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2010, Cambridge RF and microwave engineering series, ISBN 0521897718, Volume 9780521897716, xxviii, 412
"An up-to-date guide to the theory and applications of RF MEMS. With detailed information about RF MEMS technology as well as its reliability and applications,... 
Radio frequency microelectromechanical systems | Electronics & communications engineering | Microelectromechanical systems
Book
Nature communications, ISSN 2041-1723, 2015, Volume 6, Issue 1, p. 7519
Journal Article
Journal of micromechanics and microengineering, ISSN 1361-6439, 2013, Volume 23, Issue 10, pp. 103001 - 16
Journal Article
Journal of micromechanics and microengineering, ISSN 1361-6439, 2016, Volume 26, Issue 7, pp. 074002 - 74009
...) switches and polysilicon attenuation modules is presented. The device comprises 12 ohmic contact MEMS switches, p-type polysilicon resistive attenuation modules and microwave compensate structures... 
reconfigurable | ohmic contact | INSTRUMENTS & INSTRUMENTATION | PHYSICS, APPLIED | RF MEMS | attenuator | NANOSCIENCE & NANOTECHNOLOGY | MEMS | resistive network | microwave | switch | ENGINEERING, ELECTRICAL & ELECTRONIC | Radio frequencies | Broadband | Modules | Switches | Microwave attenuation | Attenuation | Devices | Microwaves
Journal Article
Journal of micromechanics and microengineering, ISSN 1361-6439, 2017, Volume 27, Issue 5, p. 055002
...) switches are designed, fabricated, measured and analyzed. Two types of RF MEMS switches, a shunt switch with a contact point and an inline switch without a contact point, are presented... 
coplanar waveguide | high on/off capacitance ratio | RF MEMS capacitive switch | high isolation MEMS switch | INSTRUMENTS & INSTRUMENTATION | PHYSICS, APPLIED | NANOSCIENCE & NANOTECHNOLOGY | ENGINEERING, ELECTRICAL & ELECTRONIC
Journal Article
International Journal of Modern Physics B, ISSN 0217-9792, 06/2019, Volume 33, Issue 14, p. 1950135
A study of electrical breakdown across bias and top electrodes and its effect on the reliability of RF MEMS ohmic switches is presented... 
PHYSICS, CONDENSED MATTER | PHYSICS, APPLIED | RF MEMS | Electrical breakdown | DEVICES | AIR | degradation mechanism | ELECTRIC-FIELD BREAKDOWN | PHYSICS, MATHEMATICAL | Analysis | Switches
Journal Article
Journal of Microelectromechanical Systems, ISSN 1057-7157, 02/2017, Volume 26, Issue 1, pp. 283 - 294
We present simulations of the failure of radio-frequency micro-electro-mechanical systems switches due to diffusional creep that include the quantification of uncertainty in the geometry, material... 
Uncertainty | uncertainty quantification | Creep | Force | failure | RF-MEMS | sensitivity | Mathematical model | Electrostatics | Coble creep | Stress | Strain | PHYSICS, APPLIED | BEHAVIOR | NANOSCIENCE & NANOTECHNOLOGY | MODEL | NANOCRYSTALLINE NICKEL | ENGINEERING, ELECTRICAL & ELECTRONIC | INSTRUMENTS & INSTRUMENTATION | PROPAGATION | Engineering | Science & Technology - Other Topics | Instruments & Instrumentation | Physics
Journal Article
Journal of Micromechanics and Microengineering, ISSN 0960-1317, 01/2017, Volume 27, Issue 1, p. 14001
The electrical properties of gold nanorods nanostructured silicon nitride films are comprehensively investigated with the aid of metal-insulator-metal capacitors and RF MEMS capacitive switches... 
RF MEMS capacitive switches | dielectric charging | nanostructured dielectric | reliability | VOLTAGE | DESIGN | PHYSICS, APPLIED | NANOSCIENCE & NANOTECHNOLOGY | MODEL | ENGINEERING, ELECTRICAL & ELECTRONIC | INSTRUMENTS & INSTRUMENTATION | ACTUATION | TEMPERATURE | SILICON-NITRIDE FILMS
Journal Article
Journal of Micromechanics and Microengineering, ISSN 0960-1317, 09/2016, Volume 26, Issue 10, p. 104004
Journal Article
Sensors (Switzerland), ISSN 1424-8220, 02/2019, Volume 19, Issue 4, p. 864
...) switches is reported in this paper. The switch is comprised of laterally movable triple electrodes, which are bistable by electrostatic forces applied for not only the on-state, but also the off-state... 
Low voltage | Switch | Capacitor | Fast response | Laterally movable triple electrodes | RF-MEMS | ELECTROCHEMISTRY | CHEMISTRY, ANALYTICAL | INSTRUMENTS & INSTRUMENTATION | low voltage | fast response | switch | capacitor | laterally movable triple electrodes
Journal Article
Sensors & Actuators: A. Physical, ISSN 0924-4247, 08/2015, Volume 232, pp. 202 - 207
The electrostatic actuation behaviour of the gold bridge in capacitive radio frequency microelectromechanical system switches, fabricated on GaAs substrate, is investigated... 
Double-clamped bridge | GaAs technology | Electrostatic actuation | Capacitive RF MEMS switches | DESIGN | INSTRUMENTS & INSTRUMENTATION | Capacitive RP MEMS switches | RELIABILITY | STRESS | ENGINEERING, ELECTRICAL & ELECTRONIC | Microelectromechanical systems | Actuators | Switches | Electric properties
Journal Article
Journal of micromechanics and microengineering, ISSN 1361-6439, 2018, Volume 28, Issue 5, p. 055002
Journal Article
by Pal, J and Zhu, Y and Lu, J and Dao, D and Khan, F
IEEE electron device letters, ISSN 1558-0563, 2016, Volume 37, Issue 9, pp. 1219 - 1222
Journal Article
Journal of micromechanics and microengineering, ISSN 1361-6439, 2018, Volume 28, Issue 6, p. 065001
..., up to 9.96x, on one beam than that of the other. The displacement amplification prevents unwanted input impacting-the structure switches only to the output but not the input-required by resonant switch-based mechanical circuits... 
resonant switch | displacement amplifier | resoswitch | RF MEMS | zero-quiescent power receiver | INSTRUMENTS & INSTRUMENTATION | PHYSICS, APPLIED | FILTERS | NANOSCIENCE & NANOTECHNOLOGY | ENGINEERING, ELECTRICAL & ELECTRONIC
Journal Article
Applied Physics Letters, ISSN 0003-6951, 08/2011, Volume 99, Issue 7, pp. 073501 - 073501-3
The paper investigates the actuation mechanism in floating electrode microelectromechanical system capacitive switches... 
PHYSICS, APPLIED | RELIABILITY | RF MEMS SWITCHES | MODEL
Journal Article
Applied Physics Letters, ISSN 0003-6951, 07/2008, Volume 93, Issue 2, pp. 023305 - 023305-3
We have fabricated plastic complementary microelectromechanical switches by using ink-jet printing technologies... 
LARGE-AREA | ORGANIC TRANSISTORS | MATRIX | PRESSURE | DISPLAYS | PHYSICS, APPLIED | CHANNEL | SUBSTRATE | RF-MEMS | DEVICES | FIELD-EFFECT TRANSISTORS
Journal Article
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, ISSN 0960-1317, 09/2017, Volume 27, Issue 9, p. 95013
RF MEMS capacitive shunt switches with a dielectric-on-metal (DOM) capacitor, which are widely used for microwave applications in the communication field, suffer from some serious drawbacks... 
INSTRUMENTS & INSTRUMENTATION | PHYSICS, APPLIED | stress resilience | floating metal | design flexibility | NANOSCIENCE & NANOTECHNOLOGY | RF MEMS capacitive switch | resonant frequency | MIM switch | ENGINEERING, ELECTRICAL & ELECTRONIC
Journal Article