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dmd (192) 192
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Optics Express, ISSN 1094-4087, 07/2018, Volume 26, Issue 14, pp. 18597 - 18607
Illumination uniformity in photolithography systems determines the dimensional difference across the entire lithographic substrate. However, traditional... 
ELEMENTS | DMD | FABRICATION | OPTICS | MASKLESS LITHOGRAPHY
Journal Article
Optics Communications, ISSN 0030-4018, 07/2019, Volume 443, pp. 211 - 215
We report a novel beam homogenizer for digital micromirror device lithography system. Such a beam homogenizer contains only one random freeform microlens array... 
DMD lithography system | Microlens array | Homogenizer | Freeform surface | OPTICS | LASER
Journal Article
IEEE Transactions on Electron Devices, ISSN 0018-9383, 12/2014, Volume 61, Issue 12, pp. 4210 - 4215
Journal Article
Optik, ISSN 0030-4026, 05/2019, Volume 185, pp. 1036 - 1044
During the process of scanning maskless lithography, exposure speed determines the efficiency and productivity of lithography fabrication. In this paper, a... 
Maskless lithography | Scanning | Digital micromirror device(DMD) | Exposure speed | ENHANCEMENT | RESOLUTION | FABRICATION | OPTICS
Journal Article
Optics and Lasers in Engineering, ISSN 0143-8166, 02/2018, Volume 101, pp. 106 - 112
This study used a digital micromirror device (DMD) to produce point-array patterns and employed a self-developed optical system to define line-and-space... 
Digital micromirror device (DMD) | Multiobjective particle swarm optimization (MOPSO) | Point-array scanning | Nonplanar lithography | OPTICS | Integrated circuit fabrication | Algorithms | Mathematical optimization | Analysis | Methods
Journal Article
Measurement Science and Technology, ISSN 0957-0233, 2012, Volume 23, Issue 10, pp. 105204 - 1-10
Spectral filtration systems based around digital micromirror devices (DMD) have made possible the creation of illumination light with custom spectral profiles... 
Digital micromirror device | Supercontinuum | DMD | INSTRUMENTS & INSTRUMENTATION | ENGINEERING, MULTIDISCIPLINARY | supercontinuum | MICROSCOPY | digital micromirror device | Liquids | Diffraction | Endoscopes | Microscopy | Digital | Spectra | Deviation | Devices
Journal Article
Sensors (Switzerland), ISSN 1424-8220, 03/2016, Volume 16, Issue 3, pp. 331 - 331
High-speed photography is an important tool for studying rapid physical phenomena. However, low-frame-rate CCD (charge coupled device) or CMOS (complementary... 
DMD camera | Quicksort | Per-pixel coded exposure | High-speed imaging | ELECTROCHEMISTRY | CHEMISTRY, ANALYTICAL | INSTRUMENTS & INSTRUMENTATION | FRAMES | 2ND | per-pixel coded exposure | SENSOR | high-speed imaging | quicksort | Charge coupled devices | Digital imaging | Imaging | High speed | Cameras | Temporal resolution | Sensors | Devices
Journal Article
Optics and Lasers in Engineering, ISSN 0143-8166, 04/2016, Volume 79, pp. 55 - 60
Digital-mask lithography systems, with a digital micromirror device (DMD) as their central piece, have been widely used for defining patterns on printed... 
Digital micromirror device (DMD) | Maskless lithography | Field tracing | Pulse width modulation (PWM) | Point-array scanning | FABRICATION | OPTICS | LITHOGRAPHY | Integrated circuit fabrication | Lasers | Lithography | Modules | Projection | Circuit boards | Digital | Exposure | Pulse duration modulation
Journal Article
Optics and Laser Technology, ISSN 0030-3992, 05/2019, Volume 113, pp. 407 - 415
A new type of maskless lithography system based on digital mirror device (DMD) is proposed, constructed, and experimentally demonstrated. It includes a... 
3D microfabrication | Maskless lithography | Microlens array | Digital mirror device (DMD) | SYSTEM | DESIGN | PHYSICS, APPLIED | RESOLUTION | FABRICATION | OPTICS | INTERFERENCE LITHOGRAPHY | Integrated circuit fabrication | Mechanical engineering | Photoresists | Spatial filtering | Arrays | Lithography | Microscopes | Surface structure
Journal Article
Optical Engineering, ISSN 0091-3286, 08/2007, Volume 46, Issue 8, pp. 085401 - 085405
Journal Article
Proceedings of SPIE, ISSN 0277-786X, 02/2012, Volume 8254, Issue 1, pp. 825407 - 8254011
Digital Micromirror Device based microscopy combines fast confocal 4D-microscopy along with conventional methods for light microscopy and new technological... 
Spectroscopy | Volume visualization | Confocal microscopy | DMD | Pattern-generator | 4D-microscopy | Fluorescence microscopy | Biomedical materials | Microscopy | In vivo testing | In vivo tests | Tools | Digital | Confocal | Devices
Conference Proceeding
Extreme Mechanics Letters, ISSN 2352-4316, 01/2018, Volume 18, pp. 79 - 85
Fatigue behavior of nanomaterials could be critical for numerous nanomechanical applications involving dynamic deformation processes, such as in flexible... 
Nanowire | Digital micromirror device (DMD) | Microelectromechanical systems (MEMS) | Tensile testing | High cycle fatigue testing | Nanomechanics | FRACTURE | WIRES | MECHANICS | MATERIALS SCIENCE, MULTIDISCIPLINARY | NANOWIRES | IN-SITU
Journal Article
Journal of Applied Optics, ISSN 1002-2082, 01/2017, Volume 38, Issue 1, pp. 31 - 36
Journal Article
Proceedings of SPIE - The International Society for Optical Engineering, ISSN 0277-786X, 7/2018, Volume 10706, pp. 107065T - 107065T-8
Digital Micromirror Devices (DMDs), a type of Micro-Opto-ElectroMechanical System (MOEMS) device, are commonly used in Digital Light Processing (DLP)... 
Digital micromirror device | Multi-object spectroscopy | DMD | Scattered light
Conference Proceeding
IEEE Photonics Technology Letters, ISSN 1041-1135, 12/2012, Volume 24, Issue 23, pp. 2175 - 2178
To the best of our knowledge, for the first time, an all-digital broadband variable fiber optic attenuator (VFOA) is demonstrated using the Texas Instruments'... 
Optical fibers | digital micromirror device (DMD) | Diffraction | microelectromechanical devices | variable optical attenuator | Optical attenuators | optical fiber devices | Attenuation | Broadband communication | Micromirrors | PHYSICS, APPLIED | OPTICS | ENGINEERING, ELECTRICAL & ELECTRONIC
Journal Article
Proceedings of SPIE - The International Society for Optical Engineering, ISSN 0277-786X, 7/2018, Volume 10706, pp. 107063T - 107063T-8
Digital micromirror devices (DMDs) have the potential to revolutionize near infrared spectroscopy of crowded fields in astronomy. These devices, however, are... 
Digital micromirror device | Infrared spectroscopy | DMD
Conference Proceeding
Proceedings of SPIE - The International Society for Optical Engineering, ISSN 0277-786X, 7/2018, Volume 10706, pp. 107062F - 107062F-9
Digital micromirror devices (DMDs) can be used as rapidly reconfigurable "slit mask" object-selectors in space- based UV multi-object spectrometers (MOS).... 
Digital micromirror device | Mos | DMD | Multi-object spectrometer | Vibration testing | Shock testing
Conference Proceeding
Micromachines, ISSN 2072-666X, 03/2016, Volume 7, Issue 3, p. 49
Journal Article
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