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直流磁控溅射 (35) 35
magnetron sputtering (12) 12
physics, multidisciplinary (9) 9
sputtering (9) 9
deposition (8) 8
materials science, multidisciplinary (8) 8
metallurgy & metallurgical engineering (7) 7
扫描电子显微镜 (7) 7
analysis (6) 6
thin-films (6) 6
dc magnetron sputtering (5) 5
magnetron (5) 5
optical properties (5) 5
thin films (5) 5
coatings (4) 4
dielectric films (4) 4
electrical resistivity (4) 4
microstructure (4) 4
射頻磁控濺鍍 (4) 4
annealing (3) 3
direct current (3) 3
growth (3) 3
morphology (3) 3
physics, nuclear (3) 3
röntgendiffraktion (3) 3
temperature (3) 3
transmittance (3) 3
直流磁控溅射法 (3) 3
薄膜沉积 (3) 3
退火温度 (3) 3
adhesion (2) 2
anisotropy (2) 2
antiferromagnetism (2) 2
argon (2) 2
atomic force microscopy (2) 2
coercivity (2) 2
cr (2) 2
diffusion (2) 2
dünnfilm (2) 2
electric properties (2) 2
electrical engineering (2) 2
elektronenmikroskopie (2) 2
ferromagnetism (2) 2
härte (2) 2
index medicus (2) 2
indium tin oxide (2) 2
ito薄膜 (2) 2
multilayer films (2) 2
nanocomposites (2) 2
nanoindentation (2) 2
nanoparticles (2) 2
oberflächenrauigkeit (2) 2
physics, particles & fields (2) 2
pressure (2) 2
rf magnetron sputtering (2) 2
sauerstoff (2) 2
scanning electron microscopy (2) 2
schichtdicke (2) 2
semiconductors (2) 2
sims (2) 2
sio2 (2) 2
stress (2) 2
sättigungsmagnetisierung (2) 2
technology (2) 2
thermal stability (2) 2
ti (2) 2
x-rays (2) 2
x-射线衍射 (2) 2
xps测试 (2) 2
xrd (2) 2
x射线光电子能谱 (2) 2
x射线衍射分析 (2) 2
zinc oxide (2) 2
zno薄膜 (2) 2
光学性质 (2) 2
制备 (2) 2
力学性能 (2) 2
原子力显微镜 (2) 2
各向异性 (2) 2
室温 (2) 2
异质结 (2) 2
性能 (2) 2
氧化銦錫 (2) 2
氧化锌 (2) 2
氮化物 (2) 2
溅射制备 (2) 2
溅射功率 (2) 2
热稳定性 (2) 2
电学性质 (2) 2
直流磁控濺鍍 (2) 2
磁性能 (2) 2
磁性薄膜 (2) 2
表征 (2) 2
透射电子显微镜 (2) 2
钼薄膜 (2) 2
铬薄膜 (2) 2
饱和磁化强度 (2) 2
2223相 (1) 1
abscheidungsrate (1) 1
activation (1) 1
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环境科学学报:英文版, ISSN 1001-0742, 2017, Volume 60, Issue 10, pp. 33 - 42
TiO2 rutile/anatase heterostructure thin films with varying rutile thickness have been in-situ synthesized via DC magnetron sputtering with Ar gas at room... 
原位合成 | 锐钛矿 | 厚度 | 直流磁控溅射 | 金红石型 | 异质结 | 光催化性能 | 室温 | Heterostructure | Dye degradation | Magnetron sputtering | TiO2 film | TiO film | THIN-FILMS | PERFORMANCE | VISIBLE-LIGHT | NANOPARTICLES | ENVIRONMENTAL SCIENCES | DOPED TIO2 | SURFACE | ANATASE | DEGRADATION | ELECTRONIC-STRUCTURE | TITANIA
Journal Article
中国物理C:英文版, ISSN 1674-1137, 2015, Issue 11, pp. 108 - 111
Ti N film was coated on the internal surface of a racetrack-type ceramic pipe by three different methods:radio-frequency sputtering, DC sputtering and DC... 
涂层方法 | 陶瓷管 | 跑道 | Ti | 实验 | 直流磁控溅射 | XPS测试 | 沉积速率
Journal Article
中国物理:英文版, ISSN 1674-1056, 2010, Volume 19, Issue 9, pp. 291 - 296
The Ag2O film, as-dcposited by direct-current magnetron reactive sputtering at a substrate temperature of 150 ℃, clearly shows a preferential orientation... 
振子模型 | 振荡器 | 直流磁控溅射 | 光学性质 | 直流磁控反应溅射 | 氧化银薄膜 | 光致发光光谱 | 能量值 | THIN-FILMS | Ag2O film | spectroscopic ellipsometry | LUMINESCENCE | PHYSICS, MULTIDISCIPLINARY | SILVER-OXIDE FILMS | BEHAVIOR | general oscillator model | CONSTANT | TECHNOLOGY | single-oscillator model
Journal Article
中国物理:英文版, ISSN 1674-1056, 2010, Issue 10, pp. 364 - 369
Nanocrystalline VO2 thin films were deposited onto glass slides by direct current magnetron sputtering and postoxidation. These films undergo... 
VO2薄膜 | X射线衍射 | 纳米颗粒 | 氧化薄膜 | 直流磁控溅射 | 光电子能谱 | 原子力显微镜 | 紫外可见光
Journal Article
中国有色金属学会会刊:英文版, ISSN 1003-6326, 2009, Volume 19, Issue 2, pp. 353 - 358
Columnar Fe-N thin films with thickness ranging from 30 to 150 nm were deposited by direct current magnetron sputtering using an At/N2 gas mixture... 
铁氮薄膜 | 气体混合物 | 直流磁控溅射 | 柱结构 | 柱状 | 磁性 | 透射电子显微镜 | 扫描电子显微镜 | saturation magnetization | coercivity | magnetic anisotropy | Fe-N thin film | METALLURGY & METALLURGICAL ENGINEERING | GROWTH | FE16N2
Journal Article
宿州学院学报, ISSN 1673-2006, 2013, Volume 28, Issue 1, pp. 69 - 70
摘要:用直流磁控溅射制备TiO2薄膜,分析了氧氩比和溅射功率两项制备参数对退火后形成的锐钛矿二氧化钛薄膜亲水性的影响。实验结果表明,适中的氧氩比2:3和功率126W下制备的薄膜具有很好的亲水性。 
亲水性 | 氧氩比 | 溅射功啐 | 直流磁控溅射 | 氧空位
Journal Article
by 李丽
职业技术, ISSN 1672-0601, 2011, Issue 9, pp. 120 - 120
磁控溅射是物相沉积镀膜中较为常用的一种方法。本文介绍了磁控溅射中比较基础的溅射方式——直流磁控溅射,说明了磁控溅射相对于其他物相沉积的优势以及工作原理,重点强调了直流磁控溅射的工作流程。 
基底 | 直流磁控溅射 | 工作流程 | 镀膜
Journal Article
玉林师范学院学报, ISSN 1004-4671, 2014, Volume 35, Issue 5, pp. 25 - 28
Journal Article
中国物理快报:英文版, ISSN 0256-307X, 2016, Volume 33, Issue 6, pp. 99 - 103
Tin oxide (SnO2) is one of the most promising transparent conducting oxide materials, which is widely used in thin film gas sensors. We investigate the... 
溅射制备 | 气体传感器 | SnO2薄膜 | 直流磁控溅射 | 性能优化 | 气敏性能 | 沉积时间 | 纳米晶 | NANOPARTICLES | NANOSTRUCTURES | PHYSICS, MULTIDISCIPLINARY | SENSORS
Journal Article
中国物理B:英文版, ISSN 1674-1056, 2017, Volume 26, Issue 10, pp. 438 - 441
The influences of the spacer-layer Ta on the structures and magnetic properties of NdFeB/NdCeFeB multilayer films are investigated via DC sputtering under an... 
钕铁硼 | 饱和磁化强度 | 交换耦合 | 磁性能 | 间隔层 | 直流磁控溅射 | 磁性结构 | 多层膜 | irreversible | multilayer films | spacer layer | permanent magnets | PERMANENT-MAGNETS | PHYSICS, MULTIDISCIPLINARY
Journal Article
材料科学技术学报:英文版, ISSN 1005-0302, 2015, Volume 31, Issue 12, pp. 1193 - 1197
Due to the excellent corrosion resistance and high irradiation damage resistance,Ti 2AlC MAX phase is considered as a candidate for applications as corrosion... 
X相 | MA | 真空热处理 | Ti | 直流磁控溅射 | 制备 | 物理气相沉积 | 涂层
Journal Article
金属学报:英文版, ISSN 1006-7191, 2017, Volume 30, Issue 7, pp. 688 - 696
The Cr–Si–N coatings were prepared by combining system of high-power impulse magnetron sputtering and pulsed DC magnetron sputtering. The Si content in the... 
硅涂层 | 直流磁控溅射 | 脉冲磁控溅射 | 组织和性能 | X射线衍射分析 | 扫描电子显微镜 | Cr | 高功率
Journal Article
中国物理B:英文版, ISSN 1674-1056, 2015, Volume 24, Issue 11, pp. 502 - 505
The indium-tin oxide (ITO) film as the antireflection layer and front electrodes is of key importance to obtaining high efficiency Si heterojunction (HJ) solar... 
ITO薄膜 | 直流磁控溅射法 | 硅层 | 铟锡氧化物薄膜 | 溅射功率 | 太阳能电池 | 薄膜制备 | 异质结 | DC magnetron sputtering | Si heterojunction solar cell | ITO films | PHYSICS, MULTIDISCIPLINARY | ITO THIN-FILMS | LAYERS | Solar cells | Volatile organic compounds | Flow rate | Magnetron sputtering | Photovoltaic cells | Solar power generation | Transmittance | Sputtering
Journal Article
中国物理C:英文版, ISSN 1674-1137, 2016, Volume 40, Issue 7, pp. 168 - 174
The thermal stability and separation characteristics of anti-sticking layers of Pt/Cr films are studied in this paper. Several types of adhesion layers were... 
分离特性 | 技术 | 热衰退 | 粘层 | 直流磁控溅射 | 热稳定性 | 铬薄膜 | Cr | hot slumping technique | anti-sticking layers | separation characteristic | thermal stability | Pt/Cr film | X-RAY TELESCOPES | PHYSICS, NUCLEAR | MIRRORS | PHYSICS, PARTICLES & FIELDS
Journal Article
中国物理B:英文版, ISSN 1674-1056, 2014, Volume 23, Issue 6, pp. 457 - 461
The strong anisotropy beryllium (Be) films are fabricated at different sputtering pressures by direct current magnetron sputtering. With the increase of... 
表面粗糙度 | 生长形态 | 直流磁控溅射 | 体电阻率 | 薄膜 | 各向异性 | 压力 | X射线衍射分析 | magnetron sputtering | growth morphology | Be films | electrical resistivity | SPECIFICATIONS | PHYSICS, MULTIDISCIPLINARY | UPDATE | THIN-FILM | MICROSTRUCTURE | Grains | Anisotropy | Electrical resistivity | Morphology | Beryllium | Atomic properties | Diffusion | Sputtering
Journal Article
材料科学技术学报:英文版, ISSN 1005-0302, 2012, Volume 28, Issue 11, pp. 981 - 991
Nanocrystalline ZrB2 film and nanocomposite Zr-B-O-N films were prepared by non-reactive as well as re- active magnetron sputtering techniques, respectively.... 
力学性能 | 微观结构特征 | 直流磁控溅射 | 纳米复合材料 | 流量比 | 相组成 | 氮气 | X-射线衍射分析 | Nanocomposite | Films | DC magnetron sputtering | Microhardness | Adhesion | TARGET | DEPOSITION | MATERIALS SCIENCE, MULTIDISCIPLINARY | METALLURGY & METALLURGICAL ENGINEERING | ELECTRICAL-PROPERTIES | NITRIDE | ORIGIN | NANOCOMPOSITES | GROWTH | COATINGS | CR-B
Journal Article
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