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demolding force (22) 22
demolding (18) 18
adhesion (15) 15
polymer science (13) 13
nanoscience & nanotechnology (11) 11
physics, applied (11) 11
polymer (11) 11
engineering, electrical & electronic (10) 10
fabrication (10) 10
nanoimprint lithography (10) 10
entformen (9) 9
injection molding (9) 9
materials science, multidisciplinary (9) 9
friction (8) 8
imprint (8) 8
lithography (8) 8
molds (8) 8
nanoimprint (8) 8
nanostructure (8) 8
demolding process (7) 7
lithographie (7) 7
optics (7) 7
polymers (7) 7
step (7) 7
adhäsion (6) 6
demolding forces (6) 6
stress (6) 6
analysis (5) 5
force (5) 5
hot embossing (5) 5
simulation (5) 5
ausformen (4) 4
condensable gas (4) 4
deformation (4) 4
engineering, manufacturing (4) 4
flash imprint lithography (4) 4
forces (4) 4
instruments & instrumentation (4) 4
mold (4) 4
pentafluoropropane (4) 4
photolithographie (4) 4
replication (4) 4
roughness (4) 4
shrinkage (4) 4
ejection (3) 3
engineering, chemical (3) 3
finite element method (3) 3
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flow (3) 3
haftkraft (3) 3
hohlprägen (3) 3
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mechanics (3) 3
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molecular dynamics simulation (3) 3
nanolithographie (3) 3
numerische simulation (3) 3
rauigkeit (3) 3
research (3) 3
si mold (3) 3
solubility parameter (3) 3
surface energy (3) 3
surface treatment (3) 3
throughput (3) 3
uv nanoimprint (3) 3
abdeckmittel (2) 2
adhesion force (2) 2
anti-sticking layers (2) 2
aspect ratio (2) 2
aspect-ratio (2) 2
atomic force microscopy (2) 2
atomkraftmikroskopie (2) 2
chemical properties (2) 2
coatings (2) 2
contaminations (2) 2
defects (2) 2
deformation effects (2) 2
demolding moment (2) 2
depth-to-width ratio (2) 2
dünne schicht (2) 2
elastomer molds (2) 2
embossing (2) 2
engineering (2) 2
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experimentalanalyse (2) 2
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glasübergangstemperatur (2) 2
hard solid layers (2) 2
industrial and production engineering (2) 2
injected part (2) 2
injection mold (2) 2
lenses (2) 2
mathematical analysis (2) 2
measurement system (2) 2
mechanical properties (2) 2
methods (2) 2
micro injection molding (2) 2
micro-injection molding (2) 2
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Journal of materials processing technology, ISSN 0924-0136, 2017, Volume 246, pp. 211 - 223
.... During demolding, the forces taking place at the component-tool interface, due to adhesion and friction, need to be overcome preserving the integrity of the part... 
Demolding | Surface generation | Micro injection molding | Micro milling | FRICTION | MATERIALS SCIENCE, MULTIDISCIPLINARY | PARAMETERS | ROUGHNESS | EJECTION FORCES | REPLICATION | SHRINKAGE | PART | ENGINEERING, MANUFACTURING | ENGINEERING, INDUSTRIAL | Mechanical engineering
Journal Article
Journal of Non-Crystalline Solids, ISSN 0022-3093, 01/2014, Volume 383, pp. 66 - 70
.... The demolding point and the demolding force were apt to increase with the tensile force applied to the pressing axis, and also to the cooling rate... 
Demolding | Young's modulus | Phosphate glass | Borosilicate glass | Imprint | STICKING | MATERIALS SCIENCE, MULTIDISCIPLINARY | RELAXATION | MATERIALS SCIENCE, CERAMICS
Journal Article
Journal of micromechanics and microengineering, ISSN 1361-6439, 2014, Volume 24, Issue 5, pp. 055007 - 11
During the demoulding stage of the hot embossing process, the force required to separate a polymer part from the mould should be minimized to avoid the generation of structural defects for the produced micro structures... 
PMMA | hot embossing | demoulding | FRICTION | MATERIALS SCIENCE, MULTIDISCIPLINARY | NANOSCIENCE & NANOTECHNOLOGY | SIMULATION | ENGINEERING, ELECTRICAL & ELECTRONIC | DEMOLDING PROCESS | MICROSTRUCTURES | NANOIMPRINT LITHOGRAPHY | ADHESION | INSTRUMENTS & INSTRUMENTATION | MECHANICS | THERMAL NANOIMPRINT | REPLICATION | SHRINKAGE | STRESS | Micromechanics | Friction | Embossing | Microengineering | Mathematical analysis | Molds | Replication | Mathematical models | Adhesion
Journal Article
Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering, ISSN 0912-0289, 2018, Volume 84, Issue 5, pp. 473 - 478
Journal Article
Journal of photopolymer science and technology, ISSN 0914-9244, 2016, Volume 29, Issue 2, pp. 195 - 200
.... In this paper, contact separating between mold and polymer under different adhesion force conditions was investigated... 
demolding force | adhesion force | deformation | Nano-imprint | numerical simulation | antisticking layer | Adhesion force | Numerical simulation | Antisticking layer | Deformation | Demolding force | NANOIMPRINT LITHOGRAPHY | POLYMER SCIENCE | Molds | Deformation effects | Polymers | Adhesion
Journal Article
Journal of Applied Physics, ISSN 0021-8979, 01/2017, Volume 121, Issue 4, p. 044909
..., by measuring the overall demolding force that does not differentiate contributions of friction dissipation, stored elastic energy, and adhesion... 
MICROSTRUCTURES | RESIN | IMPRINT PROCESS | PHYSICS, APPLIED | ATOMIC-FORCE MICROSCOPY | SURFACE FREE-ENERGY | FRICTIONAL-PROPERTIES | DEMOLDING FORCE | CHAIN-LENGTH DEPENDENCE | ADHESIVE FORCE | FABRICATION | Usage | Chemical properties | Hydrophobicity | Photoelectron spectroscopy | Analysis | Silane | ARTICLES
Journal Article
Microelectronic Engineering, ISSN 0167-9317, 05/2008, Volume 85, Issue 5-6, pp. 907 - 909
The Jenoptik HEX03 embossing machine has been used in a slightly modified setup to measure the demolding forces online... 
Demolding force | Force history | Nanoimprint lithography | force history | demolding force | PHYSICS, APPLIED | nanoimprint lithography | NANOSCIENCE & NANOTECHNOLOGY | OPTICS | LITHOGRAPHY | ENGINEERING, ELECTRICAL & ELECTRONIC
Journal Article
Journal of photopolymer science and technology, ISSN 0914-9244, 2012, Volume 25, Issue 2, pp. 245 - 248
The demplding forces for thermal imprint to polystyrene film are studied. Two molds with 0.4 μm and 4 μm pitch LS patterns are fabricated... 
demolding force | adhesion | Si mold | friction | imprint | Demolding force | Friction | Adhesion | Imprint | POLYMER SCIENCE
Journal Article
Journal of photopolymer science and technology, ISSN 0914-9244, 2012, Volume 25, Issue 2, pp. 223 - 226
The demolding forces for various molds are studied for thermal imprint process. Molds are fabricated by anisotropic KOH etching of (110... 
demolding force | adhesion | Si mold | friction | imprint | Demolding force | Friction | Adhesion | Imprint | POLYMER SCIENCE
Journal Article
Journal of photopolymer science and technology, ISSN 0914-9244, 2012, Volume 25, Issue 6, pp. 747 - 750
The demolding forces for various molds are studied for thermal imprint process. Molds are fabricated by anisotropic KOH etching of (110... 
demolding force | adhesion | Si mold | friction | imprint
Journal Article
Microelectronic Engineering, ISSN 0167-9317, 02/2015, Volume 133, pp. 134 - 155
Journal Article
Physics Procedia, ISSN 1875-3892, 2013, Volume 48, pp. 109 - 112
Measurement method of compressive or tensile forces during glass imptrint was developed by improving a lens mold press machine... 
demolding force | optical device | phosphate glass | borate glass | Imprint | Optical device | Phosphate glass | Demolding force | Borate glass
Journal Article
Applied Surface Science, ISSN 0169-4332, 11/2011, Volume 258, Issue 3, pp. 1272 - 1278
.... ► Decreasing the cross-linking agent content lowers the Young's modulus of the resist. ► A lower Young's modulus results in a lower surface adhesion force... 
Adhesion force | Young's modulus | UV nanoimprint lithography | Demolding force | Surface energy | PHYSICS, CONDENSED MATTER | PHYSICS, APPLIED | CHEMISTRY, PHYSICAL | RELEASE | IMPRINT | FILMS | FABRICATION | MOLD | MATERIALS SCIENCE, COATINGS & FILMS | Oligomers | Mechanical engineering | Elastic modulus | Nanocomposites | Resists | Crosslinking | Modulus of elasticity | Nanostructure | Adhesion
Journal Article
Polymers, ISSN 2073-4360, 2019, Volume 11, Issue 10, p. 1573
In micro-injection molding, the interaction between the polymer and the mold insert has an important effect on demolding quality of nanostructure. An all-atom... 
POLYMER SCIENCE | interfacial adhesion energy | demolding | nanostructure | SURFACE-TENSION | micro-injection molding | WEIGHT DISPERSITY | TEMPERATURE | NANOPILLARS | POLYMER | COATINGS | FABRICATION | FORCES
Journal Article
Polymers, ISSN 2073-4360, 2019, Volume 11, Issue 3, p. 470
Polymer parts with nanostructures have broad applications, possessing excellent optical, electrochemical, biological, and other functions. Injection molding... 
Polymer | Demolding process | Nanostructure | Micro-injection molding | Molecular dynamics simulation | polymer | ENERGY | POLYMER SCIENCE | EJECTION | molecular dynamics simulation | nanostructure | SIMULATION | micro-injection molding | ADHESION | demolding process | FORCES | FABRICATION | ISOTACTIC POLYPROPYLENE
Journal Article
Journal of photopolymer science and technology, ISSN 0914-9244, 2017, Volume 30, Issue 5, pp. 545 - 550
Template release process during nanoimprint lithography was investigated, and the detailed steps of this process were described in order to reduce defects... 
Finite element method | Demolding | Deformation | Hot embossing | Contact properties | POLYMER SCIENCE | FORCE | THERMAL IMPRINT LITHOGRAPHY | ASPECT-RATIO | SIMULATION | STRESS | MOLD
Journal Article
Journal of manufacturing processes, ISSN 1526-6125, 2017, Volume 29, pp. 160 - 174
....•ANOVA investigates the cutting parameters/strategies effects on molds texture.•Micromilling footprint affect the ejection forces on molded parts... 
Demolding | Surface texture | Micromilling footprint | Micro injection molding | STRUCTURED SURFACES | FORCES | ENGINEERING, MANUFACTURING | ROUGHNESS | Injection molding | Milling (Metalwork) | Analysis | Methods
Journal Article
by Li, MJ and Chen, YL and Luo, WX and Cheng, X
Journal of micromechanics and microengineering, ISSN 0960-1317, 06/2020, Volume 30, Issue 6, p. 65010
.... The applied UV intensity also influences the mechanical behaviors of the cured resist and the demolding force separating between the mold and the cured resist... 
demolding force | UV-curing | PHYSICS, APPLIED | MODULUS | nanoimprint | ELECTRON-BEAM LITHOGRAPHY | resist | NANOSCIENCE & NANOTECHNOLOGY | nanoindentation | STEP | NANOFABRICATION | DEPENDENCE | ENGINEERING, ELECTRICAL & ELECTRONIC | IMPRINT | ADHESION | defect rate | INSTRUMENTS & INSTRUMENTATION | FORCE | SHRINKAGE | FABRICATION
Journal Article
Journal of photopolymer science and technology, ISSN 0914-9244, 2014, Volume 27, Issue 1, pp. 111 - 115
Quantitative evaluation of template release energy is reported for UV nanoimprint resists containing various kinds of fluorinated segregation agents. The... 
defect | template release | adhesion | segregation | surface energy | Nanoimprint | Defect | Segregation | Adhesion | Surface energy | Template release | IMPRINT LITHOGRAPHY | POLYMER SCIENCE | DEMOLDING FORCES | TECHNOLOGY
Journal Article
Journal of photopolymer science and technology, ISSN 0914-9244, 2013, Volume 26, Issue 1, pp. 87 - 96
.... PFP reduces the viscosity and demolding force of UV curable resins. These properties are helpful in increasing the throughput and reliability of UV nanoimprint... 
lithography, condensable gas | demolding force | UV nanoimprint | throughput | solubility parameter | pentafluoropropane | Pentafluoropropane | Condensable gas | Demolding force | Lithography | Solubility parameter | Throughput
Journal Article
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