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Journal of Micromechanics and Microengineering, ISSN 0960-1317, 10/2013, Volume 23, Issue 10, pp. 103001 - 16
Journal Article
2010, Cambridge RF and microwave engineering series, ISBN 0521897718, Volume 9780521897716, xxviii, 412
"An up-to-date guide to the theory and applications of RF MEMS. With detailed information about RF MEMS technology as well as its reliability and applications,... 
Radio frequency microelectromechanical systems | Electronics & communications engineering | Microelectromechanical systems
Book
2003, 1st ed., ISBN 0471201693, 508
Ultrasmall Radio Frequency and Micro-wave Microelectromechanical systems (RF MEMs), such as switches, varactors, and phase shifters, exhibit nearly zero power... 
Microelectromechanical systems | Very high speed integrated circuits | TECHNOLOGY & ENGINEERING | Electronics | Microelectronics
eBook
Strain, ISSN 0039-2103, 06/2009, Volume 45, Issue 3, pp. 208 - 220
:  MEMS‐based products produced in 2005 had a value of $8bn, 40% of which was sensors. The balance was for products that included micromachined features, such... 
MEMS | industry growth | system integration | product offerings | Product offerings | Industry growth | System integration | STORAGE | INTEGRATION | RF-MEMS | MATERIALS SCIENCE, CHARACTERIZATION & TESTING | TECHNOLOGY | Microelectromechanical systems
Journal Article
2003, EMIS datareviews series, ISBN 0863413358, xxix, 275
Written as a collective work by 14 outstanding microsystems packaging specialists from US industries, government laboratories and universities, MEMS Packaging... 
Microelectromechanical systems | Microelectronic packaging
Book
IEEE Transactions on Microwave Theory and Techniques, ISSN 0018-9480, 02/2015, Volume 63, Issue 2, pp. 414 - 421
This paper presents the design, fabrication, and measurement of a reconfigurable quadrature hybrid coupler and a tunable low-loss reflective-type phase shifter... 
Micromechanical devices | Radio frequency | Base stations | capacitive switches | Phase shifters | Capacitors | tunable circuits and devices | RF microelectromechanical systems (MEMS) | Couplers | quadrature hybrid couplers | Capacitance | Transmission line measurements | phase shifters
Journal Article
2010, Springer series in optical sciences, ISBN 9781441917447, Volume 156., xi, 517
Book
IEEE Transactions on Microwave Theory and Techniques, ISSN 0018-9480, 11/2009, Volume 57, Issue 11, pp. 2834 - 2840
Journal Article
IEEE Transactions on Microwave Theory and Techniques, ISSN 0018-9480, 09/2017, Volume 65, Issue 9, pp. 3188 - 3199
Journal Article
IEEE Transactions on Microwave Theory and Techniques, ISSN 0018-9480, 02/2010, Volume 58, Issue 2, pp. 381 - 389
This paper presents a miniature high-tunable evanescent-mode cavity filter using planar capacitive RF micro-electromechanical system (MEMS) switch networks and... 
High- tunable filter | Evanescent mode | Capacitive cantilever switch | RF microelectromechanical systems (MEMS) | Waveguide filter | DESIGN | waveguide filter | WAVE-GUIDE | high-Q tunable filter | BANDPASS-FILTERS | evanescent mode | ENGINEERING, ELECTRICAL & ELECTRONIC
Journal Article
IEEE Transactions on Microwave Theory and Techniques, ISSN 0018-9480, 10/2012, Volume 60, Issue 10, pp. 3096 - 3112
Journal Article
IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, ISSN 0018-9480, 02/2015, Volume 63, Issue 2, pp. 414 - 421
This paper presents the design, fabrication, and measurement of a reconfigurable quadrature hybrid coupler and a tunable low-loss reflective-type phase shifter... 
Base stations | capacitive switches | tunable circuits and devices | RF microelectromechanical systems (MEMS) | quadrature hybrid couplers | BAND | phase shifters | ENGINEERING, ELECTRICAL & ELECTRONIC
Journal Article
IEEE Microwave and Wireless Components Letters, ISSN 1531-1309, 12/2018, Volume 28, Issue 12, pp. 1137 - 1139
Journal Article
IEEE Transactions on Microwave Theory and Techniques, ISSN 0018-9480, 02/2014, Volume 62, Issue 2, pp. 297 - 305
This paper presents the design and characterization of compact high-power RF microelectromechanical system single-pole single-throw (SPST) and single-pole... 
Radio frequency | Temperature measurement | Contacts | Force | RF microelectromechanical systems (MEMS) | switches | Pollution measurement | Springs | Stress | CAPACITORS | ENGINEERING, ELECTRICAL & ELECTRONIC | Measurement | Microelectromechanical systems | Usage | Design and construction | Network switches | Voltage | Product design | Wireless communications
Journal Article
IEEE Transactions on Microwave Theory and Techniques, ISSN 0018-9480, 11/2004, Volume 52, Issue 11, pp. 2474 - 2481
Journal Article
IEEE Transactions on Microwave Theory and Techniques, ISSN 0018-9480, 08/2012, Volume 60, Issue 8, pp. 2439 - 2447
Journal Article
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