X
Search Filters
Format Format
Format Format
X
Sort by Item Count (A-Z)
Filter by Count
Journal Article (3733) 3733
Conference Proceeding (520) 520
Dissertation (272) 272
Publication (63) 63
Book Chapter (52) 52
Book / eBook (5) 5
Book Review (2) 2
Magazine Article (2) 2
Reference (1) 1
more...
Subjects Subjects
Subjects Subjects
X
Sort by Item Count (A-Z)
Filter by Count
rf magnetron sputtering (2131) 2131
physics, applied (1156) 1156
thin films (898) 898
materials science, multidisciplinary (864) 864
physics, condensed matter (647) 647
magnetron (590) 590
rf sputtering (566) 566
deposition (555) 555
materials science, coatings & films (453) 453
sputtering (422) 422
zinc oxide (412) 412
dielectric films (404) 404
thin-films (401) 401
optical properties (389) 389
hochfrequente magnetronzerstäubung (380) 380
magnetron sputtering (365) 365
rf-magnetron sputtering (333) 333
optical-properties (327) 327
films (320) 320
thin film (311) 311
analysis (309) 309
chemistry, physical (302) 302
growth (282) 282
dünnfilm (281) 281
zno (279) 279
temperature (263) 263
engineering, electrical & electronic (255) 255
annealing (246) 246
photoluminescence (211) 211
electrical-properties (205) 205
microstructure (205) 205
coatings (180) 180
dünnschicht (176) 176
x-ray diffraction (173) 173
electric properties (163) 163
substrates (163) 163
silicon (162) 162
sputterabscheidung (162) 162
nanoscience & nanotechnology (159) 159
röntgendiffraktion (156) 156
radio frequencies (143) 143
metallurgy & metallurgical engineering (142) 142
atomic force microscopy (138) 138
radio frequency (133) 133
optics (132) 132
materials science, ceramics (131) 131
zinkoxid (128) 128
rf (126) 126
materials science (123) 123
substrate (123) 123
electrical properties (122) 122
röntgenbeugung (120) 120
transparent (120) 120
fabrication (119) 119
magnetronzerstäubung (116) 116
raumtemperatur (116) 116
glassubstrat (114) 114
pulsed-laser deposition (114) 114
tio (109) 109
physics, multidisciplinary (107) 107
substrattemperatur (104) 104
xrd (104) 104
sputter-technik (102) 102
nanostructure (101) 101
chemical-vapor-deposition (99) 99
film (99) 99
mikrostruktur (98) 98
morphology (97) 97
plasma (97) 97
optische eigenschaft (95) 95
thickness (93) 93
atomkraftmikroskopie (90) 90
argon (89) 89
nanoparticles (89) 89
oxide (89) 89
rf power (89) 89
rf-sputtering (89) 89
kristallinität (88) 88
physics (87) 87
sauerstoff (87) 87
chemistry, multidisciplinary (86) 86
titanium (85) 85
射頻磁控濺鍍 (85) 85
electrical resistivity (84) 84
薄膜 (84) 84
electrodes (83) 83
glass (83) 83
xps (83) 83
scanning electron microscopy (81) 81
elektrische eigenschaft (79) 79
electrochemistry (78) 78
indium tin oxide (78) 78
crystal structure (77) 77
elektronenmikroskopie (76) 76
oberflächenmorphologie (75) 75
optische bandlücke (75) 75
resistivity (75) 75
devices (74) 74
thin (74) 74
indium (73) 73
more...
Library Location Library Location
Language Language
Language Language
X
Sort by Item Count (A-Z)
Filter by Count
English (3847) 3847
Chinese (274) 274
Japanese (248) 248
Korean (113) 113
Spanish (6) 6
French (4) 4
Portuguese (2) 2
Indonesian (1) 1
Russian (1) 1
more...
Publication Date Publication Date
Click on a bar to filter by decade
Slide to change publication date range


physica status solidi (a), ISSN 1862-6300, 09/2016, Volume 213, Issue 9, pp. 2479 - 2484
Ferroelectric xBiInO3−(1−x)PbTiO3 (x = 0.15, 0.20, 0.25, and 0.30) thin films are deposited on (101)SrRuO3/(100)Pt/(100)MgO substrates by an RF‐magnetron... 
RF‐magnetron sputtering | Curie temperature | ferroelectricity | thin films | RF-magnetron sputtering | Thin films | Dielectric films | Analysis | Methods | Electric properties
Journal Article
Surface & Coatings Technology, ISSN 0257-8972, 11/2018, Volume 354, pp. 351 - 359
DLC based coatings are now widely used for many applications. Me-doped DLC (Me = Metal) are studied intensively in order to optimize properties such as low... 
Magnetron sputtering, RF PECVD | DLC | Metal doping | Optical Emission Spectroscopy | RAMAN-SPECTRA | ENERGY | PHYSICS, APPLIED | GROWTH-MECHANISM | COATINGS | CARBON-FILMS | MECHANICAL-PROPERTIES | MATERIALS SCIENCE, COATINGS & FILMS | Ionization | Chemical vapor deposition | Investigations | Tribology | Mechanics | Engineering Sciences | Mechanics of materials
Journal Article
Surface & Coatings Technology, ISSN 0257-8972, 11/2014, Volume 259, pp. 94 - 97
Cu(InxGa1−x) Se2 (CIGS) thin films were deposited onto soda-lime glass substrates with Mo coating via the one step radio frequency (RF) magnetron sputtering... 
RF magnetron sputtering | Cu(InxGa1 − x)Se2 (CIGS) thin film | Chalcopyrite | Substrate temperature | Se | (CIGS) thin film | Cu(In | Grain size | THIN FILMS | EMISSIONS | DEPOSITION | Field emission | CIGS | Radio frequencies | GRAIN SIZE AND SHAPE | Diffraction | Magnetron sputtering | SPUTTERING | COATINGS | CHALCOPYRITE
Journal Article
Applied Surface Science, ISSN 0169-4332, 11/2014, Volume 318, pp. 2 - 5
•Band gaps of the layer are affected by the film thickness.•Nano structured ZnO deposited.•Spectral dependence of reflectance of deposited ZnO thin films. In... 
Surface properties | ZnO | RF sputtering | Optical properties | PHYSICS, CONDENSED MATTER | PHYSICS, APPLIED | DEPOSITION | ELECTRICAL-PROPERTIES | OPTICAL-PROPERTIES | CHEMISTRY, PHYSICAL | TEMPERATURE | GROWTH | NANOROD ARRAYS | MATERIALS SCIENCE, COATINGS & FILMS | Thin films | Zinc oxide | Dielectric films | Tensiometers | Radio frequencies | Magnetron sputtering | Glass | Deposition | Energy gaps (solid state)
Journal Article
Surface & Coatings Technology, ISSN 0257-8972, 10/2013, Volume 232, pp. 600 - 605
Journal Article
Applied Surface Science, ISSN 0169-4332, 01/2011, Volume 257, Issue 7, pp. 2498 - 2502
Journal Article
Applied Surface Science, ISSN 0169-4332, 10/2014, Volume 316, Issue 1, pp. 524 - 531
•Highly preferred oriented columnar ZnO:Ni thin films were prepared by magnetron sputtering.•XRD and azimuthal studies explain the characteristics of... 
FE-SEM | VSM | RF sputtering | Ni doped ZnO | XTEM | XRD lateral profile | PHYSICAL-PROPERTIES | PHYSICS, CONDENSED MATTER | PHYSICS, APPLIED | SEMICONDUCTOR | NI-DOPED ZNO | OPTICAL-PROPERTIES | CHEMISTRY, PHYSICAL | FUTURE | GLASS | FE SEM | SPINTRONICS | ATOMIC LAYER DEPOSITION | MATERIALS SCIENCE, COATINGS & FILMS | Thin films | Zinc oxide | Ferromagnetism | Dielectric films | Analysis | Magnetic properties
Journal Article
Applied Surface Science, ISSN 0169-4332, 2009, Volume 255, Issue 11, pp. 5669 - 5673
Transparent conductive Al-doped zinc oxide (AZO) films with highly (0 0 2)-preferred orientation were deposited on quartz substrates at room temperature by RF... 
AZO film | RF magnetron sputtering | Low temperature deposition | Transparent conductive oxide | THIN-FILMS | PHYSICS, CONDENSED MATTER | PHYSICS, APPLIED | SOLAR-CELLS | OPTICAL-PROPERTIES | CHEMISTRY, PHYSICAL | PLASMA | PULSED-LASER DEPOSITION | ZINC-OXIDE FILMS | MATERIALS SCIENCE, COATINGS & FILMS | Thin films | Zinc oxide | Dielectric films | Optical properties | Analysis | Methods
Journal Article
Applied Surface Science, ISSN 0169-4332, 09/2011, Volume 257, Issue 23, pp. 10036 - 10041
Journal Article
Surface & Coatings Technology, ISSN 0257-8972, 02/2019, Volume 359, pp. 390 - 395
Journal Article
Surface & Coatings Technology, ISSN 0257-8972, 08/2013, Volume 228, Issue 1, pp. S150 - S154
Transparent conductive cadmium and tin oxide films (CdxSn1−xO TCO) prepared by RF magnetron sputtering from the mixed oxide powder targets were with similar... 
Multi-component TCO film | Closed-field unbalanced magnetron sputtering | RF sputtering | Powder targets | PHYSICS, APPLIED | CD2SNO4 | MOBILITY | TRANSPARENT CONDUCTING OXIDES | OPTICAL-PROPERTIES | CDO THIN-FILMS | PLASMA | ZN-SN-O | MATERIALS SCIENCE, COATINGS & FILMS
Journal Article
Journal of Luminescence, ISSN 0022-2313, 09/2012, Volume 132, Issue 9, pp. 2367 - 2370
Er-doped aluminum nitride films, containing different Er concentrations, were obtained at room temperature by reactive radio frequency magnetron sputtering.... 
R.F. sputtering | Erbium doping | Photoluminescence | Aluminum nitride | EXCITATION | GAN | NANOCRYSTALS | RF sputtering | OPTICS | Aluminum compounds | Nitrides | Analysis | Grain boundaries | Magnetron sputtering | Nanostructure | Excitation | Microstructure | Erbium | Materials Science | Inorganic chemistry | Condensed Matter | Optics | Material chemistry | Chemical Sciences | Physics
Journal Article
by Wang, Y and Li, Z and Liu, YS and Li, YJ and Liu, LF and Xu, D and Luo, XJ and Gao, T and Zhu, YY and Zhou, LZ and Xu, JM
JOVE-JOURNAL OF VISUALIZED EXPERIMENTS, ISSN 1940-087X, 04/2019, Issue 146
Here, we demonstrate a method of coating ferromagnetic La0.67Sr0.33MnO3 (LSMO) nanoparticles on (001) SrTiO3 (STO) single-crystal substrates by radio frequency... 
Issue 146 | THIN-FILMS | Engineering | superconductivity | nanoparticles | ARRAY | ferromagnetic | RF-sputtering | SUPERCONDUCTOR | MULTIDISCIPLINARY SCIENCES | quasi-bilayer film structure | LSMO/ (Gd) BCO films
Journal Article
Journal of Alloys and Compounds, ISSN 0925-8388, 11/2016, Volume 684, pp. 15 - 20
Cu – doped ZnO (CZO) films were synthesized by RF magnetron sputtering of composite target prepared with powders of ZnO and copper. Crystalline nature,... 
H2S | Nanocrystalline Cu-doped ZnO | RF sputtering | Gas sensor | THIN-FILMS | MATERIALS SCIENCE, MULTIDISCIPLINARY | METALLURGY & METALLURGICAL ENGINEERING | OPTICAL-PROPERTIES | CHEMISTRY, PHYSICAL | NANOSTRUCTURES | SENSING PROPERTIES | MICROSTRUCTURES | HYDROGEN
Journal Article