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polishing (636120) 636120
performing operations (631258) 631258
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grinding (629699) 629699
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1. Full Text Polishing characteristics of sensitive glasses - experimental investigation
by Vogt, Christian and Rascher, Rolf
EPJ Web of conferences, ISSN 2100-014X, 2020, Volume 238, p. 3015
Polishing
Journal Article
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2. Tribology of abrasive machining processes
by Marinescu, Ioan D
2004, ISBN 9780815514909, xxvii, 724
Grinding and polishing | Tribology
Book
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3. Handbook of machining with grinding wheels
by Marinescu, Ioan D
2007, Manufacturing engineering and materials processing, ISBN 1574446711, Volume 72, 596
Grinding and polishing | Machine-tools | Grinding wheels
Book
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4. Full Text Fundamental aspects and recent developments in metal surface polishing with energy beam irradiation
by Deng, Tiantian and Li, Jianjun and Zheng, Zhizhen
International journal of machine tools & manufacture, ISSN 0890-6955, 01/2020, Volume 148, p. 103472
Ion beam polishing | Laser beam polishing | Plasma beam polishing | Polishing effects | Model simulation | Electron beam polishing | Engineering | Engineering, Manufacturing | Technology | Engineering, Mechanical | Science & Technology | Parameters | Energy | Metal surfaces | Precision finishing | Mechanical properties | Polishing | Surface roughness | Trends | Surface finishing | Finishing
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5. Microelectronic applications of chemical mechanical planarization
by Li, Yuzhuo
2008, 1st ed., ISBN 0471719196, xxv, 734
Integrated circuits | Chemical mechanical planarization | Microelectronics | Design and construction | Materials | TECHNOLOGY & ENGINEERING | Chemical & Biochemical
Book
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6. Full Text Controllability and mechanism investigation on the subsurface damage of CVD diamond film by Fe-containing vitrified bond wheel
by Zhang, Mengdi and Xu, Hanqing
Tribology international, ISSN 0301-679X, 03/2021, Volume 155, p. 1
Tribochemistry | CVD diamond film | Subsurface damage | Chemically mechanical polishing | Diamond polishing | Mechanical polishing | Stability | Polishes | Controllability | Iron | Material removal rate (machining) | Chemical-mechanical polishing | Damage | Phase transitions | Diamond films | Graphitization
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7. Tribology in chemical-mechanical planarization
by Liang, Hong, 1961 and Craven, David R., 1945
2005, ISBN 9780824725679, 185
Grinding and polishing | Tribology
Book
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8. Full Text Surface damage of single-crystal diamond (100) processed based on a sol-gel polishing tool
by Lin, Yingchao and Lu, Jing and Tong, Ruilong and Luo, Qiufa and Xu, Xipeng
Diamond and related materials, ISSN 0925-9635, 03/2018, Volume 83, pp. 46 - 53
Surface and subsurface damage | Single-crystal diamond | Removal mechanism | Semi-fixed polishing tool | Physical Sciences | Materials Science | Technology | Materials Science, Coatings & Films | Materials Science, Multidisciplinary | Physics, Condensed Matter | Physics | Science & Technology | Physics, Applied | Machine vision | Machining | Scanning electron microscopy | Mechanical polishing | Crystal dislocations | Amorphization | Diamonds | Mechanical properties | Chemical polishing | Chemical reactions | Diamond tools | Chemical-mechanical polishing | Chemical damage | Dislocations | Single crystals | Organic chemistry | Diamond polishing | Transmission electron microscopy | Damage detection | Reagents | Surface properties | Sol-gel processes | Abrasives | Wear particles | Debris | Crystal structure
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9. Full Text A randomised controlled study on the use of finishing and polishing systems on different resin composites using 3D contact optical profilometry and scanning electron microscopy
by Daud, Alaa and Gray, Gordon and Lynch, Christopher D and Wilson, Nairn H.F and Blum, Igor R
Journal of dentistry, ISSN 0300-5712, 04/2018, Volume 71, pp. 25 - 30
Polishing systems | Resin composite | Surface roughness | Life Sciences & Biomedicine | Dentistry, Oral Surgery & Medicine | Science & Technology | Composite Resins | Particle Size | Microscopy, Electron, Scanning | Dental Restoration, Permanent | Dental Materials - chemistry | Humans | Surface Properties | Tungsten Compounds | Materials Testing | Dental Polishing - methods | Dental Polishing - instrumentation | Scanning electron microscopy | Tungsten carbide | Polymer matrix composites | Polishing | Electron microscopy | Three dimensional composites | Surface finish | Dental restorative materials | Nanocomposites | Tungsten | Morphology | Aesthetics | Resins | Finishing
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10. Full Text Preparation of irregular silica nano‐abrasives for the chemical mechanical polishing behaviour on sapphire substrates
by Dong, Yue and Lei, Hong and Liu, Wenqing
Micro & nano letters, ISSN 1750-0443, 11/2019, Volume 14, Issue 13, pp. 1328 - 1333
nickel ion‐induced effect | nanofabrication | SiO2‐Al2O3 | contact model | abrasion | electrokinetic effects | abrasives | surface roughness | chemical reactions | sapphire CMP process | flat surface quality | irregular silica nanoabrasives | high polishing rate | sapphire chemical mechanical polishing | sapphire | chemical mechanical polishing | nickel | zeta potential | X‐ray photoelectron spectroscopy | nanostructured materials | chemical mechanical polishing behaviour | growth method | smooth surface quality | silicon compounds | solid phase chemical reactions | X‐ray photoelectron spectra | Science & Technology - Other Topics | Materials Science | Nanoscience & Nanotechnology | Technology | Materials Science, Multidisciplinary | Science & Technology | Mechanical polishing | Chemical reactions | Chemical-mechanical polishing | Substrates | Silicon dioxide | Organic chemistry | Sapphire | Zeta potential | Surface properties | Silicon | Photoelectrons | Abrasives | Flat surfaces | Chemical synthesis | Solid phases
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11. Full Text Study on high efficient sapphire wafer processing by coupling SG-mechanical polishing and GLA-CMP
by Xu, Yongchao and Lu, Jing and Xu, Xipeng and Chen, Chao-Chang A and Lin, Yujing
International journal of machine tools & manufacture, ISSN 0890-6955, 08/2018, Volume 130-131, pp. 12 - 19
Gas-liquid assisted chemical mechanical polishing | Sub-surface damage | Material removal rate | Sapphire | SG polishing | Engineering | Engineering, Manufacturing | Technology | Engineering, Mechanical | Science & Technology | Hardness | Mechanical engineering | Innovations | Mechanical polishing | Approximation | Machining | Surface roughness | Chemical-mechanical polishing | Surface finishing | Thin films | Surface finish | Organic chemistry | Efficiency | Surface properties | Sol-gel processes | Abrasives | Coupling | Copper | Resins
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12. Nanofinishing science and technology
: basic and advanced finishing and polishing processes
by Jain, V. K. 1948- editor. (Vijay Kumar)
2017, Micro and nano manufacturing series, ISBN 1498745946, xix, 655 pages
Grinding and polishing | Nanomanufacturing | Finishes and finishing | Industrial Engineering & Manufacturing | Materials Science | Nanoscience & Nanotechnology
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