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performing operations (20) 20
transporting (20) 20
microstructural technology (18) 18
processes or apparatus specially adapted for the manufactureor treatment of microstructural devices or systems (18) 18
microstructural devices or systems, e.g. micromechanicaldevices (12) 12
chemistry (10) 10
basic electric elements (8) 8
electricity (8) 8
science & technology (7) 7
physical sciences (6) 6
electric discharge tubes or discharge lamps (5) 5
technology (5) 5
chemical surface treatment (4) 4
coating by vacuum evaporation, by sputtering, by ion implantationor by chemical vapour deposition, in general (4) 4
coating by vacuum evaporation, by sputtering, by ionimplantation or by chemical vapour deposition, in general (4) 4
coating material with metallic material (4) 4
coating metallic material (4) 4
diffusion treatment of metallic material (4) 4
electric solid state devices not otherwise provided for (4) 4
inhibiting corrosion of metallic material or incrustation ingeneral (4) 4
liquid crystals (4) 4
metallurgy (4) 4
semiconductor devices (4) 4
surface treatment of metallic material by diffusion into thesurface, by chemical conversion or substitution (4) 4
chemistry, multidisciplinary (3) 3
crown ethers (3) 3
crystallography (3) 3
materials science (3) 3
materials science, multidisciplinary (3) 3
3d mems (2) 2
cations (2) 2
chemistry, physical (2) 2
crown compounds (2) 2
general works (2) 2
petroleum industry (2) 2
petroleum production (2) 2
phase transitions (2) 2
physical or chemical processes or apparatus in general (2) 2
salt effect (2) 2
separation (2) 2
acceleration (1) 1
accelerometer (1) 1
alkoxy substituted (1) 1
anions (1) 1
bacterial chemotaxis (1) 1
bacteriology (1) 1
bearing (1) 1
biological and medical sciences (1) 1
bottlenecks (1) 1
capillary assay (1) 1
cell transport (1) 1
chemical compounds (1) 1
chemical synthesis (1) 1
chemosensory movement (1) 1
chemotaxis (1) 1
clearing (1) 1
colloidal state and disperse state (1) 1
columnar (1) 1
columnar phases (1) 1
columnar structure (1) 1
columns (1) 1
comb structure (1) 1
crown ether (1) 1
crystals (1) 1
derivatives (1) 1
discotic (1) 1
electron transport (1) 1
electronic properties (1) 1
energy & fuels (1) 1
engineering (1) 1
engineering, petroleum (1) 1
epyc process (1) 1
epyc40 (1) 1
exact sciences and technology (1) 1
experiments (1) 1
fundamental and applied biological sciences. psychology (1) 1
general and physical chemistry (1) 1
gyroscope (1) 1
gyroscopes (1) 1
gyroscopic instruments (1) 1
hexagonal phase (1) 1
impedance spectroscopy (1) 1
indicating presence, absence, or direction, of movement (1) 1
inertial sensor (1) 1
innovations (1) 1
ion channels (1) 1
ion currents (1) 1
ion transport (1) 1
ions (1) 1
liquid crystal displays--lcds (1) 1
lubricants & lubrication (1) 1
lubricating oils (1) 1
measuring (1) 1
measuring distances, levels or bearings (1) 1
measuring linear or angular speed, acceleration, deceleration,or shock (1) 1
mechanical sensors (1) 1
melting (1) 1
mems (1) 1
mesophase (1) 1
mesophases (1) 1
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1. Full Text Discotic Liquid Crystals
by Wöhrle, Tobias and Wurzbach, Iris and Kirres, Jochen and Kostidou, Antonia and Kapernaum, Nadia and Litterscheidt, Juri and Haenle, Johannes Christian and Staffeld, Peter and Baro, Angelika and Giesselmann, Frank and Laschat, Sabine
Chemical reviews, ISSN 0009-2665, 2016, Volume 116, Issue 3, pp. 1139 - 1241
Physical Sciences | Chemistry | Chemistry, Multidisciplinary | Science & Technology | Quantum chemistry | Liquid crystals | Research
Journal Article
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2. Full Text Improved Electronic Transport in Ion Complexes of Crown Ether Based Columnar Liquid Crystals
by Staffeld, Peter and Kaller, Martin and Ehni, Philipp and Ebert, Max and Laschat, Sabine and Giesselmann, Frank
Crystals (Basel), ISSN 2073-4352, 02/2019, Volume 9, Issue 2, p. 74
Physical Sciences | Materials Science | Technology | Crystallography | Materials Science, Multidisciplinary | Science & Technology | Temperature dependence | Electronic properties | Crown ethers | Crystals | Ion currents | Liquid crystals | Experiments | Phase transitions | Columnar structure | Thin films | Anions | Alkoxy substituted | Organic light emitting diodes | Thiocyanates | X ray scattering | Cations | Photoconductivity | Electron transport | Thermal cycling | columnar | photoconductivity | impedance spectroscopy | crown ether | electron transport | X-ray diffraction | liquid crystals | ion transport | discotic | ion channels | salt effect
Journal Article
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3. Full Text Multilayer Micromechanics Process with Thick Functional Layers (EPyC40)
by Louriki, Latifa and Staffeld, Peter and Kaelberer, Arnd and Otto, Thomas
Proceedings, ISSN 2504-3900, 08/2017, Volume 1, Issue 4, p. 296
EPyC40 | 3D MEMS | comb structure
Journal Article
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4. Full Text Silicon Sacrificial Layer Technology for the Production of 3D MEMS (EPyC Process)
by Louriki, Latifa and Staffeld, Peter and Kaelberer, Arnd and Otto, Thomas
Proceedings, ISSN 2504-3900, 08/2017, Volume 1, Issue 4, p. 295
3D MEMS | silicon sacrificial layer technology | EPyC process
Journal Article
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5. Full Text Substituted crown ethers as central units in discotic liquid crystals: effects of crown size and cation uptake
by Kaller, Martin and Staffeld, Peter and Haug, Rüdiger and Frey, Wolfgang and Giesselmann, Frank and Laschat, Sabine
Liquid crystals, ISSN 0267-8292, 05/2011, Volume 38, Issue 5, pp. 531 - 553
crown compounds | liquid crystals | substituent effects | columnar phases | salt effect | Substituent effects | Salt effect | Liquid crystals | Crown compounds | Columnar phases | Physical Sciences | Chemistry | Materials Science | Technology | Materials Science, Multidisciplinary | Chemistry, Multidisciplinary | Crystallography | Science & Technology | Ions | Nuclear magnetic resonance--NMR | Liquid crystal displays--LCDs | Spectrum analysis | Clearing | Uptakes | Crown ethers | Phase stability | Cations | Hexagonal phase | Columns (structural)
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6. Full Text Increased mesophase range in liquid crystalline crown ethers via lower molecular symmetry
by Kaller, Martin and Beardsworth, Stuart J and Staffeld, Peter and Tussetschläger, Stefan and Gießelmann, Frank and Laschat, Sabine
Liquid crystals, ISSN 0267-8292, 05/2012, Volume 39, Issue 5, pp. 607 - 618
crown compounds | mesophases | substituent effect | liquid crystals | Physical Sciences | Chemistry | Materials Science | Technology | Materials Science, Multidisciplinary | Chemistry, Multidisciplinary | Crystallography | Science & Technology | Temperature | Melting | Chemical synthesis | Chemical compounds | Phase transitions | Symmetry | Phases | Synthesis | Crown ethers | Mesophase | Derivatives | Liquid crystals | Bearing
Journal Article
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7. Full Text Laser ReSeal - Combination of Accelerometer and Gyroscope Sensors in a Single MEMS Chip Silicon Wafer Processing Technology for Six Degrees of Freedom in Inertial Sensors
by Rumpf, Holger and Frey, Jens and Ritzau, Kurt-Ulrich and Breitling, Achim and Staffeld, Peter and Ametowobla, Mawuli
2020 IEEE Sensors, 10/2020, pp. 1 - 4
Micromechanical devices | Mechanical sensors | Vents | inertial sensor | accelerometer | Silicon | MEMS | Sensors | Gyroscopes | Acceleration | gyroscope
Conference Proceeding
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8. Full Text Opferschicht-Ätzverfahren und Opferschicht-Ätzstruktur sowie entsprechendes Opferschicht-Ätzstruktur-Herstellungsverfahren
by Zielke, Christian and Staffeld, Peter Borwin
07/2017
TRANSPORTING | MICROSTRUCTURAL TECHNOLOGY | SEMICONDUCTOR DEVICES | PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS | BASIC ELECTRIC ELEMENTS | MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES | ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR | PERFORMING OPERATIONS | ELECTRICITY
Patent
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9. Full Text Verfahren zum Einstellen eines Drucks in einer mithilfe eines Substrats und einer Substratkappe ausgebildeten Kaverne, System
by Staffeld, Peter Borwin and Ferre I Tomas, Rafel and Kronenberger, Achim
05/2020
TRANSPORTING | SURVEYING | MICROSTRUCTURAL TECHNOLOGY | MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES | MEASURING | INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT | PHOTOGRAMMETRY OR VIDEOGRAMMETRY | TESTING | GYROSCOPIC INSTRUMENTS | PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS | MEASURING DISTANCES, LEVELS OR BEARINGS | PHYSICS | NAVIGATION | PERFORMING OPERATIONS | MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK
Patent
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10. Full Text Process to produce microelectromechanical structures in a strata-sequence and a corresponding electronic component with a microelectromechanical structure
by BREITSCHAEDEL, OLIVER and KAELBERER, ARND and ZIELKE, CHRISTIAN and ARTMANN, HANS and STAFFELD, PETER BORWIN
01/2020
TRANSPORTING | MICROSTRUCTURAL TECHNOLOGY | PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS | MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES | PERFORMING OPERATIONS
Patent
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11. Full Text Method for producing a multilayer MEMS component, and corresponding multilayer MEMS component
by Kaelberer, Arnd and Artmann, Hans and Breitschaedel, Oliver and Zielke, Christian and Staffeld, Peter Borwin
10/2019
TRANSPORTING | MICROSTRUCTURAL TECHNOLOGY | PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS | MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES | PERFORMING OPERATIONS
Patent
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12. Full Text METHOD FOR PRODUCING A MULTILAYER MEMS COMPONENT, AND CORRESPONDING MULTILAYER MEMS COMPONENT
by Kaelberer, Arnd and Artmann, Hans and Breitschaedel, Oliver and Zielke, Christian and Staffeld, Peter Borwin
01/2019
TRANSPORTING | MICROSTRUCTURAL TECHNOLOGY | PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS | MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES | PERFORMING OPERATIONS
Patent
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13. Full Text Diffusion-induced banding of colloid particles via diffusiophoresis: 2. Non-electrolytes
by Staffeld, Peter O and Quinn, John A
Journal of colloid and interface science, ISSN 0021-9797, 1989, Volume 130, Issue 1, pp. 88 - 100
Physical Sciences | Chemistry | Chemistry, Physical | Science & Technology
Journal Article
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14. Full Text 다층 MEMS 부품을 제조하기 위한 방법 및 상응하는 다층 MEMS 부품
by BREITSCHAEDEL OLIVER and KAELBERER ARND and ZIELKE CHRISTIAN and ARTMANN HANS and STAFFELD PETER BORWIN
09/2018
TRANSPORTING | MICROSTRUCTURAL TECHNOLOGY | PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS | PERFORMING OPERATIONS
Patent
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15. Full Text METHOD FOR PRODUCING MULTILAYER MEMS COMPONENT, AND CORRESPONDING MULTILAYER MEMS COMPONENT
by BREITSCHAEDEL OLIVER and KAELBERER ARND and ZIELKE CHRISTIAN and ARTMANN HANS and STAFFELD PETER BORWIN
08/2018
TRANSPORTING | MICROSTRUCTURAL TECHNOLOGY | PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS | PERFORMING OPERATIONS
Patent
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16. Full Text Etching device and etching method
by Kaelberer, Arnd and Artmann, Hans and Breitschaedel, Oliver and Zielke, Christian and Staffeld, Peter Borwin
07/2018
CHEMICAL SURFACE TREATMENT | COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL | DIFFUSION TREATMENT OF METALLIC MATERIAL | COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL | METALLURGY | COATING MATERIAL WITH METALLIC MATERIAL | BASIC ELECTRIC ELEMENTS | CHEMISTRY | INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL | SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION | ELECTRICITY | ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS | COATING METALLIC MATERIAL
Patent
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17. Full Text Method for manufacturing microelectromechanical structures in a layer sequence and a corresponding electronic component having a microelectromechanical structure
by Staffeld Peter Borwin and Zielke Christian and Kaelberer Arnd and Breitschaedel Oliver and Artmann Hans
04/2018
TRANSPORTING | MICROSTRUCTURAL TECHNOLOGY | PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS | PERFORMING OPERATIONS
Patent
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18. Full Text Diffusion-induced banding of colloid particles via diffusiophoresis: 1. Electrolytes
by Staffeld, Peter O and Quinn, John A
Journal of colloid and interface science, ISSN 0021-9797, 1989, Volume 130, Issue 1, pp. 69 - 87
Physical Sciences | Chemistry | Chemistry, Physical | Science & Technology
Journal Article
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