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Journal of Applied Physics, ISSN 0021-8979, 05/2017, Volume 121, Issue 17, p. 171101
High Power Impulse Magnetron Sputtering (HiPIMS) is a coating technology that combines magnetron sputtering with pulsed power concepts... 
THIN-FILMS | PHYSICS, APPLIED | ELECTRON-EMISSION | CRNX FILMS | DOPED ZNO FILMS | HYSTERESIS BEHAVIOR | ION-FLUX | HARD COATINGS | SUPERLATTICE COATINGS | AL-N COATINGS | PULSED-DC | Thin films | Magnetrons | Plasma physics | Research | Dielectric films | CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY
Journal Article
IEEE Transactions on Plasma Science, ISSN 0093-3813, 11/2010, Volume 38, Issue 11, pp. 3046 - 3056
CrN x (0 ≤ x ≤ 0.91) films synthesized using high-power pulsed magnetron sputtering, also known as high-power impulse magnetron sputtering (HiPIMS... 
Magnetrons | Chromium | magnetron sputtering | high-power impulse magnetron sputtering (HiPIMS) | Nitrogen | Sputtering | Substrates | CrN | high-power pulsed magnetron sputtering | Chromium compounds | Analysis | Sputtering (Physics) | Electric properties
Journal Article
Surface & Coatings Technology, ISSN 0257-8972, 10/2016, Volume 304, pp. 51 - 56
Nanocrystalline Ti films were deposited by continuous dc magnetron sputtering (dcMS), pulsed dc magnetron sputtering... 
Titanium film | Microstructure | Properties | Pulsed dc magnetron sputtering (PMS) | TARGET | ENERGY | PHYSICS, APPLIED | SCRATCH | POWER | PARAMETERS | DENSITY | ADHESION | PLASMA | NITRIDE COATINGS | GROWTH | MATERIALS SCIENCE, COATINGS & FILMS | Analysis | Corrosion and anti-corrosives
Journal Article
Journal of Applied Physics, ISSN 0021-8979, 02/2017, Volume 121, Issue 8, p. 80901
.... From this first study, it becomes clear that the probability to observe hysteresis is much lower as compared to DC magnetron sputtering... 
OXYGEN | ALUMINUM | LOW-FREQUENCY MODULATION | DEPOSITION RATE | DISCHARGE CURRENT | PHYSICS, APPLIED | FILMS | BEHAVIOR | PULSED DC | MODEL | Magnetrons | Research | Sputtering (Physics) | Hysteresis
Journal Article
Thin Solid Films, ISSN 0040-6090, 03/2005, Volume 475, Issue 1-2, pp. 208 - 218
Journal Article
Thin solid films, ISSN 0040-6090, 01/2018, Volume 645, pp. 32 - 37
The presented paper describes a study concerning the synthesis of copper nitride layers by means of the pulsed magnetron sputtering (PMS... 
Pulsed magnetron sputtering | Gating frequency | OES | Copper nitride layers | THIN-FILMS | PHYSICS, CONDENSED MATTER | PHYSICS, APPLIED | MECHANISM | DEPOSITION | STABILITY | MATERIALS SCIENCE, MULTIDISCIPLINARY | RATES | RECORDING MEDIA | CU3N FILMS | GROWTH | MATERIALS SCIENCE, COATINGS & FILMS | Nitrides | Frequency modulation
Journal Article