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JAPANESE JOURNAL OF APPLIED PHYSICS, ISSN 0021-4922, 06/2019, Volume 58, Issue SC, p. SC1049
We implemented facet and flattening (FF) growth via hydride vapor phase epitaxy, and applied hexagonal SiO2 mask patterns to minimize the final threading... 
CRYSTALS | EPITAXIAL LATERAL OVERGROWTH | ELO | PHYSICS, APPLIED | CARRIER GAS | DISLOCATION DENSITY | Dislocation density | Vapor phase epitaxy | Radius of curvature | Threading dislocations | Gallium nitrides | Vapor phases | Epitaxial growth | Masks | Substrates | Silicon dioxide | Symmetry
Journal Article