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2018, ISBN 303842868X
MEMS mirrors can steer, modulate and switch light, as well as control the wavefront for focusing or phase modulation. MEMS mirrors have found enormous... 
MEMS mirror modeling | MEMS mirror control | Deformable micromirrors | MEMS mirror applications | MEMS mirrors | MEMS mirror arrays
eBook
IEEE Sensors Journal, ISSN 1530-437X, 09/2008, Volume 8, Issue 9, pp. 1511 - 1518
Journal Article
Journal of Microelectromechanical Systems, ISSN 1057-7157, 02/2016, Volume 25, Issue 1, pp. 207 - 216
Journal Article
Journal of Microelectromechanical Systems, ISSN 1057-7157, 02/2014, Volume 23, Issue 1, pp. 39 - 49
Journal Article
Journal of Microelectromechanical Systems, ISSN 1057-7157, 04/2016, Volume 25, Issue 2, pp. 347 - 355
Journal Article
Sensors and Actuators: A. Physical, ISSN 0924-4247, 10/2019, Volume 298, p. 111586
This paper reports a Silicon Optical Bench (SiOB) integrated with two vertically-oriented tip-tilt micromirrors that can perform active beam steering. The... 
Micromirror | Forward-view scan | Bimorph | Electrothermal actuation | SiOB | LiDAR | INSTRUMENTS & INSTRUMENTATION | ENGINEERING, ELECTRICAL & ELECTRONIC | Aluminum | Modulus of elasticity | Tip tilt | Vertical orientation | Silicon dioxide | Beam steering | Optical properties | Micro air vehicles (MAV) | Silicon | Stiffness | Sensors | Mirrors | Bimorphs
Journal Article
Micromachines, ISSN 2072-666X, 02/2018, Volume 9, Issue 3, p. 99
MEMS mirrors can steer, modulate, and switch light, as well as control the wavefront for focusing or phase modulation.[...]. 
NANOSCIENCE & NANOTECHNOLOGY | MICROMIRROR | DESIGN | INSTRUMENTS & INSTRUMENTATION | FABRICATION | SCANNER | n/a
Journal Article
Journal of Biophotonics, ISSN 1864-063X, 08/2019, Volume 12, Issue 8, pp. e201900066 - n/a
Optical resolution photoacoustic microscopy (ORPAM) is an emerging imaging technique, which has been extensively used to study various brain activities and... 
BIOPHYSICS | OPTICS | BRAIN | BIOCHEMICAL RESEARCH METHODS | Microscope and microscopy | Neuroimaging | Brain | Cerebral cortex | Hardware reviews | Cortex | Disorders | Field of view | Reperfusion | Ischemia | Microscopy | Photoacoustic microscopy | Rodents | Morphology | Wearable technology
Journal Article
MICROMACHINES, ISSN 2072-666X, 07/2019, Volume 10, Issue 7, p. 458
Optical micro-electro-mechanical systems (MEMS), micro-opto-electro-mechanical systems (MOEMS), or optical microsystems are devices or systems that interact... 
NANOSCIENCE & NANOTECHNOLOGY | INSTRUMENTS & INSTRUMENTATION | n/a
Journal Article
Sensors & Actuators: A. Physical, ISSN 0924-4247, 05/2019, Volume 290, pp. 130 - 136
Lead zirconate titanate (PZT) has wide applications in microelectromechanical systems (MEMS) due to its large piezoelectric coefficients. However, there exist... 
Wet etching | HBF4 | Residue-Free | PZT | PZT transducers | Ceramic PZT | HBF | THIN-FILMS | INSTRUMENTS & INSTRUMENTATION | ENGINEERING, ELECTRICAL & ELECTRONIC | Microelectromechanical systems | Circuit components | Zirconium | Usage | Analysis | Residues | Transducers | Piezoelectric transducers | Process parameters | Piezoelectricity | Fluoroboric acid | Photoresists | Etching | Selectivity | Ceramics | Lead zirconate titanates
Journal Article
Sensors & Actuators: A. Physical, ISSN 0924-4247, 07/2008, Volume 145-146, Issue 1-2, pp. 371 - 379
Journal Article
IEEE Photonics Technology Letters, ISSN 1041-1135, 08/2013, Volume 25, Issue 15, pp. 1478 - 1480
We have developed a confocal microscope using MEMS devices for laser scanning in all three axes. This full-MEMS laser scanning system is equipped with a MEMS... 
MEMS mirror | thermal actuation | confocal microscopy | 3-D scan | MEMS lens | PHYSICS, APPLIED | OPTICS | ENGINEERING, ELECTRICAL & ELECTRONIC
Journal Article
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