 5-09-, pp. 1 - 6
In sub-7nm technology, the size and pitch of vias are much smaller than optical resolution limit, and directed self-assembly lithography with multiple... 
multiple patterning | DSA defect probability | redundant via | directed self-assembly | Self-assembly | Heuristic algorithms | Lithography | Layout | Clustering algorithms | Metals | Polymers | Directed self-assembly | Multiple patterning | Redundant via | Self assembly | Circuits | Heuristic methods | Insertion | Clusters | Redundant | Masks
Conference Proceeding
RSC Advances, ISSN 2046-2069, 2017, Volume 7, Issue 12, pp. 7015 - 7021
We developed highly sensitive surface-enhanced Raman scattering (SERS) probes based on SiO2@Au@Ag nanoparticles (NPs) using the Ag growth onto Au NP seeds... 
GOLD NANOPARTICLES | NANOPROBES | SPECTROSCOPY | ENHANCED-RAMAN-SCATTERING | NANOSHELLS | OPTICAL-PROPERTIES | NANOSPHERES | NANOSTRUCTURES | FABRICATION | CHEMISTRY, MULTIDISCIPLINARY | SILVER NANOPARTICLES | Nanoparticles | Seeds | Raman scattering | Surface chemistry | Formations | Polyvinylpyrrolidone | Nanostructure | Silicon dioxide
Journal Article
RSC Advances, ISSN 2046-2069, 2017, Volume 7, Issue 12, pp. 7015 - 7021
We developed highly sensitive surface-enhanced Raman scattering (SERS) probes based on SiO2@Au@Ag nanoparticles (NPs) using the Ag growth onto Au NP seeds... 
Journal Article
Proceedings of SPIE - The International Society for Optical Engineering, ISSN 0277-786X, 2017, Volume 10147
Conference Proceeding
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