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2013, ISBN 9781439840535, xxi, 617 p., [24] p. of plates
Book
2008, Woodhead Publishing in materials, ISBN 9781420070835, xxiv, 810
Book
Microfluidics and nanofluidics, ISSN 1613-4982, 2004
Journal
2010, Artech House integrated microsystems series, ISBN 9781596934184, xv, 220
Book
2012, 3rd ed., ISBN 9781420055191, 3 v.
Book
Journal of microelectromechanical systems, ISSN 1057-7157, 1992
Journal
2009, Optical science and engineering, ISBN 1420045687, Volume 136, 483
Book
2010, 2nd ed., ISBN 0470749830, xiv, 518
Book
Smart materials and structures, ISSN 0964-1726, 08/2008, Volume 17, Issue 4, pp. 043001 - 043001 (33)
Materials Science | Technology | Instruments & Instrumentation | Materials Science, Multidisciplinary | Science & Technology | Micromechanical devices and systems | Transducers | Mechanical instruments, equipment and techniques | General equipment and techniques | Mechanical engineering. Machine design | Exact sciences and technology | Instruments, apparatus, components and techniques common to several branches of physics and astronomy | General | Applied sciences | Precision engineering, watch making | Physics
Journal Article
IEEE transactions on electron devices, ISSN 0018-9383, 02/2019, Volume 66, Issue 2, pp. 1126 - 1126
Journal Article
Journal of microelectromechanical systems, ISSN 1057-7157, 08/2009, Volume 18, Issue 4, pp. 799 - 807
Microelectromechanical systems | Silicon devices | Ignition | Nanoporous materials | Sensor systems | Fuels | Micromechanical devices | Explosive | nanoenergetic | Monolithic integrated circuits | Failure analysis | nanoporous silicon | Solids | Nanoenergetic | Nanoporous silicon | Engineering | Physical Sciences | Nanoscience & Nanotechnology | Technology | Instruments & Instrumentation | Engineering, Electrical & Electronic | Science & Technology - Other Topics | Physics | Science & Technology | Physics, Applied | Micromechanical devices and systems | Mechanical instruments, equipment and techniques | Exact sciences and technology | Microelectronic fabrication (materials and surfaces technology) | Instruments, apparatus, components and techniques common to several branches of physics and astronomy | Electronics | General | Applied sciences | Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices | Usage | Silicon | Semiconductors | Properties | Materials | Nanocomposites | Initiators | Energetic materials | Nanomaterials | Nanostructure
Journal Article
Journal of micromechanics and microengineering, ISSN 0960-1317, 09/2009, Volume 19, Issue 9, pp. 094005 - 094005 (8)
Micromechanical devices and systems | Transducers | Mechanical instruments, equipment and techniques | Exact sciences and technology | Materials science | Precision engineering, watch making | Physics | General equipment and techniques | Mechanical engineering. Machine design | Instruments, apparatus, components and techniques common to several branches of physics and astronomy | General | Applied sciences | Methods of deposition of films and coatings; film growth and epitaxy | Cross-disciplinary physics: materials science; rheology
Journal Article
Smart materials and structures, ISSN 0964-1726, 08/2014, Volume 23, Issue 9, pp. 1 - 10
polymer | self-assembly | actuators | origami | robotics | microfabrication | lithography | Materials Science | Technology | Instruments & Instrumentation | Materials Science, Multidisciplinary | Science & Technology | Micromechanical devices and systems | Transducers | Mechanical instruments, equipment and techniques | General equipment and techniques | Exact sciences and technology | Instruments, apparatus, components and techniques common to several branches of physics and astronomy | General | Physics | Hinges | Swelling | Hydrogels | Crosslinking | Photolithography | Devices | Three dimensional | Stimuli
Journal Article
2012, Devices, circuits, and systems., ISBN 1439836205, xviii, 742
Book
2000, The electric power engineering series., ISBN 9780849322754, 782
Book
2005, ISBN 0444516166, 327
eBook
Journal of micromechanics and microengineering, ISSN 0960-1317, 12/2010, Volume 20, Issue 12, pp. 125020 - 12
Engineering | Physical Sciences | Nanoscience & Nanotechnology | Technology | Instruments & Instrumentation | Engineering, Electrical & Electronic | Science & Technology - Other Topics | Physics | Science & Technology | Physics, Applied | Micromechanical devices and systems | Transducers | Mechanical instruments, equipment and techniques | Exact sciences and technology | Microelectronic fabrication (materials and surfaces technology) | Electronics | Precision engineering, watch making | Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices | General equipment and techniques | Mechanical engineering. Machine design | Instruments, apparatus, components and techniques common to several branches of physics and astronomy | General | Applied sciences | Engineering Sciences | Micro and nanotechnologies | Microelectronics
Journal Article
IEEE transactions on instrumentation and measurement, ISSN 0018-9456, 01/2016, Volume 65, Issue 1, pp. 208 - 221
Legged locomotion | Micromechanical devices | Accelerometers | Accuracy | microelectromechanical devices | motion detection | Inertial navigation | sensor fusion | Sensors | machine learning | Global Positioning System | Sensor fusion | Motion detection | Microelectromechanical devices | Machine learning | Engineering, Electrical & Electronic | Engineering | Technology | Instruments & Instrumentation | Science & Technology | Micromechanics | Research | Analysis | Microelectromechanical systems | Walking | Navigation | Portability | Devices | Indoor | Recognition | Escalators
Journal Article