X
Search Filters
Format Format
Subjects Subjects
Subjects Subjects
X
Sort by Item Count (A-Z)
Filter by Count
materials science, coatings & films (4) 4
pecvd (4) 4
physics, applied (4) 4
analysis (3) 3
chemical-vapor-deposition (3) 3
physics, condensed matter (3) 3
thin-films (3) 3
carbon (2) 2
ceramic materials (2) 2
ceramics (2) 2
chemical vapor deposition (2) 2
ftir (2) 2
graphene (2) 2
low- k dielectrics (2) 2
low-k dielectrics (2) 2
materials science, multidisciplinary (2) 2
mtes (2) 2
raman spectroscopy (2) 2
silicon compounds (2) 2
silicon oxycarbide (2) 2
sioc (2) 2
sioc ceramics (2) 2
[ chim.mate ] chemical sciences/material chemistry (1) 1
abscheidungsrate (1) 1
additiv (1) 1
additive (1) 1
aluminum (1) 1
amorphous-silicon-oxycarbide (1) 1
argon (1) 1
atmospheric pressure (1) 1
atmosphärischer druck (1) 1
barium (1) 1
barrier discharge (1) 1
bonds (1) 1
boron nitride (1) 1
capacitors (1) 1
carbon content (1) 1
carbon-content (1) 1
carbongehalt (1) 1
carbonitride ceramics (1) 1
ceramic-materials (1) 1
chemical sciences (1) 1
chemistry, analytical (1) 1
chemistry, physical (1) 1
circuit components (1) 1
coatings (1) 1
cross-linking (1) 1
dense (1) 1
deposition (1) 1
dilution (1) 1
divinylbenzene (1) 1
divinylbenzol (1) 1
doped silicon-oxide (1) 1
dünnschicht (1) 1
edelgas (1) 1
electrical conductivity (1) 1
electronic components industry (1) 1
flexural strength (1) 1
flow rate (1) 1
functional-group (1) 1
funktionelle gruppe (1) 1
glasses (1) 1
glow plasma (1) 1
graphen (1) 1
graphene nanocomposites (1) 1
graphitic clusters (1) 1
h composite films (1) 1
hardness (1) 1
helium (1) 1
hot-pressing (1) 1
hydrosilylation reaction (1) 1
hydroxides (1) 1
härte (1) 1
inert-atmosphere (1) 1
inerte atmosphäre (1) 1
infrared-spectroscopy (1) 1
interconnects (1) 1
irradiation (1) 1
keramik (1) 1
laser-raman-spectroscopy (1) 1
lichtemission (1) 1
low- k materials (1) 1
low-k (1) 1
low-k films (1) 1
low-k materials (1) 1
mass spectrometry (1) 1
mass-spectrometry (1) 1
massenspektroskopie (1) 1
material chemistry (1) 1
materials science, ceramics (1) 1
nanocomposite-materials (1) 1
nanokomposit (1) 1
nitrogen (1) 1
nonequilibrium (1) 1
oxicarbid (1) 1
oxidation (1) 1
oxycarbide (1) 1
oxycarbide glasses (1) 1
oxygen (1) 1
plasma-cvd (1) 1
more...
Language Language
Publication Date Publication Date
Click on a bar to filter by decade
Slide to change publication date range


Surface & Coatings Technology, ISSN 0257-8972, 12/2016, Volume 307, pp. 1065 - 1069
In this study, we synthesized SiOC(H) films by atmospheric pressure plasma enhanced CVD from trimethylsilane and oxygen gas diluted by helium, argon and... 
SiOC([sbnd]H) | PECVD | Atmospheric pressure | Hardness | Thin film | THIN-FILMS | NONEQUILIBRIUM | PHYSICS, APPLIED | CHEMICAL-VAPOR-DEPOSITION | LOW-K | AMORPHOUS-SILICON-OXYCARBIDE | SILANE | GLOW PLASMA | SiOC(-H) | TRIMETHYLSILANE | COATINGS | BARRIER DISCHARGE | MATERIALS SCIENCE, COATINGS & FILMS | Silicon compounds | Hydroxides | Chemical vapor deposition | Analysis | Bonds | Oxygen | Dilution | Flow rate | Argon | Helium | Nitrogen
Journal Article
Applied Surface Science, ISSN 0169-4332, 2007, Volume 253, Issue 21, pp. 8788 - 8793
Journal Article
Thin Solid Films, ISSN 0040-6090, 2007, Volume 515, Issue 12, pp. 5040 - 5044
Low dielectric constant SiOC(–H) thin films were deposited by plasma enhanced chemical vapor deposition (PECVD) using methyltriethoxysilane (MTES) and oxygen... 
MTES | SiOC( [sbnd]H) | PECVD | Low- k dielectrics | SiOC(-H) | PHYSICS, CONDENSED MATTER | PHYSICS, APPLIED | TRANSFORM INFRARED-SPECTROSCOPY | MATERIALS SCIENCE, MULTIDISCIPLINARY | DOPED SILICON-OXIDE | low-k dielectrics | MATERIALS SCIENCE, COATINGS & FILMS | CARBON CONTENT
Journal Article
Journal of Analytical and Applied Pyrolysis, ISSN 0165-2370, 01/2017, Volume 123, pp. 296 - 306
Journal Article
Journal of the European Ceramic Society, ISSN 0955-2219, 02/2018, Volume 38, Issue 2, pp. 487 - 493
The electrical and thermal conductivities of bulk barium-added silicon oxycarbide (SiOC-Ba) ceramics are investigated. The SiOC-Ba ceramics exhibited improved... 
Thermal conductivity | Silicon oxycarbide | Electrical conductivity | Hot-pressing | Graphitic clusters | FLEXURAL STRENGTH | DENSE | CARBONITRIDE CERAMICS | GRAPHENE | SIOC CERAMICS | MATERIALS SCIENCE, CERAMICS | GLASSES | Barium | Silicon carbide | Siloxanes | Sintering | Boron nitride | Silicon | Precipitation (Meteorology) | Ceramics | Raman spectroscopy | Ceramic materials
Journal Article
No results were found for your search.

Cannot display more than 1000 results, please narrow the terms of your search.