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Advanced materials (Weinheim), ISSN 0935-9648, 2010, Volume 22, Issue 32, pp. 3564 - 3567
Journal Article
Journal Article
Semiconductor science and technology, ISSN 1361-6641, 2014, Volume 29, Issue 4, p. 043001
..., light-emitting diodes and gas sensors. At the same time, the increasingly stringent requirements of the microelectronics industry, among other factors, have led to a dramatic increase in the use of atomic layer deposition (ALD... 
thin film | ZnO | atomic layer deposition | PHYSICS, CONDENSED MATTER | CORE-SHELL NANOFIBERS | ULTRAHIGH-ASPECT-RATIO | MATERIALS SCIENCE, MULTIDISCIPLINARY | ALUMINA SPINEL FORMATION | FLUIDIZED-BED REACTOR | AL-DOPED ZNO | ENGINEERING, ELECTRICAL & ELECTRONIC | LIGHT-EMITTING-DIODES | OXIDE THIN-FILMS | PULSED-LASER DEPOSITION | FILM SOLAR-CELLS | GAS-SENSING PROPERTIES
Journal Article
Journal Article
Science (American Association for the Advancement of Science), ISSN 1095-9203, 2012, Volume 335, Issue 6073, pp. 1205 - 1208
.... We overcoated palladium NPs with 45 layers of alumina through an atomic layer deposition (ALD) process that alternated exposures of the catalysts to trimethylaluminum and water at 200... 
Oxygen | Betting | Catalysts | Sintering | Surface areas | REPORTS | Reagents | Atoms | High temperature | Helium | Carbon | ETHANE | REFORMING CATALYSTS | VANADIUM | CONVERSION | MULTIDISCIPLINARY SCIENCES | OXIDATIVE DEHYDROGENATION | PROPANE | OXIDES | DEACTIVATION | ALKANES | Carbonization | Palladium catalysts | Thermal properties | Coating processes | Research | Chemical properties | Production processes | Nanoparticles | Atoms & subatomic particles | Alumina | Metals
Journal Article
Journal of crystal growth, ISSN 0022-0248, 10/2017, Volume 475, pp. 39 - 43
...°C on various thicknesses of 300°C-grown homo-buffer layers by atomic layer deposition (ALD... 
B2. Semiconducting II-VI materials | A3. Atomic layer epitaxy | B1. Oxides | A1. Characterization
Journal Article
Accounts of chemical research, ISSN 0001-4842, 02/2015, Volume 48, Issue 2, pp. 341 - 348
Journal Article