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science & technology (34) 34
physical sciences (30) 30
chemistry (22) 22
technology (21) 21
materials science (15) 15
chemistry, physical (14) 14
silicon (13) 13
physics (12) 12
materials science, multidisciplinary (11) 11
analysis (9) 9
physics, condensed matter (8) 8
materials science, coatings & films (7) 7
physics, applied (7) 7
bonds (6) 6
exact sciences and technology (6) 6
chemical bonds (4) 4
chemistry, inorganic & nuclear (4) 4
cross-disciplinary physics: materials science; rheology (4) 4
electrochemistry (4) 4
engineering (4) 4
metallurgy & metallurgical engineering (4) 4
si-substrat (4) 4
silicon compounds (4) 4
spektroskopie (4) 4
thin films (4) 4
chemical properties (3) 3
chemical vapor deposition (3) 3
chemistry, analytical (3) 3
electric properties (3) 3
engineering, chemical (3) 3
ftir-spektroskopie (3) 3
kupfer (3) 3
photoluminescence (3) 3
photolumineszenz (3) 3
plasma-cvd (3) 3
precursors (3) 3
siliciumdioxid (3) 3
silicon dioxide (3) 3
silicon substrates (3) 3
studies (3) 3
1,3-butadiene (2) 2
ammonia (2) 2
annealing (2) 2
austausch (2) 2
band gap (2) 2
bandlücke (2) 2
benchmarking (2) 2
bond dissociation energy (2) 2
bonding strength (2) 2
butadiene (2) 2
catalysis (2) 2
catalysts (2) 2
chemical etching (2) 2
chemical sciences (2) 2
chemical synthesis (2) 2
chemische bindung (2) 2
chemisches aufdampfen (2) 2
condensed matter: electronic structure, electrical, magnetic, and optical properties (2) 2
copper (2) 2
density functionals (2) 2
dft (2) 2
dielectric films (2) 2
dielectrics (2) 2
electrodes (2) 2
electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures (2) 2
environmental sciences (2) 2
environmental sciences & ecology (2) 2
ethanol (2) 2
exchange (2) 2
geometry optimization (2) 2
glass (2) 2
hydrogen (2) 2
hydrogenation (2) 2
instruments & instrumentation (2) 2
investigations (2) 2
life sciences & biomedicine (2) 2
magnesium oxide (2) 2
methods of deposition of films and coatings; film growth and epitaxy (2) 2
microstructure (2) 2
molecular structure (2) 2
nitrides (2) 2
nmr spectroscopy (2) 2
passivation (2) 2
passivierung (2) 2
plasma-enhanced chemical vapor deposition (2) 2
röntgendiffraktion (2) 2
röntgenphotoelektronenspektroskopie (2) 2
si[sbnd]o bond cleavage (2) 2
si[sbnd]x (2) 2
sio bond cleavage (2) 2
sio2 (2) 2
thermal annealing (2) 2
thermisches ausheilen (2) 2
x-ray diffraction (2) 2
x-ray spectroscopy (2) 2
2 dimensional nanostructure (1) 1
27al and 29si ssnmr (1) 1
2d-hyscore (1) 1
9-cycloheptatrienylidene fluorene (1) 1
[chim.theo]chemical sciences/theoretical and/or physical chemistry (1) 1
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