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Journal of micromechanics and microengineering, ISSN 1361-6439, 2007, Volume 17, Issue 6, pp. R81 - R95
...Home Search Collections Journals About Contact us My IOPscience SU-8: a photoresist for high-aspect-ratio and 3D submicron lithography This article... 
SU8 PHOTORESIST | LARGE-AREA | PHYSICS, APPLIED | UV-LITHOGRAPHY | NANOSCIENCE & NANOTECHNOLOGY | HOLOGRAPHIC LITHOGRAPHY | X-RAY-LITHOGRAPHY | OPTICAL LITHOGRAPHY | PHOTONIC CRYSTALS | 3-DIMENSIONAL MICROSTRUCTURES | ENGINEERING, ELECTRICAL & ELECTRONIC | INSTRUMENTS & INSTRUMENTATION | THICK PHOTORESIST | DIAMOND-LIKE
Journal Article
Applied Optics, ISSN 1559-128X, 01/2007, Volume 46, Issue 3, pp. 295 - 301
We demonstrate a three-dimensional direct-write lithography system capable of writing deeply buried, localized index structures into diffusion-mediated photopolymer... 
HOLOGRAPHIC DATA-STORAGE | POLYMERS | LASER | INTEGRATED-OPTICS | MEDIA | WAVE-GUIDING DEVICES | POLYMERIZATION | OPTICS | MICROFABRICATION | GUIDES | Waveguides | Research | Lithography | Photopolymers
Journal Article
Advanced Materials, ISSN 0935-9648, 06/2006, Volume 18, Issue 12, pp. 1557 - 1560
.... Holographic lithography (see figure) is used to define the underlying periodic microstructure in a single exposure, and two... 
Holography | Microstructures | Lithography | Photonic crystals | PHOTORESIST | CRYSTAL WAVE-GUIDES | BANDGAP CRYSTALS | MATERIALS SCIENCE, MULTIDISCIPLINARY | CHEMISTRY, PHYSICAL | HOLOGRAPHIC LITHOGRAPHY | FABRICATION | POLYMERIZATION | LINE DEFECTS | CHEMISTRY, MULTIDISCIPLINARY
Journal Article
Micromachines (Basel), ISSN 2072-666X, 2014, Volume 6, Issue 1, pp. 1 - 18
... photoresists. There has been a great deal of efforts in developing innovative unconventional lithography techniques to fully utilize the thick high aspect ratio nature of the SU-8 photoresist... 
SU-8 | Inclined | Lithography | Backside | Holographic interference | backside | inclined | NANOSCIENCE & NANOTECHNOLOGY | ULTRAVIOLET LITHOGRAPHY | RESIST | lithography | HIGH-ASPECT-RATIO | MASK | holographic interference | INSTRUMENTS & INSTRUMENTATION | UV LITHOGRAPHY | FABRICATION | MICROFABRICATION | EXPOSURE | Drawing | Photonic crystals | Photoresists | Exposure | Nanostructure | Microstructure | Three dimensional
Journal Article
Advanced optical materials, ISSN 2195-1071, 2018, Volume 6, Issue 8, pp. 1701049 - n/a
Interference lithography is a flexible technique for creating 3D periodic nano‐ and microstructures that can be used to make a wide variety of crystal lattices, but as it is found, some lattices require index... 
photonic crystal | holographic lithography | interference lithography | antireflection | MATERIALS SCIENCE, MULTIDISCIPLINARY | NANOSTRUCTURES | PHASE-SEPARATION | GRATINGS | POLYSTYRENE | AREA | PHOTONIC CRYSTAL TEMPLATES | DIFFRACTION | FABRICATION | OPTICS | DIAMOND-LIKE | Polystyrene resins | Crystal lattices | Indium tin oxide | Lithography | Interference | Refractivity | Photonics | Glass substrates | Tin oxides | Lattice matching | Coating effects | Light | Borosilicate glasses | Antireflection coatings
Journal Article
Polymers for Advanced Technologies, ISSN 1042-7147, 02/2006, Volume 17, Issue 2, pp. 83 - 93
Journal Article
Review of Scientific Instruments, ISSN 0034-6748, 12/2015, Volume 86, Issue 12, p. 121301
.... In this review, we will describe the implementation of a compact EUV lithography system capable of printing features with sub-50 nm resolution using Talbot imaging... 
PERIODIC STRUCTURES | X-RAY LASER | FOURIER IMAGES | NANOIMPRINT LITHOGRAPHY | INSTRUMENTS & INSTRUMENTATION | PHYSICS, APPLIED | INTERFEROMETRIC LITHOGRAPHY | DIFFRACTION LITHOGRAPHY | PATTERN-INTEGRATED INTERFERENCE | TALBOT LITHOGRAPHY | CAPILLARY DISCHARGE | HOLOGRAPHIC LITHOGRAPHY | Lithography | Ultraviolet lasers
Journal Article
Optics Express, ISSN 1094-4087, 04/2013, Volume 21, Issue 8, pp. 9851 - 9861
A method for precise multi-spot parallel ultrafast laser material structuring is presented based on multi-beam interference generated by dynamic spatial phase... 
PERIODIC STRUCTURES | MICROSTRUCTURES | GRATINGS | GLASS | LASER-PULSES | HOLOGRAPHIC LITHOGRAPHY | FABRICATION | OPTICS | SPATIAL LIGHT-MODULATOR | PHOTONIC CRYSTALS | Lasers | Photography - instrumentation | Surface Properties - radiation effects | Equipment Design | Refractometry - instrumentation | Equipment Failure Analysis | Lenses | Photonic | Engineering Sciences | Optics
Journal Article
Advanced Functional Materials, ISSN 1616-301X, 04/2014, Volume 24, Issue 16, pp. 2361 - 2366
...‐induced buckling of one‐dimensional (1D) nanowalls with nanofibers formed in‐between during holographic lithography of the negative‐tone photoresist SU‐8... 
holographic lithography | long‐range order | buckling | nanowaves | nanofibers | long-range order | Integrated circuit fabrication | Crosslinked polymers | Analysis | Lithography | Nanostructure | Nanofibers | Two dimensional | Dosage | Buckling | Tuning | Long range order
Journal Article