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Journal of Dentistry, ISSN 0300-5712, 08/2017, Volume 63, pp. 21 - 29
Journal Article
Journal Article
ACS Nano, ISSN 1936-0851, 03/2015, Volume 9, Issue 3, pp. 2390 - 2404
Journal Article
Proceedings of SPIE - The International Society for Optical Engineering, ISSN 0277-786X, 3/2017, Volume 10143, pp. 101431V - 101431V-11
Extreme ultraviolet (EUV) pellicle is required for protecting the EUV mask from defects, contaminations, and particles during exposure process. EUV pellicle... 
EUV pellicle | Wrinkled multi-stack pellicle | Multi-stack pellicle | Pellicle deformation
Conference Proceeding
Journal Article
Journal Article
Journal of Micro/Nanolithography, MEMS, and MOEMS, ISSN 1932-5150, 10/2017, Volume 16, Issue 4, pp. 041008 - 041008
An extreme ultraviolet (EUV) pellicle is needed for the protection of EUV masks from defects, contaminants, and particles during the exposure process. However,... 
wrinkle and particle defect on extreme ultraviolet pellicle | extreme ultraviolet pellicle | pellicle deformation | MATERIALS SCIENCE, MULTIDISCIPLINARY | PROGRESS | NANOSCIENCE & NANOTECHNOLOGY | EUV PELLICLE | OPTICS | ENGINEERING, ELECTRICAL & ELECTRONIC
Journal Article