X
Search Filters
Format Format
Subjects Subjects
Subjects Subjects
X
Sort by Item Count (A-Z)
Filter by Count
focusing (23) 23
focusing and leveling (5) 5
lithography (5) 5
engineering (4) 4
mathematical models (4) 4
measurement (4) 4
analysis (3) 3
behavior (3) 3
isoelectric focusing (3) 3
leveling (3) 3
methods (3) 3
stability (3) 3
alignment (2) 2
boundaries (2) 2
business (2) 2
characterization and evaluation of materials (2) 2
control (2) 2
deformation (2) 2
design (2) 2
design engineering (2) 2
geosciences, multidisciplinary (2) 2
ice (2) 2
image processing (2) 2
lenses (2) 2
management journals (2) 2
material science (2) 2
materials and manufacturing (2) 2
mathematical analysis (2) 2
meteorology & atmospheric sciences (2) 2
monochromators (2) 2
oceans (2) 2
operational management and marketing (2) 2
photolithography (2) 2
polar environments (2) 2
searching (2) 2
signal processing (2) 2
simulation (2) 2
technical journals (2) 2
uncertainty (2) 2
usage (2) 2
wafers (2) 2
1st principles (1) 1
2015 chile tsunami (1) 1
3-dimensional structure (1) 1
[ spi ] engineering sciences [physics] (1) 1
ab-initio (1) 1
ab-initio-berechnung (1) 1
absorption spectra (1) 1
accuracy (1) 1
active chassis systems (1) 1
adaptation (1) 1
adrenocorticotropic hormone (1) 1
aerospace engineering (1) 1
aggression (1) 1
aggressiveness (1) 1
aging (1) 1
air (1) 1
air pollution (1) 1
aircraft components (1) 1
aktive federung (1) 1
aktives fahrwerk (1) 1
algorithms (1) 1
aligner (1) 1
alpha-crystallin (1) 1
alpha-crystallins - metabolism (1) 1
alternation (1) 1
amplitudes (1) 1
animals (1) 1
antarctic ice (1) 1
antarctic ice shelves (1) 1
antenna arrays (1) 1
antennas (1) 1
antisocial personality disorder (1) 1
anwendung im fahrzeugbau (1) 1
aquatic ecosystems (1) 1
architecture (1) 1
argo (1) 1
arrays (1) 1
assembly (1) 1
astronomy & astrophysics (1) 1
atmospheric boundary layer (1) 1
atmospheric boundary-layer (1) 1
atmospheric protection/air quality control/air pollution (1) 1
attenuation (1) 1
au-microscopii (1) 1
automation (1) 1
automobile drivers (1) 1
automobile driving (1) 1
automobiles (1) 1
automotive components (1) 1
automotive engineering (1) 1
avatars (1) 1
axiomatic design (1) 1
balanced scorecard (1) 1
balancing (1) 1
bathymetry (1) 1
bathymetry focusing (1) 1
beam lithography (1) 1
beam-column joints (1) 1
beam-columns (1) 1
more...
Language Language
Publication Date Publication Date
Click on a bar to filter by decade
Slide to change publication date range


Proceedings of SPIE - The International Society for Optical Engineering, ISSN 0277-786X, 2007, Volume 6724
Conference Proceeding
Proceedings of SPIE - The International Society for Optical Engineering, ISSN 0277-786X, 2010, Volume 7657
... precision machinery, precision measurement, automation and materials science in one complex system... 
Servo | Dual stage | Focusing and leveling | Topography | Alignment | Leveling | Movement | Chips | Focusing | Wafers | Nanomaterials | Nanostructure | Position (location)
Conference Proceeding
Guangxue Xuebao/Acta Optica Sinica, ISSN 0253-2239, 08/2016, Volume 36, Issue 8
Journal Article
Guangxue Xuebao/Acta Optica Sinica, ISSN 0253-2239, 01/2017, Volume 37, Issue 1
Journal Article
Proceedings of SPIE - The International Society for Optical Engineering, ISSN 0277-786X, 2007, Volume 6724
Conference Proceeding
Proceedings of SPIE - The International Society for Optical Engineering, ISSN 0277-786X, 2009, Volume 7160
Conference Proceeding
Guangxue Xuebao/Acta Optica Sinica, ISSN 0253-2239, 04/2010, Volume 30, Issue 4, pp. 1041 - 1045
Journal Article
Guangxue Xuebao/Acta Optica Sinica, ISSN 0253-2239, 11/2007, Volume 27, Issue 11, pp. 1987 - 1991
Journal Article
Weixi Jiagong Jishu/Microfabrication Technology, ISSN 1003-8213, 06/2006, Issue 3, pp. 44 - 48
Journal Article
Optics and Lasers in Engineering, ISSN 0143-8166, 03/2015, Volume 66, pp. 128 - 131
.... •A technique for the wafer focusing measurement in optical lithography system is introduced.•The measurement principle based on Hartmann–Shack wavefront is explained detailed.•An experiment is processed to prove the feasibility and the focus measurement precision is indicated. 
Lithography | Focusing | Microlens array | BEAM LITHOGRAPHY | FABRICATION | OPTICS | Measurement | Integrated circuit fabrication | Sensors | Charge coupled devices | Wafers | Computing time | Shot | Wave fronts | Sensor arrays
Journal Article
2004 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (IEEE Cat. No.04CH37530), 2004, pp. 75 - 78
Modern High NA exposure systems trade off process depth of focus for gains in image resolution... 
Degradation | Semiconductor device measurement | Image resolution | Process control | Focusing | Metrology | Product design | Surface topography | Chip scale packaging | Lenses
Conference Proceeding
Japanese journal of applied physics. Pt. 1, Regular papers & short notes, ISSN 0021-4922, 12/1993, Volume 32, Issue 12 B, pp. 5867 - 5873
This paper presents a shot-by-shot leveling applied to an i-line stepper system. This shot leveler utilizes laser interferometry with a laser beam that has S-polarization and a large incident angle to the exposure surface of the LSI wafer... 
Leveling | Aligner | Lithography | Focusing | Fast-Fourier-transformation (FFT) | Interferometry | PHYSICS, APPLIED | LEVELING | FAST-FOURIER-TRANSFORMATION (FFT) | INTERFEROMETRY | ALIGNER | FOCUSING | LITHOGRAPHY
Journal Article
International Journal of Productivity and Quality Management, ISSN 1746-6474, 2013, Volume 12, Issue 3, pp. 313 - 326
Globalisation with development of information technology (IT), information systems... 
BSC | Business strategy | Strategic alignment model | Balanced scorecard | Strategic management | Alignment | Balancing | Focusing | Strategy | Information technology | Business | Levelling
Journal Article
International journal of production research, ISSN 1366-588X, 2012, Volume 50, Issue 7, pp. 1850 - 1861
Journal Article
Science in China Series D: Earth Sciences, ISSN 1006-9313, 2/2003, Volume 46, Issue S2, pp. 168 - 180
.... Focusing on the inconsistency, we reexamine the late Cenozoic deformation pattern in the Ordos region based on seismicity data and geodesy data (GPS and leveling) around... 
Geosciences | block-like motion | Ordos block | Geosciences, general | alternation | GPS | seismicity | Alternation | Seismicity | Block-like motion | GEOSCIENCES, MULTIDISCIPLINARY | CHINA | CRUSTAL DEFORMATION | Geology | Plate tectonics | Faults | Deformation | Focusing | Slip | Blocking | Satellite navigation systems | Boundaries | Geographic information systems | Global Positioning System
Journal Article
Nature (London), ISSN 0028-0836, 2010, Volume 465, Issue 7296, pp. 334 - 337
A large (∼1023 J) multi-decadal globally averaged warming signal in the upper 300 m of the world’s oceans was reported roughly a decade ago and is attributed... 
SEA-LEVEL RISE | HEAT-CONTENT | VARIABILITY | PROFILES | QUALITY | TEMPERATURE | MULTIDISCIPLINARY SCIENCES | ARGO | XBT | REEVALUATION | Global warming | Ocean temperature | Research | Confidence intervals | Trends | Estimates | Methods | Earth | Uncertainty | Oceans | Enthalpy | Focusing | Bias | Air pollution | Mathematical models
Journal Article
Vehicle System Dynamics: State of the Art Papers of the 22nd IAVSD Symposium, ISSN 0042-3114, 07/2011, Volume 49, Issue 7, pp. 1005 - 1020
.... While most discussions are focusing on the hybrid or completely electric propulsion technologies, this contribution will focus on the aspects of system dynamics related to electrified vehicles... 
active chassis systems | electrified vehicles | semi-active | energy consumption | passive | recuperation | DESIGN | ENGINEERING, MECHANICAL | Electric propulsion | Control | System dynamics | Focusing | Combustion | Automobiles | Automotive components | Automotive engineering
Journal Article
No results were found for your search.

Cannot display more than 1000 results, please narrow the terms of your search.