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Macromolecules, ISSN 0024-9297, 01/2014, Volume 47, Issue 1, pp. 2 - 12
This Perspective addresses the current state of block copolymer lithography and identifies key challenges and opportunities within the field... 
THIN-FILMS | IMPRINT LITHOGRAPHY | DIBLOCK COPOLYMERS | SURFACE-INDUCED ORIENTATION | POLYMER SCIENCE | POLY(METHYL METHACRYLATE) | ABC-TRIBLOCK-COPOLYMERS | TEMPERATURE-DEPENDENCE | INTERACTION PARAMETER | DENSITY MULTIPLICATION | MICROPHASE SEPARATION
Journal Article
Polymer, ISSN 0032-3861, 02/2013, Volume 54, Issue 4, pp. 1269 - 1284
Block copolymer lithography, a process where block copolymer self-assembly is integrated with conventional lithographic patterning, is emerging as a promising technology for addressing the future... 
Lithography | Self-assembly | Block copolymer | THIN-FILMS | MULTIFUNCTIONAL MATERIALS | POLYMER SCIENCE | MOLECULAR-WEIGHT | ABC TRIBLOCK TERPOLYMER | ONE-DIMENSIONAL NANOSTRUCTURES | HUGGINS INTERACTION PARAMETER | LIGHT-SCATTERING | ORDERED SQUARE ARRAYS | POLY(METHYL METHACRYLATE) | DIBLOCK COPOLYMER | Methyl methacrylate | Integrated circuit fabrication | Block copolymers
Journal Article
Journal of Polymer Science Part A: Polymer Chemistry, ISSN 0887-624X, 01/2015, Volume 53, Issue 2, pp. 344 - 352
ABSTRACT This report describes the design and synthesis of a series of lamella‐forming, silicon‐containing block copolymers (Si‐BCPs) and evaluation of these... 
block copolymers | interaction parameter | lithography | reactive ion etching | self‐assembly | Reactive ion etching | Self-assembly | Lithography | Block copolymers | Interaction parameter | self-assembly
Journal Article
Proceedings of the National Academy of Sciences of the United States of America, ISSN 0027-8424, 11/2010, Volume 107, Issue 47, pp. 20202 - 20206
Journal Article
Materials Today, ISSN 1369-7021, 09/2006, Volume 9, Issue 9, pp. 20 - 29
The lithographic process is arguably the key enabling technology for the digital age. Hundreds of millions of devices can be fabricated on a single chip... 
THIN-FILMS | DIBLOCK COPOLYMERS | GRAIN-BOUNDARIES | SINGLE-CHAIN | SELF-ASSEMBLED MONOLAYERS | X-RAYS | TOP-DOWN | MATERIALS SCIENCE, MULTIDISCIPLINARY | PATTERN REGISTRATION | BOTTOM-UP | MORPHOLOGY | Block copolymers
Journal Article
Science, ISSN 0036-8075, 10/2008, Volume 322, Issue 5900, pp. 429 - 432
... features and patterns. Traditional self-assembling approaches based on block copolymer lithography spontaneously yield nanometer-sized hexagonal structures, but these features are not consistent with the industry-standard... 
Integrated circuits | Material films | Copolymers | Semiconductors | Lithography | Macromolecules | Reports | Polymers | Block copolymers | Molecular weight | Cylinders | THIN-FILMS | ABC TRIBLOCK COPOLYMERS | DIBLOCK COPOLYMERS | MULTIDISCIPLINARY SCIENCES | FABRICATION | BINARY BLENDS | SURFACES | Evaluation | Usage | Arrays (Data structures) | Electronics | Materials science | Hydrogen bonds | Nanotechnology
Journal Article
MRS bulletin, ISSN 0883-7694, 12/2005, Volume 30, Issue 12, pp. 952 - 966
As the size scale of device features becomes ever smaller, conventional lithographic processes become increasingly more difficult and expensive, especially at... 
Technical Feature | Nanoscale | Polymer | Self-assembly | Lithography | Block copolymer | polymer | THIN-FILMS | DIBLOCK COPOLYMERS | nanoscale | PHYSICS, APPLIED | NANOPOROUS POLYSTYRENE | ELECTRIC-FIELD | MATERIALS SCIENCE, MULTIDISCIPLINARY | NANOSTRUCTURES | lithography | DOMAIN ALIGNMENT | SOLVENT | block copolymer | self-assembly | ORIENTATION | HOLLOW NANOSPHERES | MICROSTRUCTURE
Journal Article
Journal of Polymer Science Part B: Polymer Physics, ISSN 0887-6266, 04/2015, Volume 53, Issue 8, pp. 595 - 603
...INTRODUCTION The increasing costs and technological challenges associated with optical lithography techniques has led to significant research on alternative... 
block copolymers | lithography | SAXS | self‐assembly | self-assembly | THIN-FILMS | ROUTE | POLYMER SCIENCE | CYLINDER | PATTERNS | ARRAYS | FABRICATION | SIMULATIONS | MORPHOLOGY | Polystyrene resins | Self assembly | Compressing | Roughness | Small angle X ray scattering | Compressed | Block copolymers | Stretching | Defects
Journal Article