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Proceedings of SPIE - The International Society for Optical Engineering, ISSN 0277-786X, 2013, Volume 8681
In this paper, we propose advanced overlay stability control improving conventional stability control, Baseliner(TM) and reference wafers with new vertical... 
Correction per exposure (CPE) | Scanner stability control | BaselinerTM | Overlay | Focus | Exposure | Stability | Immersion | Wafers | Optical scanners | Monitoring
Conference Proceeding
Journal Article
Medical Physics, ISSN 0094-2405, 04/2014, Volume 41, Issue 4, pp. 041711 - n/a
Purpose: To determine detector-specific output correction factors, $k_{Q_{{\rm clin}},Q_{{\rm msr}} }^{f_{{\rm clin}},f_{{\rm msr}} }$ k Q clin , Q msr f clin... 
Silicon detectors | Probability theory, stochastic processes, and statistics | dosimetry | biomedical equipment | ionisation | Photons | Junction diodes | Scintigraphy | Diodes | Ionization chambers | Linear accelerators | output correction factors | semiconductor diodes | Monte Carlo methods | diamond | PENELOPE | silicon | small field dosimetry | Monte Carlo | radiation therapy | Particle beam detectors | Therapeutic applications, including brachytherapy | Field size | Dosimetry/exposure assessment | FOCAL SPOT SIZE | ELECTRON-BEAMS | PLASTIC SCINTILLATION DETECTORS | HIGH-ENERGY PHOTON | ION CHAMBERS | DIODE DETECTORS | RESPONSE FACTORS | QUALITY INDEX | SIMULATIONS | RADIOLOGY, NUCLEAR MEDICINE & MEDICAL IMAGING | REFERENCE DOSIMETRY | Uncertainty | Radiotherapy Planning, Computer-Assisted - methods | Radiometry | Diamond | Silicon | Monte Carlo Method | Photons - therapeutic use | Monte Carlo method | Output correction factors | Radiation dosimetry | Electromagnetisme | Ciències de la salut | Física | Small field dosimetry | Dosificació | Montecarlo, Mètode de | Radiació | Diagnòstic per la imatge | Medicina | Àrees temàtiques de la UPC | CORRECTIONS | PHASE SPACE | SULFUR IONS | IODINE IONS | MONTE CARLO METHOD | MANUFACTURERS | FLUORINE IONS | COMPARATIVE EVALUATIONS | ABSORBED RADIATION DOSES | LIQUID IONIZATION CHAMBERS | LINEAR ACCELERATORS | PHOTON BEAMS | RADIOLOGY AND NUCLEAR MEDICINE | RADIOTHERAPY | DIAMONDS | DOSIMETRY | SILICON DIODES | Clinical Medicine | medicinsk strålningsfysik | Medical and Health Sciences | Radiologi och bildbehandling | Medicin och hälsovetenskap | Radiology, Nuclear Medicine and Medical Imaging | Medical Radiation Physics | Klinisk medicin
Journal Article
Journal Article
Proceedings of SPIE - The International Society for Optical Engineering, ISSN 0277-786X, 2014, Volume 9050
Conference Proceeding
Proceedings of SPIE - The International Society for Optical Engineering, ISSN 0277-786X, 2009, Volume 7272
Ever since the introduction of immersion lithography overlay has been a primary concern. Immersion exposure tools show an overlay fingerprint that we hope to... 
Fingerprint | Immersion | Overlay | Corrections per exposure
Conference Proceeding
Occupational and Environmental Medicine, ISSN 1351-0711, 10/2018, Volume 75, Issue 10, pp. 761 - 762
The median for the O*NET-derived strength variables indicated modest levels of job requirement for dynamic strength (median = 2.12; Interquartile range (IQR) =... 
Hands | Exposure | 1506
Journal Article
Proceedings of SPIE - The International Society for Optical Engineering, ISSN 0277-786X, 2013, Volume 8886
Overlay specifications are tightening with each lithography technology node. As a result, there is a need to improve overlay control methodologies to make them... 
CPE | Correction per exposure | APC | Overlay | Grid recipe | Advanced process control | Simulation | Specifications | Lithography | Optical scanners | Performance enhancement | Tightening | Trends
Conference Proceeding
PLOS ONE, ISSN 1932-6203, 07/2015, Volume 10, Issue 7, p. e103353
Journal Article
Journal of the Royal Statistical Society: Series B (Statistical Methodology), ISSN 1369-7412, 11/2017, Volume 79, Issue 5, pp. 1583 - 1599
Journal Article