X
Search Filters
Format Format
Format Format
X
Sort by Item Count (A-Z)
Filter by Count
Journal Article (218) 218
Conference Proceeding (44) 44
Dissertation (16) 16
Publication (14) 14
Book Chapter (3) 3
Data Set (1) 1
Magazine Article (1) 1
more...
Subjects Subjects
Subjects Subjects
X
Sort by Item Count (A-Z)
Filter by Count
hsq (175) 175
physics, applied (111) 111
nanoscience & nanotechnology (81) 81
engineering, electrical & electronic (79) 79
hydrogen silsesquioxane (77) 77
optics (60) 60
electron beam lithography (57) 57
fabrication (39) 39
lithography (39) 39
materials science, multidisciplinary (36) 36
resist (34) 34
hydrogen (29) 29
resists (28) 28
elektronenstrahllithographie (27) 27
nanostructure (24) 24
electron-beam lithography (22) 22
silicon (19) 19
wasserstoff (19) 19
nanoimprint (16) 16
e-beam lithography (15) 15
integrated circuit fabrication (15) 15
films (14) 14
nanocomposites (14) 14
nanotechnology (14) 14
etching (13) 13
contrast (12) 12
imprint lithography (12) 12
nanomaterials (12) 12
physics, condensed matter (12) 12
polymer science (12) 12
polymers (12) 12
temperature (12) 12
low-k (11) 11
transistors (11) 11
high resolution (10) 10
electron beams (9) 9
hsq resist (9) 9
nanoimprint lithography (9) 9
nanostruktur (9) 9
plasma treatment (9) 9
silsesquioxane (9) 9
chemistry, physical (8) 8
devices (8) 8
hydrogen silsesquioxane hsq (8) 8
lithographie (8) 8
nanolithography (8) 8
reaktives ionenätzen (8) 8
resolution (8) 8
analysis (7) 7
arrays (7) 7
chemistry, multidisciplinary (7) 7
copper (7) 7
dielectrics (7) 7
electron beam resist (7) 7
elektron (7) 7
low k (7) 7
nanofabrication (7) 7
nanowires (7) 7
patterning (7) 7
proximity effect (7) 7
silicon substrates (7) 7
using (7) 7
ätzen (7) 7
aspect ratio (6) 6
deposition (6) 6
developers (6) 6
engineering and technology (6) 6
microelectronics (6) 6
room-temperature (6) 6
sensitivity (6) 6
sog (6) 6
thin-films (6) 6
contact angle (5) 5
electron beam (5) 5
high-resolution (5) 5
humor styles (5) 5
leakage current (5) 5
linewidth (5) 5
linienbreite (5) 5
molds (5) 5
nanodraht (5) 5
nanoimprinting (5) 5
photonic crystal (5) 5
photonic crystals (5) 5
plasma (5) 5
pmma (5) 5
room temperature (5) 5
silicium (5) 5
technology (5) 5
thin films (5) 5
低介電常數材料 (5) 5
annealing (4) 4
beam lithography (4) 4
complementary metal oxide semiconductors (4) 4
curing (4) 4
dielectric constant (4) 4
dielektrizitätskonstante (4) 4
electron-beam resist (4) 4
field-effect transistors (4) 4
gold (4) 4
more...
Language Language
Publication Date Publication Date
Click on a bar to filter by decade
Slide to change publication date range


PEDIATRICS, ISSN 0031-4005, 04/1991, Volume 87, Issue 4, pp. 519 - 531
Journal Article
刑事技术, ISSN 1008-3650, 1992, Issue 6, p. 26
<正> HSQ手印显现法具有物理、化学连续显现指印的功能,可将常规应用中的发现、提取、固定指印等手段合而为一,并可根据实际需要,使手印显现出不同的颜色。与国内、外常用的手印显现方法相同,具有适用客体广泛,显现效果理想,操作简便,价格 
显现效果;HSQ
Journal Article
Proceedings of SPIE - The International Society for Optical Engineering, ISSN 0277-786X, 1998, Volume 3508, pp. 208 - 215
Conference Proceeding
Proceedings of SPIE - The International Society for Optical Engineering, ISSN 0277-786X, 1998, Volume 3508, pp. 42 - 50
Conference Proceeding
Thin Solid Films, ISSN 0040-6090, 1998, Volume 335, Issue 1, pp. 186 - 191
The mechanical properties and thermal stresses of hydrogen silsesquioxane (HSQ) thin films cured at different temperatures have been investigated by a... 
Hardness | Interlayer dielectric | Modulus | Hydrogen silisesquioxane (HSQ) | Nanoindentation | Thin film | hardness | PHYSICS, CONDENSED MATTER | interlayer dielectric | PHYSICS, APPLIED | MATERIALS SCIENCE, MULTIDISCIPLINARY | hydrogen silsesquioxane (HSQ) | thin film | nanoindentation | modulus
Journal Article
Behaviour Change, ISSN 0813-4839, 12/1999, Volume 16, Issue 4, pp. 207 - 218
An extension of the Home Situations Questionnaire is described (HSQ-M), and normative data for an Australian clinical sample are reported. Reports were... 
Parenting | Psychological aspects | Child Behavior Checklist | Child psychology | Home Situations Questionnaire (HSQ-M) | Questionnaires | PSYCHOMETRIC PROPERTIES | SCHOOL | VARIABILITY | MOTHERS | PROBLEM BEHAVIOR | FATHERS PERCEPTIONS | PARENT | PSYCHOLOGY, CLINICAL | Parenting--Psychological aspects
Journal Article
IEEE Electron Device Letters, ISSN 0741-3106, 04/1999, Volume 20, Issue 4, pp. 185 - 187
In this letter, we develop a novel process to fill the interline space with air (dielectric constant=1). A silicon wafer, whose face is downward, patterned... 
Dielectric constant | Adhesives | Space technology | Organic materials | Dielectric materials | Hydrogen | Inorganic materials | Polyimides | Ultra large scale integration | Silicon | RC time constant | HSQ | low dielectric constant material | air gap | ENGINEERING, ELECTRICAL & ELECTRONIC | Liquids | Wafers | Slits | Adhesion | Polyimide resins | Drying
Journal Article
Japanese journal of applied physics. Pt. 1, Regular papers & short notes, ISSN 0021-4922, 11/1999, Volume 38, Issue 11, pp. 6240 - 6246
A multilevel interconnect technology with an intra metal air gap has been developed to reduce the interconnect delay time for versatile, and quick... 
Ring oscillator | Air gap | HOP | SOG | HSQ
Journal Article
Journal of Polymer Research, ISSN 1022-9760, 7/1999, Volume 6, Issue 3, pp. 197 - 202
In this study, the chemical-mechanical polishing (CMP) characteristics of the low dielectric constant poly(silsesquioxane) (HSQ) were investigated. CMP... 
Polymer Sciences | Surface modification | Chemistry | Slurry | CMP | HSQ | Industrial Chemistry/Chemical Engineering | Characterization and Evaluation Materials | POLYMER SCIENCE | FILMS | slurry | surface modification
Journal Article
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, ISSN 0021-4922, 11/1999, Volume 38, Issue 11, pp. 6240 - 6246
A multilevel interconnect technology with an intra metal air gap has been developed to reduce the interconnect delay time for versatile. and quick... 
PHYSICS, APPLIED | HDP | HSQ | SOG | ring oscillator | air gap
Journal Article
Microelectronic Engineering, ISSN 0167-9317, 2000, Volume 50, Issue 1, pp. 33 - 40
Low dielectric constant materials are now required as intermetallic dielectrics to reduce RC delay in advanced technologies. Hydrogen silsesquioxane (HSQ) is a... 
Planarization | Low- k | HSQ | CMP | PHYSICS, APPLIED | planarization | low-k | OPTICS | ENGINEERING, ELECTRICAL & ELECTRONIC
Journal Article
Japanese journal of applied physics. Pt. 1, Regular papers & short notes, ISSN 0021-4922, 12/2000, Volume 39, Issue 12 B, pp. 6836 - 6842
A Leica EBPG-5000 TFE electron beam lithography system has been evaluated and optimized. Sources of beam positional noise have been eliminated, resulting in an... 
Electron beam lithography | HSQ | Overlay accuracy | Benchmarking | Hydrogen silsesquioxane | Nanolithography | Denoising | Nanoelectronics
Journal Article
Microelectronic Engineering, ISSN 0167-9317, 2000, Volume 50, Issue 1, pp. 349 - 355
The spin-on low-k material coated directly on the metal lines, which is called the direct-on-metal (DOM) approach, has been investigated with respect to issues... 
HSQ, Direct-on-metal approach, Spin-on-polymers
Journal Article
MICROELECTRONIC ENGINEERING, ISSN 0167-9317, 01/2000, Volume 50, Issue 1-4, pp. 349 - 355
The spin-on low-k material coated directly on the metal lines, which is called the direct-on-metal (DOM) approach, has been investigated with respect to issues... 
PHYSICS, APPLIED | spin-on-polymers | OPTICS | HSQ | direct-on-metal approach | ENGINEERING, ELECTRICAL & ELECTRONIC
Journal Article
Thin Solid Films, ISSN 0040-6090, 2000, Volume 377, Issue 1-2, pp. 776 - 780
The electrical performance of hydrogen silsesquioxane (HSQ) as the interlayer level dielectric (ILD) has been determined by using two-metal-layered test... 
Capacitance | Hydrogen silsesquioxane | Low k | HSQ | Liner thickness | Via resistance
Journal Article
THIN SOLID FILMS, ISSN 0040-6090, 12/2000, Volume 377, pp. 776 - 780
The electrical performance of hydrogen silsesquioxane (HSQ) as the interlayer level dielectric (ILD) has been determined by using two-metal-layered test... 
liner thickness | PHYSICS, CONDENSED MATTER | PHYSICS, APPLIED | capacitance | MATERIALS SCIENCE, MULTIDISCIPLINARY | hydrogen silsesquioxane | HSQ | low k | via resistance
Journal Article
International Journal of Geriatric Psychiatry, ISSN 0885-6230, 11/2001, Volume 16, Issue 11, pp. 1061 - 1070
Journal Article
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, ISSN 0021-4922, 08/2001, Volume 40, Issue 8, pp. 5105 - 5108
Journal Article
Progress in Nucleic Acid Research and Molecular Biology, ISSN 0079-6603, 01/2001, Volume 65, pp. 157 - 196
Squalene synthase (SQS) catalyzes the first reaction of the branch of the isoprenoid metabolic pathway committed specifically to sterol biosynthesis.... 
hSQS gene | SREBP-2 protein | Squalene synthase | SREBP-1a protein | squalene | isoprenoid
Journal Article
No results were found for your search.

Cannot display more than 1000 results, please narrow the terms of your search.