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resonant frequency (23) 23
science & technology (21) 21
resonators (20) 20
micromechanical devices (19) 19
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Applied physics letters, ISSN 0003-6951, 11/2020, Volume 117, Issue 19
Journal Article
Applied physics letters, ISSN 0003-6951, 05/2018, Volume 112, Issue 19, p. 194103
Journal Article
Applied physics letters, ISSN 0003-6951, 11/2020, Volume 117, Issue 19
Journal Article
Journal of microelectromechanical systems, ISSN 1057-7157, 12/2017, Volume 26, Issue 6, p. 1196
Journal Article
Nature communications, 10/2019, Volume 10, Issue 1, p. 4980
Journal Article