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2004, ISBN 0815514832, xiv, 518
An invaluable resource for industrial science and engineering newcomers to sputter deposition technology in thin film production applications, this book is... 
Cathode sputtering (Plating process) | Thin films | Energy Technology & Engineering
Book
2016, Springer Theses. Recognizing Outstanding Ph.D. Research, ISBN 3662494043
Web Resource
Journal of Physics Condensed Matter, ISSN 0953-8984, 06/2018, Volume 30, Issue 27, pp. 274004 - 274004
Nanopatterning at solid surfaces by ion beam sputtering (IBS) has been practiced mostly for stationary substrates with an ion beam incident under a fixed... 
ion beam | dual ion beam sputtering | swing during ion beam sputtering | nanopatterning | sequential ion beam sputtering | rocking during ion beam sputtering | sputtering | PHYSICS, CONDENSED MATTER | MECHANISM | NANOSTRUCTURES | PATTERN-FORMATION | EVOLUTION | SURFACE
Journal Article
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, ISSN 0168-583X, 05/2019
Journal Article
Scientia et Technica, ISSN 0122-1701, 2011, Volume 2, Issue 48, pp. 218 - 223
Journal Article
Thin Solid Films, ISSN 0040-6090, 05/2019
Journal Article
11/2010, Topics in Applied Physics Ser., ISBN 9783642079443, Volume 110
Annotation This book provides a long-needed survey of new results. Especially welcome is a new summary of the measured and calculated sputtering yields with an... 
Sputtering (Physics) | Science
Web Resource
11/2010, Topics in Applied Physics Ser., ISBN 9783642079443, Volume 110
Annotation This book provides a long-needed survey of new results. Especially welcome is a new summary of the measured and calculated sputtering yields with an... 
Sputtering (Physics) | Science
Web Resource
Physical Review Letters, ISSN 0031-9007, 08/2013, Volume 111, Issue 6, pp. 066602 - 066602
The inverse spin Hall effect (ISHE) has been observed only in nonmagnetic metals, such as Pt and Au, with a strong spin-orbit coupling. We report the... 
MAGNETORESISTANCE | PHYSICS, MULTIDISCIPLINARY | SPUTTERING YIELDS
Journal Article
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