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sraf (114) 114
opc (69) 69
ret (32) 32
lithography (31) 31
optical proximity correction (24) 24
sub-resolution assist feature (23) 23
process window (20) 20
ilt (19) 19
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printing (4) 4
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bossung tilt (3) 3
calibre (3) 3
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model based sraf (3) 3
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nanoscience & nanotechnology (3) 3
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Proceedings of SPIE - The International Society for Optical Engineering, ISSN 0277-786X, 2016, Volume 9985
Conference Proceeding
Proceedings of SPIE - The International Society for Optical Engineering, ISSN 0277-786X, 2017, Volume 10451
Conference Proceeding
Proceedings of SPIE - The International Society for Optical Engineering, ISSN 0277-786X, 2018, Volume 10810
Conference Proceeding
Proceedings of SPIE - The International Society for Optical Engineering, ISSN 0277-786X, 2017, Volume 10451
Conference Proceeding
Proceedings of SPIE - The International Society for Optical Engineering, ISSN 0277-786X, 2018, Volume 10810
Conference Proceeding
Proceedings of SPIE - The International Society for Optical Engineering, ISSN 0277-786X, 2009, Volume 7274
Contact hole patterning and especially sub resolution assist feature (SRAF) insertion and optical proximity correction (OPC) have become an extremely critical... 
Off-axis | SRAF | OPC | Contacts
Conference Proceeding
Proceedings of SPIE - The International Society for Optical Engineering, ISSN 0277-786X, 2016, Volume 9781
Conference Proceeding
Proceedings of SPIE - The International Society for Optical Engineering, ISSN 0277-786X, 2018, Volume 10810
ILT | ILS | MPC | SRAF | VSB | CDOF | EUV | MBMW
Conference Proceeding
Proceedings of SPIE - The International Society for Optical Engineering, ISSN 0277-786X, 2016, Volume 9985
Conference Proceeding
Proceedings of SPIE - The International Society for Optical Engineering, ISSN 0277-786X, 2014, Volume 9052
Conference Proceeding
Proceedings of SPIE - The International Society for Optical Engineering, ISSN 0277-786X, 2013, Volume 8681
We have succeeded in quantifying changes in 2D pattern shape, which are induced by exposure condition and Optical Proximity Correction (OPC), from CD-SEM... 
SRAF | OPC | Shape | Quantification | Contour | CD-SEM | Metal | Dimensional measurements | Cadmium | Patterning | Lithography | Process control | Images | Exposure | Two dimensional
Conference Proceeding
Proceedings of SPIE - The International Society for Optical Engineering, ISSN 0277-786X, 2018, Volume 10583
Conference Proceeding
Proceedings of SPIE - The International Society for Optical Engineering, ISSN 0277-786X, 2009, Volume 7379
This paper describes a novel technology Variable Sensitivity Detection (VSD) for de-sensing SRAF nuisance defects in a mask inspection system. The point of our... 
De-sense | SRAF | Photo-mask | Defect inspection
Conference Proceeding
Proceedings of SPIE - The International Society for Optical Engineering, ISSN 0277-786X, 2014, Volume 9053
Conference Proceeding
Proceedings of SPIE - The International Society for Optical Engineering, ISSN 0277-786X, 2012, Volume 8326
Conference Proceeding
Proceedings of SPIE - The International Society for Optical Engineering, ISSN 0277-786X, 2009, Volume 7379
Improvements in resolution of exposure systems have not kept pace with increasing density of semiconductor products. In order to keep shrinking circuits using... 
RET | SRAF | OPC | 32nm & below | Lithographic performance | Low-k1 | Mask cost | MEEF | Depth of focus | Inverse lithography technology
Conference Proceeding
Proceedings of SPIE - The International Society for Optical Engineering, ISSN 0277-786X, 2018, Volume 10587
Conference Proceeding
Proceedings of SPIE - The International Society for Optical Engineering, ISSN 0277-786X, 2018, Volume 10583
Conference Proceeding
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