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physics (146182) 146182
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methods of deposition of films and coatings; film growth and epitaxy (53748) 53748
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structure of solids and liquids; crystallography (6127) 6127
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sputtering (6021) 6021
low-dimensional structures: structure, and nonelectronic properties (6016) 6016
röntgenbeugung (5995) 5995
halbleiterwachstum (5920) 5920
molecular, atomic, ion, and chemical beam epitaxy (5890) 5890
semiconductor electronics. microelectronics. optoelectronics. solid state devices (5662) 5662
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