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1. Optical nano and micro actuator technology
by Knopf, George K and Otani, Yukitoshi
2013, ISBN 9781439840535, xxi, 617 p., [24] p. of plates
Microelectromechanical systems | Actuators | Manipulators (Mechanism) | Mechatronics | Optoelectronic devices | Design and construction | Optical equipment | Nanostructured materials | Optical storage devices | Photonics
Book
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2. Microjoining and nanojoining
by Zhou, Y
2008, Woodhead Publishing in materials, ISBN 9781420070835, xxiv, 810
Metal bonding
Book
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3. Microfluidics and nanofluidics
Microfluidics and nanofluidics, ISSN 1613-4982, 2004
Microfluidics | Nanofluids
Journal
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4. Lab-on-a-chip
: techniques, circuits, and biomedical applications
by Ghallab, Yehya H and Badawy, Wael
2010, Artech House integrated microsystems series, ISBN 9781596934184, xv, 220
Electronic equipment | Microelectronics | Biomedical engineering | Chemical laboratories | Microelectromechanical systems | Integrated circuits | Medical electronics
Book
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5. Fundamentals of microfabrication and nanotechnology
by Madou, Marc J
2012, 3rd ed., ISBN 9781420055191, 3 v.
Microelectromechanical systems | Solid state physics | Nanoelectromechanical systems | Nanotechnology | Microfluidics
Book
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6. Journal of microelectromechanical systems
: a joint IEEE and ASME publication on microstructures, microactuators, microsensors, and microsystems
and American Society of Mechanical EngineersInstitute of Electrical and Electronics Engineers
Journal of microelectromechanical systems, ISSN 1057-7157, 1992
Electromechanical devices | Periodicals | Microelectronics
Journal
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7. Photonic MEMS devices
: design, fabrication and control
by Liu, Ai-Qun
2009, Optical science and engineering, ISBN 1420045687, Volume 136, 483
Microelectromechanical systems | Photonics
Book
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8. Introduction to microfabrication
by Franssila, Sami
2010, 2nd ed., ISBN 0470749830, xiv, 518
Microelectromechanical systems | Electronic apparatus and appliances | Microfabrication
Book
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9. Full Text Powering MEMS portable devices—a review of non-regenerative and regenerative power supply systems with special emphasis on piezoelectric energy harvesting systems
by Cook-Chennault, K A and Thambi, N and Sastry, A M
Smart materials and structures, ISSN 0964-1726, 08/2008, Volume 17, Issue 4, pp. 043001 - 043001 (33)
Materials Science | Technology | Instruments & Instrumentation | Materials Science, Multidisciplinary | Science & Technology | Micromechanical devices and systems | Transducers | Mechanical instruments, equipment and techniques | General equipment and techniques | Mechanical engineering. Machine design | Exact sciences and technology | Instruments, apparatus, components and techniques common to several branches of physics and astronomy | General | Applied sciences | Precision engineering, watch making | Physics
Journal Article
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10. Full Text Erratum to "Reliability Improvement of GaN Devices on Free-Standing GaN Substrates" [Aug 18 3379-3387]
by Zhang, Dongliang and Cheng, Xinhong and Ng, Wai Tung and Shen, Lingyan and Zheng, Li and Wang, Qian and Qian, Ru and Gu, Ziyue and Wu, Dengpeng and Zhou, Wen and Zhu, Hongyue and Yu, Yuehui
IEEE transactions on electron devices, ISSN 0018-9383, 02/2019, Volume 66, Issue 2, pp. 1126 - 1126
Micromechanical devices | HEMTs | Wide band gap semiconductors | Semiconductor device reliability | Gallium nitride | Substrates | Gallium nitrides
Journal Article
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11. Full Text Energetic Nanoporous Silicon Devices
by Currano, L.J and Churaman, W.A
Journal of microelectromechanical systems, ISSN 1057-7157, 08/2009, Volume 18, Issue 4, pp. 799 - 807
Microelectromechanical systems | Silicon devices | Ignition | Nanoporous materials | Sensor systems | Fuels | Micromechanical devices | Explosive | nanoenergetic | Monolithic integrated circuits | Failure analysis | nanoporous silicon | Solids | Nanoenergetic | Nanoporous silicon | Engineering | Physical Sciences | Nanoscience & Nanotechnology | Technology | Instruments & Instrumentation | Engineering, Electrical & Electronic | Science & Technology - Other Topics | Physics | Science & Technology | Physics, Applied | Micromechanical devices and systems | Mechanical instruments, equipment and techniques | Exact sciences and technology | Microelectronic fabrication (materials and surfaces technology) | Instruments, apparatus, components and techniques common to several branches of physics and astronomy | Electronics | General | Applied sciences | Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices | Usage | Silicon | Semiconductors | Properties | Materials | Nanocomposites | Initiators | Energetic materials | Nanomaterials | Nanostructure
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12. Full Text Vibration energy harvesting with aluminum nitride-based piezoelectric devices
by Elfrink, R and Kamel, T M and Goedbloed, M and Matova, S and Hohlfeld, D and van Andel, Y and van Schaijk, R
Journal of micromechanics and microengineering, ISSN 0960-1317, 09/2009, Volume 19, Issue 9, pp. 094005 - 094005 (8)
Micromechanical devices and systems | Transducers | Mechanical instruments, equipment and techniques | Exact sciences and technology | Materials science | Precision engineering, watch making | Physics | General equipment and techniques | Mechanical engineering. Machine design | Instruments, apparatus, components and techniques common to several branches of physics and astronomy | General | Applied sciences | Methods of deposition of films and coatings; film growth and epitaxy | Cross-disciplinary physics: materials science; rheology
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13. Full Text Functional stimuli responsive hydrogel devices by self-folding
by Yoon, ChangKyu and Xiao, Rui and Park, JaeHyun and Cha, Jaepyeong and Nguyen, Thao D and Gracias, David H
Smart materials and structures, ISSN 0964-1726, 08/2014, Volume 23, Issue 9, pp. 1 - 10
polymer | self-assembly | actuators | origami | robotics | microfabrication | lithography | Materials Science | Technology | Instruments & Instrumentation | Materials Science, Multidisciplinary | Science & Technology | Micromechanical devices and systems | Transducers | Mechanical instruments, equipment and techniques | General equipment and techniques | Exact sciences and technology | Instruments, apparatus, components and techniques common to several branches of physics and astronomy | General | Physics | Hinges | Swelling | Hydrogels | Crosslinking | Photolithography | Devices | Three dimensional | Stimuli
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14. Integrated microsystems
: electronics, photonics, and biotechnology
by Iniewski, Krzysztof
2012, Devices, circuits, and systems., ISBN 1439836205, xviii, 742
Microelectromechanical systems | Integrated optics
Book
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15. Electromechanical systems, electric machines, and applied mechatronics
by Lyshevski, Sergey Edward
2000, The electric power engineering series., ISBN 9780849322754, 782
Microelectromechanical systems | Mechatronics | Power electronics
Book
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16. Full Text Analysis and Design Principles of MEMS Devices
by Bao, Min-Hang
2005, ISBN 0444516166, 327
Microelectromechanical systems | Microtechnology
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17. Full Text Nonlinear mechanism in MEMS devices for energy harvesting applications
by Andò, B and Baglio, S and Trigona, C and Dumas, N and Latorre, L and Nouet, P
Journal of micromechanics and microengineering, ISSN 0960-1317, 12/2010, Volume 20, Issue 12, pp. 125020 - 12
Engineering | Physical Sciences | Nanoscience & Nanotechnology | Technology | Instruments & Instrumentation | Engineering, Electrical & Electronic | Science & Technology - Other Topics | Physics | Science & Technology | Physics, Applied | Micromechanical devices and systems | Transducers | Mechanical instruments, equipment and techniques | Exact sciences and technology | Microelectronic fabrication (materials and surfaces technology) | Electronics | Precision engineering, watch making | Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices | General equipment and techniques | Mechanical engineering. Machine design | Instruments, apparatus, components and techniques common to several branches of physics and astronomy | General | Applied sciences | Engineering Sciences | Micro and nanotechnologies | Microelectronics
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18. Full Text Motion Mode Recognition for Indoor Pedestrian Navigation Using Portable Devices
by Elhoushi, Mostafa and Georgy, Jacques and Noureldin, Aboelmagd and Korenberg, Michael J
IEEE transactions on instrumentation and measurement, ISSN 0018-9456, 01/2016, Volume 65, Issue 1, pp. 208 - 221
Legged locomotion | Micromechanical devices | Accelerometers | Accuracy | microelectromechanical devices | motion detection | Inertial navigation | sensor fusion | Sensors | machine learning | Global Positioning System | Sensor fusion | Motion detection | Microelectromechanical devices | Machine learning | Engineering, Electrical & Electronic | Engineering | Technology | Instruments & Instrumentation | Science & Technology | Micromechanics | Research | Analysis | Microelectromechanical systems | Walking | Navigation | Portability | Devices | Indoor | Recognition | Escalators
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