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physica status solidi (a), ISSN 1862-6300, 09/2016, Volume 213, Issue 9, pp. 2479 - 2484
Ferroelectric xBiInO3−(1−x)PbTiO3 (x = 0.15, 0.20, 0.25, and 0.30) thin films are deposited on (101)SrRuO3/(100)Pt/(100)MgO substrates by an RF‐magnetron... 
RF‐magnetron sputtering | Curie temperature | ferroelectricity | thin films | RF-magnetron sputtering | Thin films | Dielectric films | Analysis | Methods | Electric properties
Journal Article
Superlattices and Microstructures, ISSN 0749-6036, 2014, Volume 72, pp. 140 - 147
In the present study, transparent conductive indium tin oxide (ITO) nanocolumns are successfully deposited on glass and silicon substrates by radio frequency... 
RF magnetron sputtering | Nanocolumns | Indium tin oxide | EVAPORATION | PHYSICS, CONDENSED MATTER | ITO THIN-FILMS | Indium | Analysis | Electric properties
Journal Article
Journal of Electronic Materials, ISSN 0361-5235, 11/2017, Volume 46, Issue 11, pp. 6444 - 6450
In this work, flexible BixTey thin films were prepared by radio frequency (RF) magnetron sputtering using a Bi2Te3 target on polyimide substrate. The effects... 
RF magnetron sputtering | thermoelectric | Flexible Bi | sputtering pressure | Flexible Bi2Te3 | PHYSICS, APPLIED | ANNEALING TEMPERATURE | COEVAPORATION | MATERIALS SCIENCE, MULTIDISCIPLINARY | ELECTRICAL-PROPERTIES | POWER | BI2TE3 | ENGINEERING, ELECTRICAL & ELECTRONIC | GAS | OPTIMIZATION
Journal Article
Surface & Coatings Technology, ISSN 0257-8972, 11/2014, Volume 259, pp. 94 - 97
Cu(InxGa1−x) Se2 (CIGS) thin films were deposited onto soda-lime glass substrates with Mo coating via the one step radio frequency (RF) magnetron sputtering... 
RF magnetron sputtering | Cu(InxGa1 − x)Se2 (CIGS) thin film | Chalcopyrite | Substrate temperature | Se | (CIGS) thin film | Cu(In | Grain size | THIN FILMS | EMISSIONS | DEPOSITION | Field emission | CIGS | Radio frequencies | GRAIN SIZE AND SHAPE | Diffraction | Magnetron sputtering | SPUTTERING | COATINGS | CHALCOPYRITE
Journal Article
Applied Surface Science, ISSN 0169-4332, 01/2011, Volume 257, Issue 7, pp. 2498 - 2502
Journal Article
Applied Surface Science, ISSN 0169-4332, 2009, Volume 255, Issue 11, pp. 5669 - 5673
Transparent conductive Al-doped zinc oxide (AZO) films with highly (0 0 2)-preferred orientation were deposited on quartz substrates at room temperature by RF... 
AZO film | RF magnetron sputtering | Low temperature deposition | Transparent conductive oxide | THIN-FILMS | PHYSICS, CONDENSED MATTER | PHYSICS, APPLIED | SOLAR-CELLS | OPTICAL-PROPERTIES | CHEMISTRY, PHYSICAL | PLASMA | PULSED-LASER DEPOSITION | ZINC-OXIDE FILMS | MATERIALS SCIENCE, COATINGS & FILMS | Thin films | Zinc oxide | Dielectric films | Optical properties | Analysis | Methods
Journal Article
Applied Surface Science, ISSN 0169-4332, 09/2011, Volume 257, Issue 23, pp. 10036 - 10041
Journal Article
Applied Surface Science, ISSN 0169-4332, 03/2020, Volume 507, p. 145131
Journal Article
Journal of Alloys and Compounds, ISSN 0925-8388, 03/2013, Volume 552, pp. 418 - 422
► Highly (112) oriented Cu2ZnSnS4 (CZTS) films were grown on glass using RF magnetron sputtering. ► We report a single process to fabricate Cu2ZnSnS4 thin film... 
RF magnetron sputtering | Texture control | Cu2ZnSnS4 (CZTS) | Photovoltaic semiconductor | SOLAR-CELLS | SUBSTRATE | MATERIALS SCIENCE, MULTIDISCIPLINARY | METALLURGY & METALLURGICAL ENGINEERING | GROWTH | CHEMISTRY, PHYSICAL | LIGHT-ABSORPTION
Journal Article
Journal of Alloys and Compounds, ISSN 0925-8388, 11/2017, Volume 725, pp. 60 - 68
Radio frequency (rf) magnetron sputtering process was optimized to deposit highly conducting and transparent polycrystalline Al-doped ZnO (ZnO:Al or AZO) films... 
RF magnetron sputtering | Deposition power | Ar working pressure | Transmittance | Resistivity | Al-doped ZnO (AZO) thin films | MATERIALS SCIENCE, MULTIDISCIPLINARY | METALLURGY & METALLURGICAL ENGINEERING | ZINC-OXIDE | ELECTRICAL-PROPERTIES | CHEMISTRY, PHYSICAL | POWER | PARAMETERS | SOLAR-CELL | MODULES | OXIDE THIN-FILMS
Journal Article
Nanoscale Research Letters, ISSN 1931-7573, 12/2012, Volume 7, Issue 1, pp. 1 - 7
Journal Article
Surface and Interface Analysis, ISSN 0142-2421, 09/2016, Volume 48, Issue 9, pp. 963 - 968
Journal Article
Journal of Alloys and Compounds, ISSN 0925-8388, 06/2018, Volume 750, pp. 228 - 234
Dielectric materials with high energy-storage density and efficiency have great potential applications in modern electric and electronic devices. In this work,... 
RF magnetron sputtering | Energy-storage performance | Thin film | DENSITY | DIELECTRIC-PROPERTIES | MATERIALS SCIENCE, MULTIDISCIPLINARY | METALLURGY & METALLURGICAL ENGINEERING | ELECTRICAL-PROPERTIES | CHEMISTRY, PHYSICAL | LEAD | CERAMICS | Thin films | Annealing | Electrical conductivity | Dielectric films | Dielectrics | Electric properties
Journal Article
IEEE Transactions on Electron Devices, ISSN 0018-9383, 11/2019, Volume 66, Issue 11, pp. 4774 - 4777
High-performance aluminum-zinc-oxide (AZO) thin-film transistors (TFTs) were fabricated on glass substrates using RF magnetron sputtering at different powers... 
Performance evaluation | Radio frequency | Annealing | thin-film transistor (TFT) | RF magnetron sputter | Logic gates | Thin film transistors | bias-stress stability | power | Aluminum-Zinc-Oxide | Sputtering | Stress | PHYSICS, APPLIED | ELECTRICAL-PROPERTIES | OPTICAL-PROPERTIES | ENGINEERING, ELECTRICAL & ELECTRONIC | ENHANCEMENT | TRANSPARENT
Journal Article