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Journal Article
Nature Nanotechnology, ISSN 1748-3387, 2014, Volume 9, Issue 4, pp. 306 - 310
Journal Article
Applied Surface Science, ISSN 0169-4332, 2000, Volume 164, Issue 1, pp. 111 - 117
Journal Article
Nano Letters, ISSN 1530-6984, 08/2018, Volume 18, Issue 8, pp. 5036 - 5041
Three-dimensional (3D) nanofabrication techniques are of paramount importance in nanoscience and nanotechnology because they are prerequisites to realizing... 
ice lithography | Nanofabrication | electron beam lithography | ice resists | three-dimensional nanostructures | PHYSICS, CONDENSED MATTER | PHYSICS, APPLIED | MATERIALS SCIENCE, MULTIDISCIPLINARY | RESOLUTION | CHEMISTRY, PHYSICAL | NANOSCIENCE & NANOTECHNOLOGY | CHEMISTRY, MULTIDISCIPLINARY | RESISTS
Journal Article
Microelectronic Engineering, ISSN 0167-9317, 06/2017, Volume 177, pp. 30 - 34
This paper considers the possibilities of combined exposure of e-beam systems working with a significant difference of primary electron energies (Gaussian beam... 
Mix and match process | Micro-optical elements | Resist sensitivity | Absorbed energy density | Grayscale e-beam lithography | PHYSICS, APPLIED | ELECTRON-BEAM | NANOSCIENCE & NANOTECHNOLOGY | HYBRID LITHOGRAPHY | OPTICS | ENGINEERING, ELECTRICAL & ELECTRONIC | Integrated circuit fabrication | Usage | Analysis
Journal Article
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, ISSN 2166-2746, 09/2019, Volume 37, Issue 5
Electron beam lithography (EBL) requires conducting substrates to ensure pattern fidelity. However, there is an increasing interest in performing EBL on less... 
ELECTRON | PHYSICS, APPLIED | POLYMETHYLMETHACRYLATE | NANOSCIENCE & NANOTECHNOLOGY | RESOLUTION LIMITS | RADIATION-DAMAGE | ENGINEERING, ELECTRICAL & ELECTRONIC
Journal Article
Microelectronic Engineering, ISSN 0167-9317, 06/2017, Volume 177, p. 30
This paper considers the possibilities of combined exposure of e-beam systems working with a significant difference of primary electron energies (Gaussian beam... 
Temperature | Electron beams | Lithography | Gaussian beams (optics) | Proximity effect (electricity) | Time | Optical components | Exposure | Substrates | Electrons
Journal Article
ACS Nano, ISSN 1936-0851, 04/2014, Volume 8, Issue 4, pp. 3483 - 3489
Journal Article
Applied Physics Letters, ISSN 0003-6951, 08/2017, Volume 111, Issue 6
We present a technique to fabricate ultrathin (down to 20 nm) uniform electron transparent windows at dedicated locations in a SiN membrane for in situ... 
Electromigration | Thin films | Transmission electron microscopy | Metal films | Chips (electronics) | Electron beam lithography | Graphene | Porosity
Journal Article
Nanotechnology, ISSN 0957-4484, 04/2009, Volume 20, Issue 13, p. 135502
We report on the hydrogen gas (H-2) sensing performance of lithographically patterned Pd nanowires as a function of the nanowire thickness and H-2... 
THIN-FILMS | RESISTANCE | PALLADIUM | NANOSCIENCE & NANOTECHNOLOGY | PHYSICS, APPLIED | MATERIALS SCIENCE, MULTIDISCIPLINARY | Gases | Nanowires - chemistry | Sensitivity and Specificity | Linear Models | Microtechnology - methods | Electric Impedance | Hydrogen - analysis | Palladium - chemistry | Electrons
Journal Article
Nanotechnology, ISSN 0957-4484, 05/2012, Volume 23, Issue 18, pp. 185302 - 1-6
We demonstrate that a low energy focused electron beam can locally pattern graphene coated with a thin ice layer. The irradiated ice plays a crucial role in... 
NANOSCIENCE & NANOTECHNOLOGY | PHYSICS, APPLIED | FILMS | H2O | MATERIALS SCIENCE, MULTIDISCIPLINARY | STIMULATED DESORPTION | Leaves | Scanning electron microscopy | Defect annealing | Electron beam lithography | Graphene | Lithography | Nanostructure | Position (location)
Journal Article
Scientific Reports, ISSN 2045-2322, 12/2018, Volume 8, Issue 1, pp. 9640 - 8
We present a comparative study of plasmonic antennas fabricated by electron beam lithography and direct focused ion beam milling. We have investigated optical... 
ENERGY-LOSS SPECTROSCOPY | GOLD NANOSTRUCTURES | SCALE | DIELECTRICS | MULTIDISCIPLINARY SCIENCES | Atomic force microscopy | Transmission electron microscopy | Microscopy | Spectrum analysis | Silicon nitride | X-ray spectroscopy | Contamination | Ion beams | Electrons
Journal Article
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