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2013, Advances in numerical heat transfer, ISBN 9781439861929, Volume 4, xiii, 328
"Preface The day of nanoparticles and nanofluids has arrived, and the applications of these media are legion. Here, attention is focused on such disparate... 
Nanoparticles | Thermodynamics | Heat | Fluid dynamics | TECHNOLOGY & ENGINEERING / Nanotechnology & MEMS | Transmission | SCIENCE / Mechanics / Dynamics / Thermodynamics | Heat exchangers | TECHNOLOGY & ENGINEERING / Mechanical
Book
2009, Optical science and engineering, ISBN 9781420065787, Volume 146., xx, 565
Book
2010, 2nd ed., ISBN 0470749830, xiv, 518
This accessible text is now fully revised and updated, providing an overview of fabrication technologies and materials needed to realize modern microdevices.... 
Microelectromechanical systems | Electronic apparatus and appliances | Microfabrication
Book
Optics express, ISSN 1094-4087, 04/2010, Volume 18, Issue 9, pp. 9006 - 9014
This paper presents an all-silica miniature optical fiber pressure/acoustic sensor based on the Fabry-Perot (FP) interferometric principle. The endface of the... 
SENSITIVITY | MEMS PRESSURE | OPTICS
Journal Article
2009, ISBN 0521832462, Volume 9780521832465, viii, 581
Quantum transport is a diverse field, sometimes combining seemingly contradicting concepts - quantum and classical, conduction and insulating - within a single... 
Nanoscience | Electron transport | Quantum theory
Book
2009, 1. Aufl., ISBN 9781441900678, xxvii, 358
TiO2 Nanotube Arrays: Synthesis, Properties, and Applications is the first book to provide an overview of this rapidly growing field. Vertically oriented,... 
Nanotubes | Solid State Physics | Optical and Electronic Materials | Materials Science | Spectroscopy and Microscopy | Nanotechnology | Renewable and Green Energy
Book
2012, Nano and energy, ISBN 9781439841761, xxiii, 513
"Written to help professionals, researchers, and students discover the challenges and opportunities associated with development of next-generation nanoscale... 
Data processing | Mathematics | MATLAB | Nanotechnology
Book
2010, The Cambridge RF and microwave engineering series, ISBN 0521897718, Volume 9780521897716, cm.
An up-to-date guide to the theory and applications of RF MEMS. With detailed information about RF MEMS technology as well as its reliability and applications,... 
Microelectromechanical systems | Radio frequency microelectromechanical systems
Book
Micromachines (Basel), ISSN 2072-666X, 2014, Volume 5, Issue 3, pp. 622 - 653
Journal Article
MRS bulletin, ISSN 0883-7694, 11/2012, Volume 37, Issue 11, pp. 1051 - 1061
This article reports on the state-of-the-art of the development of aluminum nitride (AlN) thin-film microelectromechanical systems (MEMS) with particular... 
Thin-film piezoelectric MEMS | PHYSICS, APPLIED | ACOUSTIC RESONATORS | MEMS | STRESS | MATERIALS SCIENCE, MULTIDISCIPLINARY | FILTERS
Journal Article
Sensors and actuators. A. Physical., ISSN 0924-4247, 2008, Volume 147, Issue 1, pp. 340 - 351
This paper presents the design, kinematic and dynamic analysis, fabrication and characterization of a monolithic micro/nanopositioning three degrees-of-freedom... 
SOI-MEMS | 3-DOF planar PKMs | MEMS– XYθ stages | Micro/nanopositioning stages | MEMS-XYθ stages | DESIGN | INSTRUMENTS & INSTRUMENTATION | micro/nanopositioning stages | MEMS-XY theta stages | FABRICATION | MICROACTUATOR | LENS | ENGINEERING, ELECTRICAL & ELECTRONIC | Microelectromechanical systems | Analysis | Kinematics
Journal Article
2008, 1. Aufl., ISBN 3527316752, xxi, 575
Providing complementary viewpoints from academia as well as technology companies, this book covers the three most important aspects of successful device... 
Photovoltaic cells | Organic semiconductors | Photovoltaic power generation | MEMS and Nanoelectronics
Book
2009, 1. Aufl., ISBN 9783527407903, xiv, 466
This interdisciplinary approach to the topic brings together reviews of the physics, chemistry, fabrication and application of magnetic nanoparticles and... 
Nanoparticles | Nanostructures | Magnetic properties | Nanostructured materials
Book
Journal of Biophotonics, ISSN 1864-063X, 10/2008, Volume 1, Issue 5, pp. 355 - 376
Microfluidics and photonics come together to form a field commonly referred to as ‘optofluidics’. Flow cytometry provides the field with a technology base from... 
fabrication techniques; lithography | cells on a chip | other integrated‐optical elements and systems | fluorescence | flows in micro‐electromechanical systems (MEMS) and nanoelectromechanical systems (NEMS) | Biomedical instrumentation and transducers | including micro‐electro‐mechanical systems (MEMS) | pattern transfer | Cells on a chip | Including micro-electro-mechanical systems (MEMS) | Pattern transfer | Other integrated-optical elements and systems | Lithography | Flows in microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS) | Fluorescence | Fabrication techniques | fabrication techniques | ARRAY | PARTICLES | flows in micro-electromechanical systems (MEMS) and nanoelectromechanical systems (NEMS) | LIGHT | BIOCHEMICAL RESEARCH METHODS | DEVICE | lithography | BIOPHYSICS | other integrated-optical elements and systems | including micro-electro-mechanical systems (MEMS) | OPTICAL WAVE-GUIDES | DIELECTROPHORESIS | ABSORBENCY DETECTION | SEPARATION | OPTICS | MICROFABRICATION | LIVING CELLS | Flow Cytometry - instrumentation | Microfluidics - instrumentation | Flow Cytometry - methods | Optics and Photonics - methods | Optics and Photonics - instrumentation | Optical Fibers | Microfluidics - methods | flows in microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS)
Journal Article