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Proceedings of SPIE - The International Society for Optical Engineering, ISSN 0277-786X, 2011, Volume 8169
Micro-optics is an indispensable key enabling technology (KET) for many applications today. The important role of micro-optical components is based on three... 
slow-axis collimator | array illumination | Shack-Hartmann | beam shaping | wafer-level packaging | fiber coupling | confocal microscope | wafer-level optics | Micro-optics | microlens array | diffractive optical elements | Optical fibers | Beams (radiation) | Lithography | Focusing | Packaging | Miniaturization | Fiber optics
Conference Proceeding
Optics Express, ISSN 1094-4087, 09/2010, Volume 18, Issue 20, pp. 20968 - 20978
A new illumination system for mask aligner lithography is presented. The illumination system uses two subsequent microlens-based Kohler integrators. The second... 
MICROLENSES | OPTICS
Journal Article
Proceedings of SPIE - The International Society for Optical Engineering, ISSN 0277-786X, 2013, Volume 8788
We present several characterization techniques, which are suitable for small-size microlenses of lens diameters down to 5 mu m. For an individual microlens, we... 
Mach-Zehnder interferometer | Microlens array | Confocal microscopy | Strehl ratio | Optical shop test | High-resolution interference microscope (HRIM) | Micro-optics | Maps | Surface properties | Microlenses | Confocal | Arrays | Microscopes | Three dimensional | Lenses
Conference Proceeding
Applied Optics, ISSN 1559-128X, 02/2006, Volume 45, Issue 5, pp. 829 - 835
We demonstrate the use of digital holographic microscopy (DHM) as a metrological tool in micro-optics testing. Measurement principles are compared with those... 
INTERFEROMETRY | OPTICS | Usage | Holographic testing | Analysis | Interferometers | Lenses
Journal Article
Optics Express, ISSN 1094-4087, 2006, Volume 14, Issue 11, pp. 4687 - 4694
The optical properties of plano-convex refractive microlenses with low Fresnel Number (typically FN < 10) are investigated. It turns out that diffraction... 
SYSTEMS | OPTICS
Journal Article
Optics Express, ISSN 1094-4087, 06/2010, Volume 18, Issue 13, pp. 14251 - 14261
We present a new approach of beam homogenizing elements based on a statistical array of concave cylindrical microlens arrays. Those elements are used to... 
SILICON | OPTICS | Lasers, Excimer | Models, Theoretical | Microscopy, Electron, Scanning | Silicon Dioxide | Computer Simulation | Optics and Photonics - instrumentation | Diffusion | Equipment Design | Lenses
Journal Article
Proceedings of SPIE - The International Society for Optical Engineering, ISSN 0277-786X, 2008, Volume 7102
Conference Proceeding
Optics Express, ISSN 1094-4087, 11/2008, Volume 16, Issue 24, pp. 19541 - 19549
A two step process has been developed for the fabrication of diffraction limited concave microlens arrays. The process is based on the photoresist filling of... 
PHOTORESIST | ELEMENTS | REPLICATION | OPTICS | LITHOGRAPHY
Journal Article
IEEE Journal of Selected Topics in Quantum Electronics, ISSN 1077-260X, 01/2002, Volume 8, Issue 1, pp. 148 - 154
Journal Article
Proceedings of SPIE - The International Society for Optical Engineering, ISSN 0277-786X, 2007, Volume 6663
Conference Proceeding
Proceedings of SPIE-The International Society for Optical Engineering, ISSN 0277-786X, 2001, Volume 4440, pp. 40 - 43
Conference Proceeding
Proceedings of SPIE - The International Society for Optical Engineering, ISSN 0277-786X, 2006, Volume 6185
Conference Proceeding
Proceedings of SPIE, ISSN 0277-786X, 04/2006, Volume SPIE-6185, pp. 343 - 350
The optical properties of plano-convex refractive microlenses with low Fresnel Number (Typically FN less than 10) are investigated. Diffraction effects at the... 
Journal Article
Applied Optics, ISSN 1559-128X, 05/1990, Volume 29, Issue 14, pp. 2126 - 2134
Journal Article
Proceedings of SPIE, ISSN 0277-786X, 01/2006, Volume SPIE-6185, pp. 343 - 350
The optical properties of plano-convex refractive microlenses with low Fresnel Number (Typically FN less than 10) are investigated. Diffraction effects at the... 
Journal Article
Proceedings of SPIE - The International Society for Optical Engineering, ISSN 0277-786X, 1999, Volume 3749, pp. 378 - 379
Conference Proceeding
Proceedings of SPIE - The International Society for Optical Engineering, ISSN 0277-786X, 1999, Volume 3879, pp. 63 - 70
Conference Proceeding
2010 International Conference on Optical MEMS and Nanophotonics, ISSN 2160-5033, 08/2010, pp. 61 - 62
A dynamic laser beam shaper based on MEMS technology is presented. A magnetically actuated deformable single crystal silicon micromembrane is deformed in... 
Magnetic resonance | Biomembranes | Silicon | Laser beams | Mirrors | Optical reflection | Laser applications
Conference Proceeding
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