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Journal Article
Journal Article
Semiconductor Science and Technology, ISSN 0268-1242, 2014, Volume 29, Issue 4, p. 43001
Journal Article
ACS Nano, ISSN 1936-0851, 06/2015, Volume 9, Issue 6, pp. 5884 - 5892
Lithium metal is considered to be the most promising anode for next-generation batteries due to its high energy density of 3840 mAh g(-1). However, the extreme... 
lithium protection | solid electrolyte interface | lithium metal anode | atomic layer deposition | lithium-sulfur | ION BATTERIES | PROTECTION | PERFORMANCE | MATERIALS SCIENCE, MULTIDISCIPLINARY | CHEMISTRY, PHYSICAL | NANOSCIENCE & NANOTECHNOLOGY | MECHANISMS | CHEMISTRY, MULTIDISCIPLINARY | CATHODE | SULFUR BATTERY | COATINGS | AL2O3 | THIN-FILM
Journal Article
Chemistry of Materials, ISSN 0897-4756, 01/2014, Volume 26, Issue 1, pp. 786 - 801
Atomic layer deposition (ALD) is an attractive method to deposit thin films for advanced technological applications such as microelectronics and... 
iridium | ruthenium | platinum | atomic layer deposition | noble metal oxide | ALD | osmium | palladium | thin film | noble metal | rhodium | RUTHENIUM THIN-FILMS | DEHYDROGENATION REACTIONS | MATERIALS SCIENCE, MULTIDISCIPLINARY | CHEMISTRY, PHYSICAL | PLATINUM OXIDE | AMIDINATE PRECURSOR | LOW-TEMPERATURE | CARBON NANOTUBES | REACTION-MECHANISM | DIFFUSION BARRIER | RU FILMS | IN-SITU
Journal Article
Chemical communications (Cambridge, England), ISSN 1359-7345, 12/2016, Volume 53, Issue 1, pp. 45 - 71
Atomic layer deposition (ALD) is a gas-phase deposition technique that, by relying on self-terminating surface chemistry, enables the control of the amount of... 
Nitrides | Synthesis (chemistry) | Atomic layer deposition | Reactors | Semiconductors | Surface chemistry | Substrates | Deposition
Journal Article
Advanced Energy Materials, ISSN 1614-6832, 11/2011, Volume 1, Issue 6, pp. 1116 - 1125
Journal Article
Thin Solid Films, ISSN 0040-6090, 2009, Volume 517, Issue 8, pp. 2563 - 2580
Journal Article