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Applied Physics Letters, ISSN 0003-6951, 10/2013, Volume 103, Issue 18, p. 189901
Journal Article
Nature communications, ISSN 2041-1723, 01/2018, Volume 9, Issue 1, pp. 72 - 1
The original version of this Article omitted the following from the Acknowledgements:"Satish Patil thanks Department of Science and Technology, New Delhi,... 
Charge transfer | Planarization
Journal Article
Chemical Science, ISSN 2041-6520, 01/2019, Volume 10, Issue 43, pp. 10143 - 10148
The synthesis of porous nanographenes is a challenging task for solution chemistry, and thus, on-surface synthesis provides an alternative approach. Here, we... 
Organic chemistry | Planarization | Chemical synthesis | Carbon
Journal Article
IEEE Transactions on Applied Superconductivity, ISSN 1051-8223, 08/2017, Volume 27, Issue 5, pp. 1 - 4
Fabrication of devices composed of Josephson junctions in trilayer technology is usually compromised by the topography of the subjacent layers. If the... 
Wiring | Planarization | Contacts | Resists | Josephson junctions | Chemical–mechanical planarization | Nb/Al-AlOx/Nb Josephson junctions (JJ) | Junctions | Niobium | PHYSICS, APPLIED | FABRICATION | Chemical-mechanical planarization | ENGINEERING, ELECTRICAL & ELECTRONIC
Journal Article
2008, 1st ed., ISBN 0471719196, xxv, 734
An authoritative, systematic, and comprehensive description of current CMP technology. Chemical Mechanical Planarization (CMP) provides the greatest degree of... 
Integrated circuits | Chemical mechanical planarization | Microelectronics | Design and construction | Materials | TECHNOLOGY & ENGINEERING | Chemical & Biochemical
Book
Journal of Alloys and Compounds, ISSN 0925-8388, 01/2019, Volume 770, pp. 335 - 344
Journal Article
Chemical Society Reviews, ISSN 0306-0012, 3/2017, Volume 46, Issue 5, pp. 1526 - 1544
Journal Article
Applied Physics Letters, ISSN 0003-6951, 05/2017, Volume 110, Issue 20, p. 201601
Chemical etching of SiC was found to proceed in pure water with the assistance of a Pt catalyst. A 4H-SiC (0001) wafer was placed and slid on a polishing pad... 
SURFACE | DEFECTS | PHYSICS, APPLIED | PLANARIZATION | COMPLEXES | Surfaces and Interfaces
Journal Article
2016, Woodhead Publishing series in electronic and optical materials, ISBN 0081001657, Volume no. 86.
Advances in Chemical Mechanical Planarization (CMP) provides the latest information on a mainstream process that is critical for high-volume, high-yield... 
Chemical mechanical planarization | Microelectronics | Nanoelectronics
Web Resource
Applied Optics, ISSN 1559-128X, 02/2018, Volume 57, Issue 4, pp. 588 - 593
Full-aperture polishing is a significant process for fabricating large ultra-precision optic flats. The surface figure is one of the key specifications... 
PAD | WAFER SURFACE | OPTICS | STRESS | PLANARIZATION | NONUNIFORMITY | Research | Fiber optics
Journal Article
JOURNAL OF ALLOYS AND COMPOUNDS, ISSN 0925-8388, 03/2019, Volume 779, pp. 511 - 520
For chemical and mechanical polishing/planarization (CMP) applications, the finished surface roughness, polishing efficiency, and defectivity critically depend... 
Core/shell structure | Particle size | COMPOSITE-PARTICLES | Mechanical property | SPHERES | MATERIALS SCIENCE, MULTIDISCIPLINARY | METALLURGY & METALLURGICAL ENGINEERING | INDENTATION | CHEMISTRY, PHYSICAL | MODEL | NANOPARTICLES | OXIDE CMP | ABRASIVES | MESOPOROUS-SILICA | Hybrid abrasive | Chemical mechanical polishing/planarization (CMP) | PLANARIZATION | WATER
Journal Article
Seimitsu Koggakkaishi = Journal of the Japan Society of Precision Engineering, ISSN 0912-0289, 01/2018, Volume 84, Issue 3, p. 221
Journal Article
Microelectronic Engineering, ISSN 0167-9317, 05/2016, Volume 157, pp. 60 - 63
Journal Article
Materials Science & Engineering R, ISSN 0927-796X, 2004, Volume 45, Issue 3, pp. 89 - 220
Journal Article
Journal of Photochemistry and Photobiology. A, Chemistry, ISSN 1010-6030, 02/2018, Volume 353, p. 416
Most of the excited state proton transfer exhibiting molecules show a dual emission. These emissions appear from two different conformers which equilibrate in... 
Protons | Molecules | Chemistry | Planarization | Isomerization | Emission | Ground state | Agglomeration | Emissions
Journal Article
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