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Proceedings of SPIE - The International Society for Optical Engineering, ISSN 0277-786X, 10/2018, Volume 10809, pp. 108090R - 108090R-4
Extreme ultraviolet lithography (EUVL) has received a considerable attention in the semiconductor industry as a promising candidate to achieve the high... 
EUV scanning process | Extreme ultraviolet lithography | transmittance | pellicle
Conference Proceeding
Proceedings of the International Society of Offshore and Polar Engineers Conference, ISSN 1098-6189, 01/2014, pp. 405 - 409
We developed an oceanic energy harvesting robotic buoy system that can hold position automatically without anchoring line. The points we aimed at are... 
Journal Article
Proceedings of the International Society of Offshore and Polar Engineers Conference, ISSN 1098-6189, 01/2014, pp. 405 - 409
We developed an oceanic energy harvesting robotic buoy system that can hold position automatically without anchoring line. The points we aimed at are... 
Electric power generation | Offshore | Oceans | Electricity | Energy harvesting | Robotics | Anchoring | Buoys
Journal Article
Proceedings of the International Offshore and Polar Engineering Conference, ISSN 1098-6189, 2014, pp. 405 - 409
Conference Proceeding
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