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2010, 1. Aufl., Wiley series in pure and applied optics, ISBN 047059697X, xv, 226
A Unified Summary of the Models and Optimization Methods Used in Computational LithographyOptical lithography is one of the most challenging areas of current... 
Integrated circuits | Microlithography | Resolution (Optics) | Semiconductors | Mathematics | Etching | Design and construction | Photolithography | Optical Electronics
Book
2011, ISBN 184821202X
"Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology,... 
Microlithography
Web Resource
03/2013, ISBN 9781848212022
Book
Journal of micro/nanolithography, MEMS, and MOEMS, ISSN 1932-5150, 2007
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Journal of microlithography, microfabrication, and microsystems, ISSN 1537-1646, 2002
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