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materials science, multidisciplinary (12) 12
chemical-vapor-deposition (8) 8
chemisches aufdampfen (5) 5
diamond films (5) 5
growth (5) 5
physics, applied (5) 5
physics, condensed matter (5) 5
chemical vapor deposition (4) 4
heissfaden-cvd (4) 4
hot-filament (4) 4
hydrogen (4) 4
materials science, coatings & films (4) 4
mechanism (4) 4
physics, atomic, molecular & chemical (4) 4
ring-down spectroscopy (4) 4
thin films (4) 4
chemistry, physical (3) 3
density (3) 3
diamantfilm (3) 3
dielectric films (3) 3
filament (3) 3
filaments (3) 3
films (3) 3
hot-filament cvd (3) 3
kinetics (3) 3
nitrogen (3) 3
plasma (3) 3
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single-crystal diamond (3) 3
temperature (3) 3
thin-films (3) 3
absolute ch3 concentration (2) 2
amorphous-silicon (2) 2
atomic-hydrogen (2) 2
beam mass-spectrometry (2) 2
boron doping (2) 2
c-2 (2) 2
carbon (2) 2
catalysis (2) 2
catalysts (2) 2
cvd (2) 2
density distributions (2) 2
deposition (2) 2
diamantschicht (2) 2
diamond (2) 2
diamond film (2) 2
diamonds (2) 2
dissociation (2) 2
elektronenmikroskopie (2) 2
filament activated ch4/h-2 (2) 2
fluorescence (2) 2
gas mixtures (2) 2
gasgemisch (2) 2
gasphase (2) 2
h-atoms (2) 2
hfcvd (2) 2
hot filament (2) 2
hot filament cvd (2) 2
kohlenstoff (2) 2
methane (2) 2
nanocrystalline diamond (2) 2
nanotubes (2) 2
number density (2) 2
plasma cvd (2) 2
pressure (2) 2
quality (2) 2
raman spectroscopy (2) 2
reactor (2) 2
siliciumsubstrat (2) 2
spectrum (2) 2
tantal (2) 2
tungsten carbide (2) 2
ultrananocrystalline diamond (2) 2
1,1,3,3-tetramethyl-1,3-disilacyclobutane (1) 1
2d modelling (1) 1
absorption-spectroscopy (1) 1
acetylene (1) 1
actinometry (1) 1
activated (1) 1
activated ch4/h-2 (1) 1
adhesion (1) 1
adsorption (1) 1
allotropy (1) 1
analysis (1) 1
ar/ch4/h-2 gas-mixtures (1) 1
arrays (1) 1
assisted diamond growth (1) 1
atom (1) 1
atomic force microscopy (1) 1
atomic-scale simulations (1) 1
atomkraftmikroskopie (1) 1
band structure (1) 1
band structure of solids (1) 1
bandstruktur (1) 1
behavior (1) 1
benetzbarkeit (1) 1
bias-enhanced nucleation (1) 1
bor (1) 1
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boron-doped diamond (1) 1
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JOURNAL OF CHEMICAL PHYSICS, ISSN 0021-9606, 07/2009, Volume 131, Issue 4
Journal Article
Journal of Physics: Condensed Matter, ISSN 0953-8984, 09/2009, Volume 21, Issue 36, pp. 364201 - 364201 (20)
In this paper we review and provide an overview to the understanding of the chemical vapor deposition (CVD) of diamond materials with a particular focus on the... 
PHYSICS, CONDENSED MATTER | MODERATE PRESSURE H-2 | CVD-DIAMOND | RING-DOWN SPECTROSCOPY | C2H2/H-2 GAS-MIXTURES | FILAMENT ACTIVATED CH4/H-2 | ATOMIC-SCALE SIMULATIONS | MONTE-CARLO METHOD | HOT-FILAMENT | SINGLE-CRYSTAL DIAMOND | MICROWAVE-PLASMA
Journal Article
ACS Applied Materials & Interfaces, ISSN 1944-8244, 09/2009, Volume 1, Issue 9, pp. 1919 - 1926
The alloying of tungsten filament when using 1,1,3,3-tetramethyl-1,3-disilacyclobutane (TMDSCB) in a hot-wire chemical vapor deposition reactor was... 
1,1,3,3-tetramethyl-1,3-disilacyclobutane | catalytic CVD | filament aging | hot-wire CVD | tungsten carbide | carburization | QUALITY | CARBON | AMORPHOUS-SILICON | DIAMOND GROWTH | MECHANISM | MATERIALS SCIENCE, MULTIDISCIPLINARY | NANOSCIENCE & NANOTECHNOLOGY | METHANE | GAS-MIXTURES | ACTIVATED CH4/H-2 | DISSOCIATIVE CHEMISORPTION | FILM GROWTH
Journal Article
JOURNAL OF APPLIED PHYSICS, ISSN 0021-8979, 02/2009, Volume 105, Issue 4
Spatially resolved optical emission spectroscopy (OES) has been used to investigate the gas phase chemistry and composition in a microwave activated CH4/Ar/H-2... 
ATOMIC-HYDROGEN | plasma chemistry | PHYSICS, APPLIED | ground states | LASER | H-2 | ACTINOMETRY | DISCHARGE | DENSITY | diamond | ultraviolet spectra | REACTOR | FLUORESCENCE | plasma CVD | KINETICS | plasma diagnostics | radiometry | FILAMENT
Journal Article
JOURNAL OF PHYSICAL CHEMISTRY A, ISSN 1089-5639, 03/2006, Volume 110, Issue 8, pp. 2821 - 2828
First illustrations of the utility of pulsed quantum cascade lasers for in situ probing of the chemistry prevailing in microwave plasma activated... 
REACTOR | RING-DOWN SPECTROSCOPY | DENSITY DISTRIBUTIONS | TEMPERATURES | FILAMENT | PHYSICS, ATOMIC, MOLECULAR & CHEMICAL | CHEMISTRY, PHYSICAL | C-2 | ATOM
Journal Article
JOURNAL OF PHYSICAL CHEMISTRY A, ISSN 1089-5639, 09/2010, Volume 114, Issue 37, pp. 10076 - 10089
A comprehensive study of microwave (MW) activated B2H6/CH4/Ar/H-2 plasmas used for the chemical vapor deposition of B-doped diamond is reported. Absolute... 
THIN-FILMS | BORON | TEMPERATURE | REACTION-MECHANISM | KINETICS | GROWTH | PHYSICS, ATOMIC, MOLECULAR & CHEMICAL | CHEMISTRY, PHYSICAL | SPECTRUM | HOT-FILAMENT | SINGLE-CRYSTAL DIAMOND | DIBORANE
Journal Article
Chemical Physics Letters, ISSN 0009-2614, 2004, Volume 383, Issue 5, pp. 518 - 522
Absorption spectroscopy measurements are reported of the absolute number density (3.0±0.9×10 cm ) and vibrational temperature (3000±500 K) of C (X Σ ) radicals... 
PHASE | TEMPERATURE-DEPENDENCE | DENSITY DISTRIBUTIONS | KINETICS | CH RADICALS | DICARBON | PHYSICS, ATOMIC, MOLECULAR & CHEMICAL | HOT-FILAMENT REACTOR | CH4/H-2 GAS-MIXTURES | C-2 | OPTICAL-EMISSION
Journal Article
Electrochimica Acta, ISSN 0013-4686, 1998, Volume 44, Issue 2, pp. 525 - 532
Titanium substrates were coated by 2-5 μm thick boron doped diamond layers through the HFCVD-process from an activated H /CH gas phase. The doping level was... 
Hot Filament CVD | Gas evolution | Boron doping | Diamond/titanium electrode | Electrochemical window | ELECTROCHEMISTRY | boron doping | electrochemical window | HYDROGEN | THIN-FILM ELECTRODES | CHEMICAL VAPOR-DEPOSITION | PLASMA | gas evolution | GROWTH | diamond/titanium electrode | DIAMOND ELECTRODES | SURFACE | hot filament CVD | POLYCRYSTALLINE DIAMOND
Journal Article
Diamond & Related Materials, ISSN 0925-9635, 04/2016, Volume 64, pp. 89 - 96
The surface termination of as-grown microcrystalline (MCD) and nanocrystalline (NCD) boron-doped diamond films was assessed by X-ray photoelectron spectroscopy... 
Surface termination | Wettability | Diamond film | HFCVD | Boron doping | THIN-FILMS | OXIDATION | HIGH-TEMPERATURE VAPORIZATION | ULTRAVIOLET RAMAN-SPECTROSCOPY | CHEMICAL-VAPOR-DEPOSITION | BEHAVIOR | MATERIALS SCIENCE, MULTIDISCIPLINARY | ELECTRODES | NANOCRYSTALLINE DIAMOND | SILICON-NITRIDE | HOT-FILAMENT CVD
Journal Article
DIAMOND AND RELATED MATERIALS, ISSN 0925-9635, 03/2002, Volume 11, Issue 3-6, pp. 567 - 572
We report a combination of experimental and theoretical studies of hot filament (HF) surface effects and the gas-phase chemistry prevailing in HF activated... 
CHEMICAL-VAPOR-DEPOSITION | HFCVD | MECHANISM | MATERIALS SCIENCE, MULTIDISCIPLINARY | H/C/N chemistry | modelling | hot-filament CVD | HYDROGEN | METHANE | DIAMOND FILMS | TEMPERATURE | GROWTH | REMPI measurements | NITROGEN
Journal Article
Diamond & Related Materials, ISSN 0925-9635, 2006, Volume 15, Issue 4, pp. 526 - 530
A series of experiments have been performed to deposit continuous layers of CVD diamond onto epitaxial GaN films. Such diamond coatings would be useful to... 
Hot filament | Diamond growth and characterisation | CVD diamond | GaN | CHEMICAL-VAPOR-DEPOSITION | MATERIALS SCIENCE, MULTIDISCIPLINARY | RAMAN-SPECTROSCOPY | DECOMPOSITION | hot filament | PLASMAS | DEPENDENCE | FILMS | GROWTH | NITROGEN | BEAM MASS-SPECTROMETRY | HEXAGONAL GAN | diamond growth and characterisation
Journal Article
by Yang, Q and Xiao, C and Chen, W and Hirose, A
Diamond & Related Materials, ISSN 0925-9635, 2004, Volume 13, Issue 3, pp. 433 - 437
Diamond and carbon nanostructures have been synthesized selectively on differently pretreated silicon substrates by hot filament chemical vapor deposition in a... 
Selective growth | Diamond film | Nanocones | Nanotubes | Hot filament CVD | nanocones | MECHANISM | CONES | MATERIALS SCIENCE, MULTIDISCIPLINARY | LARGE-SCALE SYNTHESIS | ARRAYS | nanotubes | FILMS | FIELD-EMISSION | hot filament CVD | NUCLEATION | diamond films | selective growth
Journal Article
Diamond & Related Materials, ISSN 0925-9635, 2004, Volume 13, Issue 4, pp. 561 - 568
Modelling studies of the plasma chemistry prevailing in CH4/H-2/Ar mixtures in a DC arc jet reactor used for diamond chemical vapour deposition are reported,... 
Cavity ring down spectroscopy | DC arc jet | 2D modelling | H/C chemistry | SYSTEM | RING-DOWN SPECTROSCOPY | ACETYLENE | MATERIALS SCIENCE, MULTIDISCIPLINARY | LASER-INDUCED FLUORESCENCE | SIMULATION | PLASMA | CHEMISTRY | GAS | cavity ring down spectroscopy | HOT-FILAMENT
Journal Article
Diamond & Related Materials, ISSN 0925-9635, 2000, Volume 9, Issue 8, pp. 1421 - 1429
Journal Article
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