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2013, Microsystem and Nanotechnology, ISBN 9780470972878
Web Resource
2013, SpringerBriefs in applied sciences and technology, Manufacturing and surface engineering, ISBN 1447145976
Web Resource
2011, ISBN 0470556447
"This book is the first of its kind to collectively address design-based and mechanical micro-manufacturing topics in one place. It focuses on design and... 
Manufacturing processes | Microfabrication | Micromachining
Web Resource
2006, Springer series in advanced microelectronics, ISBN 9781402045783, Volume 24
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2006, Springer series in advanced microelectronics, ISBN 9781402045899, Volume 24
Web Resource
2006, Springer series in advanced microelectronics, ISBN 9781402045783, Volume 24
Web Resource
2006, Springer series in advanced microelectronics, ISBN 9781402045783, Volume 24
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Seimitsu Koggakkaishi = Journal of the Japan Society of Precision Engineering, ISSN 0912-0289, 01/2019, Volume 85, Issue 7, p. 618
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Seimitsu Koggakkaishi = Journal of the Japan Society of Precision Engineering, ISSN 0912-0289, 01/2019, Volume 85, Issue 7, p. 609
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