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2006, ISBN 0819458457, xxxv, 1057
This comprehensive volume, edited by a senior technical staff member at SEMATECH, is the authoritative reference book on EUV source technology. The volume... 
Ultraviolet radiation | Industrial applications | Lithography | Plasma (Ionized gases) | Dental caries | Treatment | Diagnosis
Book
2005, Tutorial texts in optical engineering, ISBN 0819458295, Volume v. TT 66, xix, 254
Here for the first time is an integrated mathematical view of the physics and numerical modeling of optical projection lithography that efficiently covers the... 
Microlithography | Imaging systems | Historic sites | Travel | Turkey | Children | Family recreation | Guidebooks
Book
2010, ISBN 0819475602, xiv, 477
This book is aimed at new and experienced engineers, technology managers, and senior technicians who want to enrich their understanding of the image formation... 
Microlithography | Industrial applications | Etching | Semiconductors | Lasers | VMware | Virtual computer systems | Operating systems (Computers)
Book
American printer and lithographer, ISSN 0192-9933, 1979
Journal
2008, ISBN 0810972425, xvii, 302
Book
Applied Surface Science, ISSN 0169-4332, 10/2017, Volume 418, pp. 481 - 486
[Display omitted] •The ns- laser irradiation of Cr triangle on SiO2 allows the structuring of the substrate.•The resultant structures are dependent on the... 
Pattern transfer | Nanosecond laser | Fused silica | Laser nanostructuring | Nanosphere lithografie | Dielectric | Chromium triangle | NANOSPHERE LITHOGRAPHY | PHYSICS, CONDENSED MATTER | PHYSICS, APPLIED | CHEMISTRY, PHYSICAL | PULSES | FILMS | METALS | INDUCED FRONT SIDE | FABRICATION | MATERIALS SCIENCE, COATINGS & FILMS | Chromium | Silica | Atomic force microscopy | X-ray spectroscopy | Lasers
Journal Article
09/2017, 1st ed. 2018, ISBN 9783658192372, 335
Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into... 
Electrolytic oxidation | Engineering | Nanotechnology and Microengineering | Mathematical and Computational Engineering | Engineering Thermodynamics, Heat and Mass Transfer
eBook
2009, ISBN 0819475572, xix, 315
This book is a comprehensive guide to advanced processes and materials used in 193-nm immersion lithography (193i). It is an important text for those new to... 
Design | XHTML (Document markup language) | Web sites | HTML (Document markup language) | Cascading style sheets
Book
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